NCU-L310-ScrollPump-List
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Lab NumberPart NumberID Number位置運轉電流 (A)清查日期說明單位
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001Triscrol 6003080203-04-00250第一實驗站2.15/2.26/2.202017/4/28中央
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002Triscrol 6003080203-04-00249第四實驗站2017/4/28中央
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003Triscrol 6003080203-3900244第三實驗站2017/4/28中央
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004Triscrol 6003080203-39-00245100-TW compressor2017/4/28中央
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005Triscrol 6003080203-39-00248第二實驗站2017/4/28中央
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006Triscrol 60030802030040-2187BackUp2017/7/27已安裝Omron Counter原分所
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007Triscrol 6004031001020210-2214VSF2.23/2.21/2.25 2017/4/28原分所
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008Triscrol 6004030802030040-2275原分所 L223原分所
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009Triscrol 6004030802030040-227420-TW/900-nm comperssor2017/4/28原分所
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010Triscrol 6003100102-0210-2452BackUp2017/7/4原分所
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IDP-34030802030050-2277L310 真空元件櫃2015/10/22100-TW amplifier 備用。原分所
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SH-1103080203-05-00271100-TW amplifier2015/10/22中央
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舊有100TW 系統Adixen AMD1
(Amplitude Technologies 原廠配備)
L310 真空元件櫃2015/10/22曾導致 turbo pump 損壞,待更換。中央
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有Omron Counter 的 scroll pump,建議8000hr做保養。
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抽氣測試終端壓力規格 =7x10-3 mTorr
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Test date12/6/20167/8/20157/8/20157/8/20157/8/201522/1/20161/13/20174/1/20164/1/2016
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Pump No001002003004005006007009010
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306976.337.424.369629922.240.5
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606267.331.619.856538119.439.1
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905963.129.218.550.44972.618.538.8
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1205860.627.817.747.24767.817.938.6
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15057.258.426.917.245.54564.517.638.6
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360038.757.326.216.943.84417.3
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Triscroll 600 狀況表 (2016/12/7更新)
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歷史紀錄
100-TW amp. scroll pump
2014/2/14