opf_equipment downtime_maintenance log
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PHOOPF: 8th Floor Optoelectronic Processing Facility Equipment Maintenance Downtime Log
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Color Code DefinitionsDOWN - Equipment not usable
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UP - Equipment is operational
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Partially Operational - Equipment may be usable contact Lab Manager
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DateEquipmentStatusFollow on NotesSystem Update
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02/05/13Reactive Ion EtcherPartially OperationalForeline fomblin pump only pump down to 1000mT. Place backup non fomblin pump for halocarbon and pure gases only. NO Cl2 gas to be used until fomblin pump is repairParts on Order
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01/29/13CHA EvaporatorDOWNTroubleshooting no HV to e-gun. Problem HV power supply.Service in process
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12/06/12Edwards Thermal EvaporatorUPTMP shut down, problem TMP keeps shutting down. Problem is due to vacuum leak in the system. Leak check with helium leak detector, problem found in electrical feed through, remove and blanked port off, pressure 1.0x10-7 torr. Service Complete
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11/26/12Edwards Thermal EvaporatorDOWNTMP shut down, problem TMP keeps shutting down when taking to pump down system. Service in process
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10/19/12Deep Silicon ICP Reactive Ion EtcherUPSerial com fault and main process chamber leak resolvedService Complete
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09/11/12Headway Photoresist SpinnersUPPurchased NEW controller. Old controller repair and store away as backupService Complete
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08/22/12Headway Photoresist SpinnersDOWNspinner controller sent out for repairs again. Someone started Recalibration mode and not completed it cause controller to lockup. Keypad not active.Service in process
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08/21/12Headway Photoresist SpinnersUPSpinner controller installed, recipe reloaded, test - okService Complete
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08/06/12Headway Photoresist SpinnersDOWNSpinner controller sent out for repairsService in process
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08/03/12Heidelberg Direct Write DWL66UPproblem with cable to electronics rack - AODIM internal fixed - Keith Calibrated 10mm and 2mm Service Call Completed
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08/01/12Deep Silicon ICP Reactive Ion EtcherDOWNEdwards roughing pump installed, but problem with main PC computer and serial com facultService in process
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07/25/12Heidelberg Direct Write DWL66DOWNFTP and laser output problem.Service in process
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06/27/12Heidelberg Direct Write DWL66UPelectronic rack installed by Kris and test system - okService Call Completed
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05/22/12Deep Silicon ICP Reactive Ion EtcherDOWNedwards roughing sent back for overhaul Service in process
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05/07/12Heidelberg Direct Write DWL66DOWNwater leak damage electronic rack, rack sent back to Germary for repairs.Service in process
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02/17/12Edwards EBeam EvaporatorUPReplaced Heat Exchanger, cryopump operational Service Complete
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02/15/12Edwards EBeam EvaporatorDOWNCryopump fail and regen in progress. Need to replace Heat Exchanger - cryopump compressor over heating.Service in process
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02/13/12Reactive Ion EtcherUPReplaced D40B pump with rebuilt D25BCS pump with filter and formblin oilService Complete
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12/21/11Reactive Ion EtcherPartially OperationalTemporary pump put on (D40B) non formblin oilParts on Order
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12/18/11Reactive Ion EtcherDOWNMechanical pump failed, send out for repairsService in process
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12/16/11Deep Silicon ICP Reactive Ion EtcherUPReplaced MKS pressure gauge sensorService Complete
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11/22/11Deep Silicon ICP Reactive Ion EtcherPartially OperationalProblem to Gate Time Out Fault determine. Need to order part to fix this problem.Parts on Order
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10/27/11Rapid Thermal AnnealerUPCoolant lines flush and test okService Call Completed
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10/20/11Rapid Thermal AnnealerDOWNWater coolant flow problemService in process
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10/19/11Edwards Thermal EvaporatorPartially OperationalBacking Valve FaultyParts on Order
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09/20/11Deep Silicon ICP Reactive Ion EtcherDOWNGate Time Out FaultParts on Order
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06/21/11Deep Silicon ICP Reactive Ion EtcherUPGate Valve installed and system check out - operationalService Complete
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04/26/11Deep Silicon ICP Reactive Ion EtcherDOWNLoad Lock Gate Valve out for repairsService in process
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12/20/10Reactive Ion EtcherUPRepair pump installedService Complete
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11/22/10Reactive Ion EtcherDOWNMechanical pump leaking oil, send out for repairsService in process
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11/30/10Thermal Oxide FurnaceUPpower supply installed and unit operationalService Complete
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11/16/10Rapid Thermal AnnealerUPWater leak repair and quartz chamber cleaned.Service Complete
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11/10/10Rapid Thermal AnnealerDOWNWater leak in cooling line to front door. Parts on Order
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11/02/10Heidelberg Direct Write DWL66UPReplace user PC with Dell and reloaded software and drivers. Calibrate and testService Complete
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10/29/10Thermal Oxide FurnaceDOWNError E-02 Parts on Order
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10/16/10Heidelberg Direct Write DWL66DOWNUser PC hard drive crashService in process
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10/13/10Headway Photoresist SpinnersUPHeadway to replace controller - no chargeService Complete
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10/07/10Headway Photoresist SpinnersDOWNWill not spin Service in process
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09/29/10Deep Silicon ICP Reactive Ion EtcherUPVAT Gate load lock interlock problem. Call service tech support for help and scheduling service engineer for field service repair. Problem was bad gate valve solenoid.Service Call Completed
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09/26/10Headway Photoresist SpinnersUPService Complete
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09/24/10Sharon EBeam EvaporatorUPService Complete
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09/21/10Dicing SawUPDrain installed and tested.Service Complete
