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TimestampSystem IDProcess NameGroup NameProject NumberProject Leader NameUser NameUser e-MailUser Contact numberDesired DateNo. of SampleSample SizeJob TypeOxidation StepRequired ThicknessOxidation StepRequired ThicknessOxidation StepRequired ThicknessDiffusion StepTemperatureTimeAmbientRemarksSCHEDULED Date & TimeJob Copletion DateRemarks
2
12/30/2016 11:24:32ABJOxidation & DiffusionMEMSPSC-0102Rahul prajeshRamesh
ramfagana123@gmail.com
239512/30/201614"(Half Wafer)OxidationDry20nm1100
3
8/11/2017 9:54:23ABJOxidation & DiffusionSensor & ActuatorsGAP-6511Dr. Kamaljit RangraAmit KumarAmitfiem88@gmail.com22768/14/201752 InchOxidationDry10 nmWet980 nmDry10 nm1040 Degree180 minute
4
8/11/2017 16:19:38ABJOxidation & Diffusion
Optoelectronics & MOEMS
DST Inspire FacultyDr Suchandan PalDebashree Banerjeedebashree@ceeri.res.in98206980858/11/201753 inchOxidationWet350 nm1000 C55 minutes
5
8/11/2017 16:22:47ABJOxidation & DiffusionFlexible ElectronicsCLP 6553Dr Jamil Akhtar
Devesh and Subimal majee
barshiliadevesh@gmail.com
23598/11/2017122 inchOxidationDryWetDry350 nm110080 minnitrogen
6
8/16/2017 9:42:00ABJOxidation & DiffusionSensor & ActuatorsGAP-6511Dr. Kamaljit RangraAmit KumarAmitfiem88@gmail.com22768/17/201752 InchOxidationDry10 nmWet980 nmDry10 nm1100 Degree140 min
7
8/16/2017 10:24:20ABJOxidation & DiffusionSensor & ActuatorsCLP6553Dr Jamil AkhtarSanjeev Kumarsanju.ceeri@yahoo.co.in22978/17/201752"OxidationDry10nmWet1.0 micronDry10 nm1100 degree160 minInert
8
8/16/2017 16:42:51ABJOxidation & DiffusionProcess TechnologiesMicro CantileverR MukhiyaR Mukhiyarmukhiya@ceeri.res.in 24368/16/201763-inch45030 minutesNitrogen Sintering
9
8/17/2017 18:11:43ABJOxidation & DiffusionProcess TechnologiesMLP-107R MukhiyaR Mukhiyarmukhiya@ceeri.res.in 24368/18/201763-inch45030 minutesNitrogenSintering
10
8/21/2017 9:59:24ABJOxidation & DiffusionNano BiosensorMLP-104Dr. Ajay AgarwalRahulrahulprajesh@gmail.com23958/21/2017203"OxidationWet1 um1100
11
8/21/2017 10:35:25ABJOxidation & DiffusionFlexible ElectronicsExploratoryT Eshwareshwar@ceeri.res.in24568/22/201762 inch diaOxidationDry10nmWet950nmDry10nm~1050~3 hrsO2
12
8/21/2017 17:56:53ABJOxidation & Diffusion
Optoelectronics & MOEMS
DST INSPIRE FacultyDr Suchandan PalDebashree Banerjeeshree.ban@gmail.com73400851978/24/201753 inch waferOxidationWet350 nm55 min wet oxidation
13
8/23/2017 11:13:08ABJOxidation & DiffusionSensor & ActuatorsPhD WorkDr Jamil AkhtarSanjeev Kumarsanju.ceeri@yahoo.co.in22978/23/201763"DiffusionPhosphorus950
25 min+40 min(Drive in Nitrogen Ambient)
14
