A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | AA | AB | AC | AD | |
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1 | Doctoral theses made worldwide on ALD | # theses incl. professor's theses | 559 | |||||||||||||||||||||||||||
2 | Created within the Virtual Project on the History of ALD | # theses, PhD | 543 | PhD-equivalents | ||||||||||||||||||||||||||
3 | * Sources for theses in Finland and Russia: FinALD40 exhibition and the ML essay | |||||||||||||||||||||||||||||
4 | * For other theses, we have to search and ask | 19.1.2016 | 134 | |||||||||||||||||||||||||||
5 | * Up to 1986, the list should to be complete. After that, let us try to make it as complete as possible, realizing that we will likely miss some works. | 3.2.2016 | 159 | 25 | ||||||||||||||||||||||||||
6 | If you would like to have a thesis added, please add it in the file VPHA-thesis-to-be-added, link below: | # countries, PhD | 30 | 4.2.2016 | 180 | 21 | ||||||||||||||||||||||||
7 | https://docs.google.com/spreadsheets/d/1hwMLL_LDDDT3VCBl3Z26KcO2FheOUEIXbGeIJOxD27Q/edit?usp=sharing | there is a better analysis in the analysis and plot sheets | 19.2.2016 | 193 | 13 | |||||||||||||||||||||||||
8 | 25.2.2016 | 222 | 29 | |||||||||||||||||||||||||||
9 | Year | Author name | Thesis name in English | Language of the thesis | Thesis name in original language (optional) | University | City | Country | # of pages (if known, without appendices) | # of pages, with appendices (if known) | Source of information | Link to pdf of thesis, if available | Other notes (optional) | To include in final list? | PhD thesis equivalents | 543 | 29.2.2016 | 225 | 3 | |||||||||||
10 | Countries | 29 | 9.3.2016 | 266 | 41 | |||||||||||||||||||||||||
11 | 1963 | S. I. Koltsov | The study of interaction of carbon tetrachloride with silica gel | Russian | Исследование взаимодействия четыреххлористого углерода с кремнеземом | LTI by Lensovet | Leningrad | USSR | 185 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Riikka: This does not yet mention the term "Molecular Layering" and does not report ALD cycles. | 14.3.2016 | 266 | 0 | ||||||||||||||||
12 | 1965 | G.N. Kuznetsova | Study of a reaction products between hydrated silica and metal ions by IR spectroscopy | Russian | Исследование продуктов реакции между гидроокисью кремния и ионами металлов с помощью ИК-спектроскопии (translated by Oksana Yurkevich) | LTI by Lensovet | Leningrad | USSR | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Belgium | 12 | Belgium | 12 | 16.3.2016 | 273 | 7 | ||||||||||||||
13 | 1969 | A. N. Volkova | Interaction of some chlorides with silica gel - reaction of molecular layering | Russian | Взаимодействие некоторых хлоридов с силикагелем реакции молекулярного наслаивания | LTI by Lensovet | Leningrad | USSR | 171 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Oksana: Mention "molecular layering". Or Kuznetsova was first? | Brazil | 2 | Brazil | 2 | 30.3.2016 | 278 | 5 | ||||||||||||
14 | 1971 | G.V. Sveshnikova | Synthesis and study of thin oxide layers on the silicon surface | Russian | Синтез и исследование тонких оксидных слоев на поверхности кремния | LTI by Lensovet | Leningrad | USSR | 184 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Oksana: modification of the silica surface instead of silicagel (as was common for the early works in USSR). Besides analytical chemistry techniques, ellipsometry and quartz surfaces were used | Canada | 6 | Canada | 6 | 8.4.2016 | 295 | 17 | ||||||||||||
15 | 1972 | R. R. Rachkovskii | Synthesis and study of thin oxide layers on the surface of single-crystal silicon | Russian | Синтез и исследование тонких окисных слоев на поверхности монокристаллического кремния | LTI by Lensovet | Leningrad | USSR | 133 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Oksana: besides the analytical chemistry techniques, ellipsometry and quartz surfaces were used | China | 37 | China | 37 | 30.7.2016 | 297 | 2 | ||||||||||||
16 | 1973 | A. A. Malygin | Interaction of oxychlorides of vanadium, chromium and phosphorous with silica gel - reaction of molecular layering | Russian | Взаимодействие оксихлоридов ванадия, хрома и фосфора с силикагелем - реакции молекулярного наслаивания | LTI by Lensovet | Leningrad | USSR | 163 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Estonia | 8 | Estonia | 8 | 1.8.2016 | 312 | 15 | |||||||||||||