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09/21/10Headway Photoresist SpinnersDOWNController problem sent out for repairs.Service in process
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09/21/10Sharon EBeam EvaporatorDOWNRoughing pump problemService in process
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09/13/10Edwards Thermal EvaporatorUPInstall roughing pump and test system out.Service Complete
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08/31/10Deep Silicon ICP Reactive Ion EtcherUPService Complete
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08/31/10Deep Silicon ICP Reactive Ion EtcherDOWNVAT Gate load lock interlock problem. Call service tech support for help and scheduling service engineer for field service repair.Service in process
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08/20/10SputtererUPService Complete
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08/20/10Edwards Thermal EvaporatorDOWNRoughing pump bearings making very loud noises. Shut tool down and send pump out for repairs.Service in process
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08/19/10Deep Silicon ICP Reactive Ion EtcherDOWNRan out of SF6 gas Parts on Order
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08/16/10Reactive Ion EtcherUPService Complete
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08/16/10SputtererDOWNHeater, RF rotational stage, throttle valve installation.System Hardware Upgrade
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08/13/10Reactive Ion EtcherDOWNNo nitrogen gas for tool.Parts on Order
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08/04/10Reactive Ion EtcherUPMaintenance Complete
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08/04/10Dicing SawPartially OperationalWaiting for Drain to be install by BU plumbers.Service in process
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07/28/10Reactive Ion EtcherDOWNPM and Endpoint detection system upgrade.System Hardware Upgrade
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07/23/10Dicing SawDOWNOld dicing saw decommission and New dicing saw installedService in process
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06/24/10Deep Silicon ICP Reactive Ion EtcherUPPump return and installed, check system out - operational.Service Complete
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06/11/10Deep Silicon ICP Reactive Ion EtcherDOWNBooster pump leaking oil, shut down tool, disconnect pump and ship out for repairs.Service in process
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06/08/10Deep Silicon ICP Reactive Ion EtcherUPBuild compress air system repair and tool is operational again.Service Complete
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05/12/10Heidelberg Direct Write DWL66UPLaser Diode Install and system check out - operationalService Complete
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05/10/10Heidelberg Direct Write DWL66Partially OperationalLaser Diode ReplacementService in process
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05/05/10Deep Silicon ICP Reactive Ion EtcherDOWNProblem with building compress air system.Service in process
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04/13/10Thermal Oxide FurnaceUPBattery install and microcontroller tested at the factory. Microcontroller installed and furnace tested - ok.Service Complete
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03/30/10Thermal Oxide FurnaceDOWNNeed to order battery for the microcontroller.Parts on Order
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02/12/10VASE EllipsometerUPReplaced Chopper motor and driverService Complete
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02/11/10Rapid Thermal AnnealerUPReplaced Cooling Fan and Magnetic on water interlock switch. Service Complete
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02/04/10VASE EllipsometerPartially OperationalChopper motor and/or driver board partially working. Have to reboot entire system 3 to 5 times
to get system to operate properly.
Service in process
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02/04/10Sharon EBeam EvaporatorDOWNCryopump compressor damage.Parts on Order
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02/02/10Rapid Thermal AnnealerPartially OperationalCooling Fan and water interlock working partiallyParts on Order
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02/01/10Edwards EBeam EvaporatorUPRegen completedService Complete
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01/29/10Edwards EBeam EvaporatorDOWNCryopump fail and regen in progress.Service in process
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01/21/10CHA EvaporatorUPService Call Completed
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01/19/10CHA EvaporatorDOWNError message - ERR-GLASSMAN PS-OFFLINE, call tech support for assistant.Service in process
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01/08/10Rapid Thermal AnnealerUPService Complete
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01/05/10Rapid Thermal AnnealerDOWNWater interlock problem, call technical support.Service in process
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12/07/09Deep Silicon ICP Reactive Ion EtcherDOWNDefective DI water pump on chiller. Part on order.Parts on Order
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12/04/09Reactive Ion EtcherUPRebuilt pump installed and test run overnight.Service Complete
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12/04/09SputtererPartially OperationalAnother RF matching network unit defective and sent to BU EDF for repairs, lead time on parts is
4 weeks.
Parts on Order
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11/17/09SputtererPartially OperationalRF matching network unit defective and sent back for repairs, lead time is 3-4 weeks.Service in process
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11/04/09Edwards EBeam EvaporatorUPCryopump regen completely and cryopump temperature at 10K.Service Complete
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11/02/09Edwards EBeam EvaporatorDOWNCryopump fail and regen in progress.Service in process
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11/02/09Deep Silicon ICP Reactive Ion EtcherUPRoughing pump repair and valve 1 did not close error message problem resolved.Service Complete
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09/30/09Edwards EBeam EvaporatorUPCryopump regen completely and cryopump temperature at 10K.Service Complete
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09/25/09Edwards EBeam EvaporatorDOWNCryopump fail and regen in progress.Service in process
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09/24/09MA6 Mask AlignerUPInstall new BSA motorService Complete
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09/15/09MA6 Mask AlignerPartially OperationalService engineer visit routine PM found that BSA on the left hand side is not functioning. Need to order new BSA motor.Parts on Order
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08/29/09Heidelberg Direct Write DWL66UPIP address fixed. Everything is working.Service Complete
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08/21/09Heidelberg Direct Write DWL66DOWNComputer is not converting file and sending to other computer.Service in process
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08/04/09Deep Silicon ICP Reactive Ion EtcherDOWNTool circuit breaker tripped. Booster pump water coolant lines blocked. On 09/18/09 pump had to be sent out for repairs.Service in process
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07/17/09Edwards EBeam EvaporatorUPReplace Penning vacuum gauge.Service Complete
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