8/29/2017 9:33:30ABJOxidation & DiffusionSensor & ActuatorsPhD workDr Jamil AkhtarSanjeev Kumarsanju.ceeri@yahoo.co.in22978/30/201763"DiffusionPhosphorus950
25min +40 min(Drive in Nitrogen Ambient)
15
8/30/2017 11:13:12ABJOxidation & DiffusionSensor & Actuators
Exploratory work for Neutron Detector
Dr. Mahanth PrasadMr. Amit Kumar Sharma23328/31/20172 inchOxidationDry1000 AWet1.1 MICRONWet1000 A1050 C
16
8/30/2017 11:16:27ABJOxidation & DiffusionSensor & Actuators
Exploratory work for Neutron Detector
Dr. Mahanth PrasadMr Amit Kumarmahanth@ceeri.res.in23328/31/201762 inchOxidationDry1000AWet1.1 MICRONDry1000A
17
9/6/2017 9:51:13ABJOxidation & DiffusionSensor & Actuators
exploratory work for FBAR
Dr Mahanth PrasadDr Mahanth Prasdamahanth@ceeri.res.in23329/7/2017104 inch wafersOxidationDry0.1 miccronWet1Dry0.1 micron
18
9/6/2017 17:01:03ABJOxidation & DiffusionSensor & ActuatorsPh.D. WorkDr. Kamaljit RangraRaju Patelraju.sbcet@gmail.com22769/7/201722 inch Si WaferOxidationDry0.1 umWet1 umDry0.1 um1075 degC
19
9/13/2017 17:25:58ABJOxidation & DiffusionSensor & ActuatorsExploratory work (FBAR) Dr. Mahanth PrasadDr. Mahanth Prasad23329/15/2017mahanth@ceeri.res.in4-inchOxidationDry1000 AWet1.0 micronDry1000 A
20
9/15/2017 12:29:42ABJOxidation & DiffusionSensor & ActuatorsCLP6553Dr Jamil AkhtarSanjeev/Deveshsanju.ceeri@yahoo.co.in2297/23599/18/201752"DiffusionBoron105030Inert
21
9/25/2017 10:27:53ABJOxidation & DiffusionProcess TechnologiesCMUTR Mukhiya R Mukhiyarmukhiya@ceeri.res.in 24369/26/201744-inchOxidationDryWetDry1 micron 110020-120-20 minutes dry-wet-dry
22
9/27/2017 15:13:32ABJOxidation & DiffusionSensor & Actuatorsexploratory work Dr. Mahanth PrasadDr. Mahanth Prasadmahanth@ceeri.res.in23329/27/201774 inch (05) and 2 inch (02)OxidationDry1000 AWet0.7 micronDry1000 A
23
10/3/2017 12:03:21ABJOxidation & DiffusionNano BiosensorMlp-104Dr.Ajay Agarwal Vikas Saini
vikasmawandia89@gmail.com
239510/3/2017203"OxidationWet1micron 1100
24
10/4/2017 9:42:03ABJOxidation & DiffusionProcess TechnologiesCLP6554Jitendra SinghJitendra Singh
jitendrasingh31@gmail.com
226410/4/201783-inchOxidationDry0.1umWet1.0umDry0.1um1100150minOxygen
25
10/5/2017 10:41:03ABJOxidation & DiffusionFlexible ElectronicsCLP 6553Dr Jamil AkhtarDevesh
barshiliadevesh@gmail.com
235910/5/201752 inchOxidationDryWetDry1 micron1100160 mininert
26
10/5/2017 11:15:27ABJOxidation & DiffusionSensor & ActuatorsPhD workDr Mahanth PrasadDr Mahanth Prasadmahanth@ceeri.res.in233210/5/201774 inch and 2 inchOxidationDry1000 AWet1.0 MICRONDry1000A
27
10/12/2017 16:56:39ABJOxidation & DiffusionSensor & Actuatorsexploratory workDr. Mahanth PrasadDr Mahanth Prasadmahanth@ceeri.res.in233210/13/201723 inchOxidationDry1000 AWet1 MICRONDry1000 A
