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VMC TOOL RESERVATION LINKSCURRENT TOOL STATUSEQUIPMENT RESERVATION RULESCode for Current Month1801323107
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DEPOSITION TOOLS1. Available window for booking is only two weeks. You can only reserve a tool for a date within a 14 days range starting from the time you make your reservation. For example, if today is the 1st of July, and you want to reserve the tool for 14th of July, it will be fine since the date of the tool being reserved for is still in the range of 14 days from today. You can not reserve the tool for the 15th of July, because it is more than 14 days away from today.
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AJA E-Beam EvaporatorNo Bias Cleaning Available
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Old E-Beam Evaporator
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AJA Orion 5 Sputtering Machine
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Savannah Nanotech ALD2. The max hours for one reservation can not exceed 12 hrs.
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LITHOGRAPHY TOOLS
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Karl-Suss Mask Aligner
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Raith Voyager 150 EBL3. No more than one reservation for the same tool for each user. Each User can only book the same tool once. Before your existing reservation expires, you can not book the same tool again. Even if you finish your process earlier than your booking time, you still need to wait until your original booking time expires before you can make another reservation. You may modify your reservation in the case you finish it earlier, so other users can use it sooner without waiting till the end of your reservation .
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Heidelberg uMLA
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Spin Coater (30 min increments)
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Heidelberg uPG
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4. No consequent bookings for the users. There must be a 6 hours gap between the reservations made by users. We need to protect the rights of other users.
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ETCHING TOOLS
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Plasma Etcher
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Oxford Estrelas ICP-RIE
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5. If a user did not show up 30 mins after their reservations, they forfeit their time slot. They still need to wait for their existing reservation to expire before they can book another one. Users who don't show up for their reservation and lose their slots three (3) times will be banned for one month for that tool.
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METROLOGY TOOLS
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Tabletop SEM
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Dektak Surface Profilometer
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Filmetrics Film Thickness Measurement
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MISCELLANEOUS TOOLS
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Bruce FurnaceTUBE 4 DIFFUSIONS ONLY
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Wire Bonder
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ALL TOOLS (UNLESS SPECIFIED) WILL BE FOR 1 HOUR LONG BLOCKS
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