Adv.PECVD 300nm STD Nitride2-2021

	B	C	D	E	F	G	H	I	J	K	L	P	Q	R	S	T	X	Y	Z	AA	AB	AC	AD	AE
1	Date	Film	Recipe	Subs. T	Coat.time	Dep.time	Thickness (Woollam)	Thickness (Wafer Mapping)	JAW EC-400 (Woolam S.E.)		Dep.rate	Avg. dep. Rate	Avg+10%	Avg-10%	BHF e.r.	Stress	LPD (Gain4) particle size 0.16-1.6um		Haze, for Gain 4	LPD (Gain2) particle size 1.6-28.0um		Photos	Photos	Comment/Brian Lingg maintenance
2				300°C	min	min	(nm)	(nm)	Index @ 632.8nm	Index @ 1550nm	(nm/min)	(nm/min)	(nm/min)	(nm/min)	(nm/min)	(MPa)	before deposition	after deposition	%	before deposition	after deposition	Surfscan	Opt. Micr.	4"Si wafer, placed in the center of platen,~500um thick

3			Nitride 2			Dep.time	wafer center	25 points (avg.)	Index		Dep.rate	Avg.dep.rate	Avg+10%	Avg-10%		Stress								Maintenance
4	11/03/20	Si3N4	STD Nitride	300	10	30	232.33	241.75	1.974	1.935	7.74	7.46	8.20	6.71	42.54	508.00	182	489	2	20	33	Good	OK	good, some small particles
5	01/04/21	Si3N4	STD Nitride	300	10	30	219.97	Wafer missing	1.984	1.944	7.33	7.46	8.20	6.71	not done	525.60	50	328	12	53	124	Good	OK	Brian L: The CF4/O2 regulator on the gas panel was replaced (a day before tool had issue wtih CF4/O2 flow-could not run clean)
6	02/23/21	Si3N4	STD Nitride	300	10	30	214.98	216.90	1.977	1.939	7.17	7.46	8.20	6.71	not done	513.83	83	238	29	39	81	Good	OK	Brian L: it was done some PM between 1/4/2021-2/23/21
7	04/19/21	Si3N4	STD Nitride	300	10	30	229.58	231.71	1.973	1.934	7.65	7.46	8.20	6.71	not done	532.43	26	318	1	2	48	Good	OK	Nice, uniform film
8	06/15/21	Si3N4	STD Nitride	300	10	30	219.67	220.93	1.975	1.937	7.32	7.46	8.20	6.71	not done	507.69	31	518	2	25	89	Good	OK	Nice, uniform film
9	07/15/21	Si3N4	STD Nitride	300	10	30	226.03	not done	1.981	1.942	7.53	7.46	8.20	6.71	not done	482.73	not done	not done	not done	not done	not done	not done	not done	NM 210715W5
10	07/19/21	Si3N4	STD Nitride	300	10	30	215.46	not done	1.977	1.939	7.18	7.46	8.20	6.71	not done	494.32	109	1497	10	136	624	OK	not done	NM 210719L2
11	07/26/21	Si3N4	STD Nitride	300	10	30	205.48	not done	1.985	1.945	6.85	7.46	8.20	6.71	not done	462.48	108	202	36	62	49	OK	not done	NM 210726L0
12	08/13/21	Si3N4	STD Nitride	300	10	30	225.81	not done	1.978	1.939	7.53	7.46	8.20	6.71	not done	467.48	146	341	1	15	22	OK	not done	NM 210813B9
13	08/13/21	Si3N4	STD Nitride	300	10	30	221.85	not done	1.981	1.942	7.39	7.46	8.20	6.71	not done	480.38	38	102	1	16	43	OK	not done	NM 210827D7
14	09/02/21	Si3N4	STD Nitride	300	10	30	219.31	not done	1.974	1.936	7.31	7.46	8.20	6.71	not done	411.12	329	216	52	76	119	OK	not done	NM 210902E4
15	09/13/21	Si3N4	STD Nitride	300	10	30	214.31	not done	1.970	1.933	7.14	7.46	8.20	6.71	not done	487.15	145	278	7	30	31	OK	not done	NM 210913E9
16	09/23/21	Si3N4	STD Nitride	300	10	30	223.85	not done	1.973	1.935	7.46	7.46	8.20	6.71	not done	470.93	1244	1382	5	41	303	OK	not done	NM 210923G2
17	09/27/21	Si3N4	STD Nitride	300	10	30	223.39	not done	1.972	1.935	7.45	7.46	8.20	6.71	not done	473.80	30	152	2	24	84	OK	not done	NM 210927G7
18	10/04/21	Si3N4	STD Nitride	300	10	30	222.98	not done	1.973	1.935	7.43	7.46	8.20	6.71	not done	479.53	21	145	1	12	26	OK	not done	NM 211004H4
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24						Avg.Thick.	220.86								Avg-30%	329.65
25								Avg. Index	1.977	1.938
26								Avg+1%	1.996	1.957
27								Avg-1%	1.957	1.919
28										Avg Dep.Rate	7.46
29										Avg +10%	8.20
30										Avg - 10%	6.71
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32														Av. BHF e.r.	42.540
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