28
10/23/2017 17:08:35ABJOxidation & DiffusionFlexible Electronicsclp 6553Dr Jamil Akhtardevesh
barshiliadevesh@gail.com
235910/23/201762 inchOxidationDryWetDry1100160inert
29
10/24/2017 9:27:33ABJOxidation & DiffusionSensor & Actuatorsexploratory workDr Mahanth PrasadPhD workmahanth@ceeri.res.in233210/24/2017102 inch OxidationDry1000AWet1.0 micronDry1000A
30
10/24/2017 10:48:56ABJOxidation & DiffusionFlexible ElectronicsCLP 6553Dr. J.AkhtarDr J. Akhtarjimmyakhtar@gmail.com243510/24/201763OxidationDry1uWet1uDry1u110010+140+10
31
10/25/2017 17:56:29ABJOxidation & DiffusionNano BiosensorILPSoumendu SinhaSoumendu
soumendu.sinha@gmail.com
239510/30/2017253 inch and 2 inchOxidationDryWet1 micronDry
32
10/31/2017 15:48:18ABJOxidation & DiffusionSensor & ActuatorsMLP-105Deepak BansalKhushbudeepak@ceeri.res.in227611/1/201762"OxidationDry100nmWet800nmDry100nm1050155minutes
33
10/31/2017 15:50:39ABJOxidation & DiffusionSensor & ActuatorsMLP-105Deepak BansalKhushbudeepak@ceeri.res.in227611/1/201762"DiffusionPhosphorus100011 minute+5 minute
34
11/1/2017 11:15:33ABJOxidation & DiffusionProcess TechnologiesMLP1201Dr. R. MukhiyaAnkushankush@ceeri.res.in233211/2/201724 inchOxidationDry0.1Wet0.8Dry0.11100
35
11/2/2017 10:11:09ABJOxidation & DiffusionProcess TechnologiesMLP-107R MukhiyaS Santosh Kumar
santoshkumar.ceeri@gmail.com
243611/2/2017203 inchOxidationDry10 minWet120 minDry10 min110010-120-10
36
11/2/2017 10:37:40ABJOxidation & DiffusionSensor & ActuatorsPhD workDr. Mahanth prasadDr. Mahanth Prasadmahanth@ceeri.res.in233211/3/201753 inch and 2 inchOxidationDry1000AWet1 MICRONDry1000A
37
11/9/2017 15:00:20ABJOxidation & DiffusionSensor & ActuatorsPhD WorkDr.Mahanth PrasadDr.Mahanth Prasadmahanth@ceeri.res.in233234 inchOxidationDry1000AWet0.5 micronDry1000A
38
11/13/2017 16:03:57ABJOxidation & DiffusionFlexible ElectronicsCLP 6553Dr Jamil AkhtarDevesh
barshiliadevesh@gmail.com
235911/14/201742 inchDiffusionBoron90055 min
39
11/13/2017 17:32:05ABJOxidation & DiffusionProcess TechnologiesMLP-107R MukhiyaS. Santosh Kumar
santoshkumar.ceeri@gmail.com
243611/14/201773 inchDiffusionPhosphorus95030 + 40
40
11/13/2017 17:33:10ABJOxidation & DiffusionProcess TechnologiesMEMS CantileverR MukhiyaS. Santosh KUmar
santoshkumar.ceeri@gmail.com
243611/14/201773 inchDiffusionPhosphorus95030 + 40
41
11/21/2017 21:11:21ABJOxidation & DiffusionSensor & Actuatorsphd workDr. Mahanth prasadDr. Mahanth prasadmahanth@ceeri.res.in233211/22/201754 inch and 3 inchOxidationDry1000AWet1 micronDry1000A
42
