ABCDEFGHIJKLMNOPQ
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Thickness, AIndex @632.8nmThickn. Uniformity, %
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MinMaxMinMaxComment/Mike SIlva
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Datecenter of wafer1cm from edgecenter of wafer1cm from edge
Thickness Uniformity, %
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09-05-193278.203147.601.4731.47297.97Thicker in the center
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09-06-193280.133155.331.4721.47298.06Thicker in the center
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Average:3279.173151.471.4731.47298.01
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Avg.+2%3344.753214.491.5021.501
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Avg.-2%3213.583088.441.4431.443
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Max3280.133155.331.4731.472#REF!
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Min3278.203147.601.4721.472#REF!
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