8.8.1 - CDE ResMap 4.42 Ohm-cm Rs Measurement Specification
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Measurement Specification: 8.8.1 - CDE ResMap 4.42 Ohm-cm Resistivity on (cde-resmap)
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Description:This monitor tracks the average, standard deviation, and range of resistivity measurments using a 5-point measurement on a 319 um thick gauge standard. Process Staff should be notified if the 5-point measurement of the standard is more than +/- 5%Measurement Performance
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Tool:(cde-resmap)
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Standard:GAGE Standard 4.42 Ohm-cm 'Sheet Resistance'
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Location of Saved Data:N/A
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Tool Specifications
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StepToolSettings
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8.8.1 - Measure(cde-resmap)Project: NanoLab_6in. Recipe: 6in_1pt. Make a 5-point measurement at locations ~1.5 cm from the center of wafer.
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Output Response
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ResponseDescriptionTarget
(Ohm-cm)
USL
(Ohm-cm)
LSL
(Ohm-cm)
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Average resistivity5-point average of measurement taken at locations ~1.5 cm from center of wafer.

USL and LSL are +/- 5% of target.
4.424.644.20
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For more information: tinyurl.com/cderesmap-442
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