11/23/2017 10:45:05ABJOxidation & DiffusionFlexible ElectronicsCLP6553Dr J AkhtarDr J Akhtarjimmyakhtar@gmail.com243511/23/201733inchDryBoron950 c20minute
43
11/23/2017 10:59:48ABJOxidation & DiffusionProcess TechnologiesCLP6554Jitendra singhJitendra singh
jitendrasingh31@gmail.com
226411/23/2017103-inchOxidationDry0.01Wet1Dry0.01
44
12/8/2017 9:45:30ABJOxidation & DiffusionSensor & ActuatorsCLP6553Dr. Jamil AkhtarSanjeev Kumar/Deveshsanju.ceeri@yahoo.co.in2297/235912/11/201722"DiffusionBoron90065 minInert
45
12/18/2017 17:40:00ABJOxidation & DiffusionFlexible ElectronicsCLP 6553Dr Jamil AkhtarDevesh
barshiliadevesh@gmail.com
235912/19/201742 inchOxidationDryWetDry1 um1100160 min
46
12/19/2017 9:17:12ABJOxidation & DiffusionFlexible ElectronicsCLP6553Dr J AkhtarMoh Shakil
mohdshall5201@gmail.com
235912/19/201722inchOxidationDryWetDry1100 C
47
12/19/2017 9:56:27ABJOxidation & DiffusionFlexible ElectronicsCLP6553Dr J AkhtarDr J Akhtarjimmyakhtar@gmail.com243512/19/201743inchOxidationDryWetDry1u1100 c160 minutes
48
12/19/2017 11:07:54ABJOxidation & DiffusionNano BiosensorILPSoumendu SinhaSoumendu
soumendu.sinha@gmail.com
998352630312/20/201783 inchDiffusionPhosphorus
49
12/19/2017 17:56:08ABJOxidation & DiffusionFlexible Electronics
QHF funding from Institute
Dr Jamil AkhtarDr Subimal Majee
subimal.majee@gmail.com
993018725912/21/201752 inchOxidation
50
12/21/2017 11:09:56ABJOxidation & DiffusionSensor & ActuatorsAero- acousticDr. mahanth prasadDr. mahanth prasadmahanth@ceeeri.res.in233234 inchOxidationDry10 minWet45 minDry10 min
51
12/22/2017 12:05:36ABJOxidation & DiffusionSensor & ActuatorsCLP6553Dr Jamil AkhtarSanjeev/Deveshsanju.ceeri@yahoo.co.in2297/235912/26/201722"DiffusionBoron900 Degree Celsius60 minInert
52
1/1/2018 15:35:31ABJOxidation & DiffusionNano Biosensorclp 3254Dr Ajay AgarwalRamesh Kumar
RAMGURJAR123@GMAIL.COM
23951/1/2018104"Oxidation1um1100
53
1/2/2018 16:39:45ABJOxidation & DiffusionSensor & ActuatorsPhd workDr. Mahanth prasadDr. Mahanth prasadMahanth@ceeri.res.in233223 inchOxidationDry1000Wet1 micronDry1000
54
1/3/2018 11:09:21ABJOxidation & DiffusionProcess TechnologiesGAP-6512Jitendra singhAjay kumar
jitendrasingh31@gmail.com
22641/3/2018113 inch and 2 inchOxidationDry10nmWet1.0umDry10nm1100 C2.5 HrsOxygen
55
1/3/2018 17:45:19ABJOxidation & DiffusionFlexible Electronicsclp 6553Dr Jamil Akhtardevesh
barshiliadevesh@gmail.com
23591/3/201822 inchDiffusionBoron95040Nitrogen
56
1/3/2018 17:46:26ABJOxidation & DiffusionFlexible ElectronicsCLP 6553Dr Jamil AkhtarDevesh
barshiliadevesh@gmail.com
23591/2/201812 inchDiffusionBoron90060 minN2
57
