Advanced PECVD Oxide Data 2017

	A	B	C	D	E	F	G	H	I	J	N	R	S	W	X	Y	Z	AA
1	Date	User	Film	Recipe	Substrate T	Coat time	Dep.time	Thickness	JAW EC-400 (Woolam S.E.)		Dep.rate	HF e.r.	Stress	LPD (gain4) paricle size (0.16-1.6)um		LPD (gain2) particle size (2.8-28.0)um		Comment/Mike Silva maintenance
2					°C	min	sec	(Å)	Index @632.8nm	Index @1550nm	(nm/min)	(nm/min)	MPa	Before deposition	After deposition	Before deposition	After deposition	4"Si wafer placed in the center of platen

3				Oxide					Index		Dep.rate		Stress					Maintenance
4	02/01/17	Biljana	SiO2	Oxide	300	10	600.00	2901.52	1.477	1.466	29.02	450.20	-266.61	79	186	no data	no data
5	02/27/17	Biljana	SiO2	Oxide	300	10	600.00	2907.08	1.479	1.479	29.07	437.20	-243.89		no data	no data	no data	Test done on 800um wafers! Tool needs a long cleaning!
6	03/14/17	Biljana	SiO2	Oxide	300	10	600.00	2929.63	1.491	1.480	29.30			298	2814	no data	no data	Showerhead pattern
7	03/16/17	Biljana	SiO2	Oxide	300	10	600.00	3018.39	1.480	1.468	30.18	440.40	-246.64	26	9904	no data	no data	New software installed
8	04/18/17	Biljana	SiO2	Oxide	300	10	600.00	2761.78	1.478	1.467	27.62	502.68	-264.91	112	2804	no data	no data	Showerhead pattern, the recipe needs to be adjusted
9	05/19/17	Biljana	SiO2	Oxide	300	10	600.00	2852.96	1.478	1.467	28.53	513.31	-261.88	68	334	no data	no data	NO Showerhead pattern
10	06/16/17	Biljana	SiO2	Oxide	300	10	600.00	2900.67	1.479	1.468	29.01	510.15	-268.53	37	390	no data	no data	Some showerhead pattern, but not bad
11	08/07/17	Biljana	SiO2	Oxide	300	10	600.00	3013.77	1.478	1.467	30.14	508.16	-258.19	5	3467	no data	no data	New heater element installed, Showerhead pattern
12	08/22/17	Biljana	SiO2	Oxide	300	10	600.00	2984.13	1.477	1.466	29.84	552.04	-269.18	161	690	68	149	NO Showerhead pattern
13	09/05/17	Biljana	SiO2	Oxide	300	10	600.00	3001.44	1.478	1.466	30.01	568.63	-268.62	62	200	4	72	NO Showerhead pattern
14	10/23/17	Biljana	SiO2	Oxide	300	10	600.00	2832.81	1.476	1.467	28.33	to do!	-268.40	209	2331	22	64	Showerhead pattern
15
16
17							Avg Thickness	2918.56				498.09
18								Avg Index	1.479	1.469	29.19	Avg Stress	-261.69
19								Index+1%	1.494	1.484	32.10	Avg+30%	-340.19
20								Index-1%	1.464	1.454	26.27	Avg-30%	-183.18
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