ABCDEFGHIJKLMNOPQRSTUVWXYZAA
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SputterCOMMENTS
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Gun 8Gun 7Gun 6Gun 5Gun 4Gun 3Gun 2Gun 1
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Power SupplyRF or DCRF # 2DC # 5DC # 5RF # 3DC # 5DC # 2 DC #1We had issues with RF #3, it did not get recognized properly by the software, so its not useable
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TargetLiNbO3HfO2EmptyEmptySiO2CuTiAlNow, RF2 is connected to Gun7, and RF3 is connected to Gun 4
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Target OwnerStraufShepard Lab
broken screw - do not use
ASRCASRCASRCASRC
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Target Needed Until8/19/202012/16/20
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Next Change Date
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Target to be installed
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Installation will be performed by
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* Does not strike
RF3 doesnt work
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Ebeam Chamber
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Crucible 6Crucible 5Crucible 4Crucible 3Crucible 2Crucible 1
Thermal # 1
Thermal #2
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Current MaterialCrAgPtAuTiPdCrCu
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OwnerASRCASRCASRCASRCASRCASRCASRCASRC
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Upcoming Change onCrAuTi
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Upcoming Change onCrAuTi
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Upcoming Change onCrAuTi
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SiO2
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Organic Ebeam Chamber
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Crucible 6Crucible 5Crucible 4Crucible 3Crucible 2Crucible 1
Organic # 1
Organic # 2
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Current MaterialAl2O3YAuNiSiO2Cr
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OwnerASRCASRCASRCASRCASRCASRC
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Upcoming Change on3/6/2019AuTiCr
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Upcoming Change on3/13/2019AuTiCr
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Upcoming Change on3/20/2019AuTiCr
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Thermal Chamber
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Boat # 1Boat # 2Boat # 3
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MaterialTiAlCr
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Material OwnerASRCASRCASRC
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Atomic Layer Deposition Chamber
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Bottle 0Bottle 1Bottle 2Bottle 3
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Current PrecursorWaterAlHfTi
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Next Change Date***************
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Precursor to be installed
WaterAlHf
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