1/8/2018 9:36:28ABJOxidation & DiffusionSensor & ActuatorsCLP6553Dr Jamil AkhtarSanjeev/Deveshsanju.ceeri@yahoo.co.in2297/23591/9/201882"OxidationDry100 nmWet1.0 micronDry100 nm1100 degree150 minInert
58
1/11/2018 9:37:05ABJOxidation & DiffusionProcess TechnologiesGAP-6512Dr. Jitendra SinghAjay Kumarkarnalajayk@gmail.com22641/10/2018
4 small piece and one 3" wafer
3 inchOxidationDryNoDryNoDry7004 hourBST Oxidation
59
1/11/2018 18:52:29ABJOxidation & DiffusionProcess TechnologiesGap-6512Dr. Jitendra SinghAjay kumarkarnalajayk@gmail.com22641/5/20184 small piecesOxidationDryNo600 Degree4 hourBST annealing
60
1/11/2018 18:54:59ABJOxidation & DiffusionProcess TechnologiesGap-6512Dr. Jitendra SinghAjay Kumarkarnalajayk@gmail.com22641/11/2018Two silicon Wafer3 InchOxidationNo700 Degree4 HourBST Annealing
61
1/15/2018 16:56:43ABJOxidation & DiffusionFlexible ElectronicsCLP6553Dr J Akhtar
Moh shakil / Devesh barshilia
barshiliadevesh@gmail.co
23591/16/201862inchOxidationDryWetDry1u1100
62
1/16/2018 10:29:32ABJOxidation & DiffusionProcess TechnologiesMLP-107R MukhiyaS Santosh Kumar
santoshkumar.ceeri@gmail.com
24361/17/201883 inchDiffusionPhosphorus95023 min + 30 min
63
1/24/2018 11:03:56ABJOxidation & DiffusionFlexible ElectronicsTraineeDr J AkhtarPreeti Shakya
preetishakya06@gmail.com
23631/29/201822"OxidationDryWetDry1u1100C
64
1/24/2018 16:35:52ABJOxidation & DiffusionFlexible Electronicsclp6553Dr J Akhtarmoh shakil
mohdshall5201@gmail.com
23591/25/201822 inchOxidationDryWetDry1100 C
65
1/29/2018 17:30:14ABJOxidation & DiffusionFlexible ElectronicsCLP 6553Dr Jamil AkhtarDEVESH
barshiliadevesh@gmail.com
23591/30/201822 inchDiffusionBoron95040nitrogen
66
1/29/2018 18:22:24ABJOxidation & DiffusionProcess TechnologiesCLP 6554Dr Jitendra SinghRamesh Kumar
ramfagana123@gmail.com
22641/29/2018126 wafer 3" and 6 wafer 2"OxidationDry10nmWet1umDry10nm11002.30hours
67
1/30/2018 10:46:39ABJOxidation & DiffusionFlexible ElectronicsCLP6553Dr J AkhtarDr J Akhtar
mohdshall5201@gmail.com
24351/30/201843"DiffusionBoron900 C1 hour
68
1/30/2018 11:38:05ABJOxidation & DiffusionSensor & ActuatorsCLP6553Dr Jamil AkhtarSanjeev/Deveshsanju.ceeri@yahoo.co.in2297/23591/31/201842"DiffusionBoron90060 minInert
69
1/30/2018 16:07:33ABJOxidation & DiffusionSensor & Actuatorsphd workDr. mahanth prasadDr. mahanth prasadmahanth@ceeri.res.in233223 inchOxidationDry10 minuteWet45 minuteDry10 minute
70
1/31/2018 10:56:13ABJOxidation & DiffusionNano BiosensorCNTFET (Internal)Pankaj B AgarwalPankaj B Agarwalpankaj@ceeri.res.in22982/1/201893"OxidationDry200 nm1100 degree180 minutes
71
1/31/2018 21:18:37ABJOxidation & DiffusionSensor & Actuatorsphd workDr. Mahanth PrasadDr. Mahanth Prasadmahanth@ceeri.res.in233221x1 cmThermal Annealing30030 minutenitrogen
