8.27.2 - Olympus 12 um Pitch Measurement Specification
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Measurement Specification: 8.27.2 - Olympus 12 um Pitch on (olympus)
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Description:This monitor tracks the average pitch, standard deviation, and range of a 5-point measurement of lines and spaces etched into a Si substrate. Process Staff should be notified if the 5-point measurement of the standard is more than +/- 5%
Measurement Performance
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Tool:(olympus)
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Standard:MNL Standard 12 µm Pitch
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Location of Saved Data:Saved Data\QM\yearmonthdate_12MNL.lext and Saved Data\QM\yearmonthdate_12MNL.pdf
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Tool Specifications
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StepToolSettings
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8.27.2 - Measure(olympus)Lines and spaces should be aligned vertically in field of view, height mode, 50x objective, 1x zoom, set laser intensity to 37.0, use surface correction to level sample.
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Output Response
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ResponseDescriptionTarget
(um)
USL
(um)
LSL
(um)
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Average pitch5-point average of measurements taken at even intervals along pitch.

USL and LSL are at +/- 5% of target.
12.00012.60011.400
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For more information: tinyurl.com/olympus-12
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