IBD SIO2 Thickness uniformity-15 min depositions 2015

	A	B	C	D	E	F	G
1
2		Thickness, A		Index @632.8nm			Comment
3	Date	Min	Max	Max	Min	Thickness Uniformity, %
4		center of wafer	1cm from edge	center of wafer	1cm from edge
5	12-19-2014	855.92	880.76	1.489	1.488	98.57	Thinner in the center
6	12-22-2014	865.35	890.53	1.490	1.489	98.57	Thinner in the center
7	01-22-2015	864.70	891.26	1.491	1.492	98.49	Thinner in the center
8	02-17-2015	929.88	951.38	1.491	1.488	98.86	Thinner in the center
9
10	Average					98.62
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43