72
1/31/2018 21:20:34ABJOxidation & DiffusionSensor & Actuatorsphd workDr. Mahanth PrasadDr. Mahanth Prasadmahanth@ceeri.res.in233221x1 cmThermal Annealing35030 minutenitrogen
73
2/1/2018 9:27:02ABJOxidation & DiffusionProcess TechnologiesGAP-6512Dr. Jitendra SinghAjay Kumarkarnalajayk@gmail.com22641/31/20183 small piece7004 hourBST annealing
74
2/6/2018 10:16:25ABJOxidation & Diffusion
Optoelectronics & MOEMS
GAP3234Debashree BanerjeeDebashree Banerjee
debashree.ceeri@gmail.com
98206980852/8/2018203 inchOxidationWet350 nmWet350 nm100056
75
2/7/2018 16:50:46ABJOxidation & DiffusionProcess TechnologiesMLP-107R MukhiyaS Santosh Kumar
santoshkumar.ceeri@gmail.com
23127/2/201893 inchDiffusionPhosphorus95023 min + 30 min
76
2/7/2018 20:44:03ABJOxidation & DiffusionFlexible ElectronicsTraineeDr J AkhtarPreeti
Preetishakya06@gmail.com
22572/8/201842"Oxidation1micron1100 degree
77
2/9/2018 8:27:56ABJOxidation & DiffusionFlexible ElectronicsTraineeDr J AkhtarPreeti
Preetishakya06@gmail.com
22572/12/201842"Oxidation1micron1100 degree
78
2/10/2018 21:28:40ABJOxidation & DiffusionSensor & Actuatorsphd workDr. Mahanth PrasadDr. Mahanth Prasadmahanth@ceeri.res.in233254 inchOxidationDry1000AWet1 micronDry1000A
79
2/15/2018 10:04:58ABJOxidation & DiffusionSensor & ActuatorsAeroacousticDr. Mahanth prasadDr. Mahanth prasadMahanth@ceeri.res.in2332104 inchOxidationDry1000AWet1 micronDry1000A
80
2/15/2018 11:23:14ABJOxidation & Diffusion
Emeritus Scientist (MEMS)
Emeritus Scientist Project
Dr. B D PantRenurenu.jks@gmail.com2/16/2018253"OxidationDry1000 AWet8000 ADry1000 A
81
2/27/2018 14:29:08ABJOxidation & DiffusionFlexible ElectronicsCLP 6553Dr Jamil AkhtarDevesh
barshiliadevesh@gmail.com
23592/28/201822 inchDiffusionBoron95040Nitrogen
82
3/1/2018 10:19:23ABJOxidation & DiffusionSensor & ActuatorsPhd workDr. Mahanth PrasadDr. Mahanth PrasadMahanth@ceeri.res.in23323/1/20181Small pieceThermal Annealing300 c30N2
83
3/1/2018 10:22:40ABJOxidation & Diffusion
Optoelectronics & MOEMS
GAP3234Debashree BanerjeeDebashree Banerjee
debashree.ceeri@gmail.com
98206980853/5/201811x1 sq. cmDiffusionIon Implantation Anneal52510 min.N2
84
3/1/2018 10:24:06ABJOxidation & Diffusion
Optoelectronics & MOEMS
GAP3234Debashree BanerjeeDebashree Banerjee
debashree.ceeri@gmail.com
98206980853/5/201811x1 sq. cmDiffusionIon Implantation Anneal52520 minN2
85
3/1/2018 10:25:20ABJOxidation & Diffusion
Optoelectronics & MOEMS
GAP3234Debashree BanerjeeDebashree Banerjee
debashree.ceeri@gmail.com
98206980853/5/201811x1 sq. cmDiffusionIon Implantation Anneal52530 minN2
86
3/1/2018 10:26:18ABJOxidation & Diffusion
Optoelectronics & MOEMS
