IBD Particulates 2015

	A	B	C	D	E	F	G	H	I	J	K
1											Mike Silva/Comments
2	Date	Film	Time(sec)	Tool	LPD count, all size particles(0.160-1.600)um		Delta (all size particles)	LPD, ONLY particles size#1( 0.160-0.213)um		Delta (particle size(#1))	Mike Silva/Comments

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4					before deposition	after depsotion	LPDad-LPDbd	before deposition	after depsotion	LPDad-LPDbd
5	Date
6							Particles in SiO2
7	9/22/2014	SiO2	900	IBD	193	658	465	64	434	370
8	11/14/2014	SiO2	900	IBD	163	967	804	63	458	395
9	1/20/2015	SiO2	900	IBD	163	744	581	45	225	180
10	2/17/2015	SiO2	900	IBD	181	1771		50	636		Tool open day before, LPD fail
11	6/15/2015	SiO2	900	IBD	244	1213	969	122	331	209
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14							Particles in Ta2O5
15	9/22/2014	Ta2O5	900	IBD	372	821	449	106	194	88
16	11/14/2014	Ta2O5	900	IBD	184	744	560	81	277	196
17	1/20/2015	Ta2O5	900	IBD	417	587	170	317	342	25
18	2/17/2015	Ta2O5	900	IBD	88	9840		25	4434		Tool open day before, LPD fail
19	6/15/2015	Ta2O5	900	IBD	265	1071	806	148	572	424
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