GAP3234Debashree BanerjeeDebashree Banerjee
debashree.ceeri@gmail.com
98206980853/5/201811x1 sq. cmDiffusionIon Implantation Anneal52545 minN2
87
3/1/2018 10:27:19ABJOxidation & Diffusion
Optoelectronics & MOEMS
GAP3234Debashree BanerjeeDebashree Banerjee
debashree.ceeri@gmail.com
98206980853/5/201811x1 sq. cmDiffusionIon Implantation Anneal52560 minN2
88
3/7/2018 9:30:04ABJOxidation & DiffusionProcess TechnologiesMLP-107R. MUKHIYAAMIT TANWAR
amittanwarzhc@gmail.com
23533/7/201883"'DiffusionPhosphorus9501010
89
3/7/2018 9:31:25ABJOxidation & DiffusionProcess TechnologiesMLP-107R. MUKHIYAAMIT TANWAR
amittanwarzhc@gmail.com
23533/7/201853''DiffusionPhosphorus9503030
90
3/9/2018 10:31:54ABJOxidation & DiffusionSensor & ActuatorsCLP6553Dr Jamil AkhtarSanjeev Kumarsanju.ceeri@yahoo.co.in22973/12/201853mmX3mm chips250 Degree Celsius30 minInert
Annealing at Temperature 250 degree celsius for 30 min in inert atmosphere is required
91
3/12/2018 9:04:11ABJOxidation & DiffusionProcess TechnologiesMLP-107R. Mukhiya Amit tanwar
amittanwarzhc@gmail.com
23533/12/201893"DiffusionPhosphorus95020-10N2
92
3/15/2018 14:32:35ABJOxidation & DiffusionFlexible ElectronicsCLP6553Dr J Akhtar
Sanjeev Kumar,Devesh,Moh Shakil
barshiliadevesh@gmail.co
23593/15/20185 devices300 C Annealing
93
3/16/2018 9:23:26ABJOxidation & DiffusionFlexible Electronicsclp6553Dr J Akhtar
devesh ,sanjeev kumar, moh shakil
barshiliadevesh@gmail.com
23593/16/20185 devices350 C
94
3/19/2018 10:53:58ABJOxidation & DiffusionFlexible ElectronicsTactile sensorsT EshwarT Eshwareshwar@ceeri.res.in24563/20/201882 inch diaOxidationDry100AWet9800ADry100A1100C
95
3/20/2018 17:15:16ABJOxidation & DiffusionProcess TechnologiesPhd WorkDr Ravindra MukhiyaPrashant Sharma
prashantceeri@gmail.com
23693/21/201805 wafers4 inchOxidation1 micron1 micron
96
3/21/2018 9:42:20ABJOxidation & DiffusionFlexible ElectronicsCLP6553Dr J AkhtarMoh Shakil
mohdshall5201@gmail.com
23593/21/201822 inchDryWetDry1u1100c
97
3/21/2018 10:49:11ABJOxidation & DiffusionSensor & ActuatorsPhd workDr.mahanth prasadDr.mahanth prasadMahanth@ceeri.res.in233234 inchOxidationDry10 minWet45 minDry10 min
98
3/22/2018 9:29:56ABJOxidation & DiffusionProcess TechnologiesGAP-6512Dr. Jitendra SinghAjay Kumarkarnalajayk@gmail.com22643/21/201873"OxidationDry100 nmWet1 MicronDry100 nm1100160 min
99
3/22/2018 13:54:49ABJOxidation & DiffusionProcess TechnologiesMLP 107Ravindra MukhiyaAmit
rmukhiya.iitkgp@gmail.com
23533/21/201854 inchOxidationWet1 um
100
3/22/2018 13:55:41ABJOxidation & DiffusionNano BiosensorILPSoumendu SinhaSoumendu
soumendu.sinha@gmail.com
24363/21/201863 inchOxidation1 um