17 | 1973 | V. M. Smirnov | Synthesis and activity study of a thin oxide layers on the silica gel surface | Russian | Синтез и исследование химической активности тонких оксидных слоев на поверхности силикагеля (translated by Oksana Yurkevich) | LTI by Lensovet | Leningrad | USSR | 128 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Oksana: first mentioned the "monolayer effect" | Finland | 111 | Finland | 111 | 19.8.2016 | 317 | 5 | e.g., Nilsen, Ostreng, Sundberg | |||||||||||
18 | 1974 | E. P. Smirnov | Synthesis of carbon and titanium oxide layers on carbon surface by the molecular layering method | Russian | Синтез слоев оксидов углерода и титан на углеродной поверхности методом молекулярного наслаивания (translated by Oksana Yurkevich) | LTI by Lensovet | Leningrad | USSR | 184 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-241 | France | 43 | France | 43 | 12.9.2016 | 326 | 9 | |||||||||||||
19 | 1974 | T. V. Tuz | Synthesis and stability of thin oxide layers on the silica gel surface | Russian | Синтез и исследование устойчивости тонких оксидных слоев на поверхности кремнезема | LTI by Lensovet | Leningrad | USSR | 113 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Germany | 24 | Germany | 24 | 10.11.2017 | 347 | 21 | After AVS64, many from Korea, also USA and Brazil | ||||||||||||
20 | 1977 | M. A. Eremeeva | Synthesis and research by IR - ATR spectroscopy methods and ellipsometry of ultrathin oxide films on the surface of single crystal silicon and germanium | Russian | Синтез и исследование методами ИК - спектороскопии МНПВО и эллипсометрии сверхтонких окисных пленок на поверхности монокристаллов германия и кремния | LTI by Lensovet | Leningrad | USSR | 184 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Iraq | 1 | Iraq | 1 | 18.12.2018 | 372 | 23 | |||||||||||||
21 | 1977 | V. B. Kopylov | Synthesis of carbon layers on the silica gel surface by molecular layering and study of their properties | Russian | Синтез углеродных слоев на поверхности кремнезема методом молекулярного наслаивания и исследования их свойств | LTI by Lensovet | Leningrad | USSR | 147 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Ireland | 4 | Ireland | 4 | 14.01.2019 | 390 | 24 | After Ritta's blog post | ||||||||||||
22 | 1977 | V. I. Kovalkov | Synthesis of fine powder with desired structural and chemical properties of their surface using molecular layer deposition and the study of their properties | Russian | Синтез высокодисперсных твердых веществ с заданными структурно-химическими свойствами поверхности методом молекулярного наслаивания и исследование их свойств | LTI by Lensovet | Leningrad | USSR | 181 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Italy | 6 | Italy | 6 | 18.01.2019 | 394 | 24 | |||||||||||||
23 | 1977 | A. A. Malkov | Synthesis by molecular layering method of metal oxide layers on the surface of the carbon fibers and study of their properties | Russian | Синтез методом молекулярного наслаивания Э-О слоев на поверхности углеродных волокон и исследование их свойств | LTI by Lensovet | Leningrad | USSR | 163 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Japan | 7 | Japan | 7 | 22.01.2019 | 429 | 24 | |||||||||||||
24 | 1978 | V. E. Drozd | Synthesis and study of oxide coatings obtained by molecular layer deposition technique on the surface of semiconductors | Russian | Синтез и исследование оксидных покрытий, полученных методом молекулярного наслаивания на поверхности полупроводников | LTI by Lensovet | Leningrad | USSR | 131 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Oksana: performed the vaccum reactor with in-situ ellipsometry and Peltier element (1975), before him atmospheric pressure reactors were used. | Norway | 15 | Norway | 15 | incl. USSR | 29.01.2019 | 456 | 25 | |||||||||||
25 | 1978 | A. M. Postnova | Study of the structure and reactivity of vanadium containing silica gel obtained by molecular layer deposition | Russian | Исследование строения и реакционной способности ванадийсодержащих кремнеземов, полученных методом молекулярного наслаивания | LTI by Lensovet | Leningrad | USSR | 166 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Poland | 5 | Poland | 5 | 12.07.2019 | 512 | 27 | |||||||||||||
26 | 1978 | N. A. Stepanova | Synthesis of iron and zinc-containing layers on the surface of silica gel | Russian | Синтез железо- и цинксодержащих слоев на поверхности кремнезема | LTI by Lensovet | Leningrad | USSR | 176 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Russia | 13 | Russia incl. USSR | 62 | 16.7.2019 | 518 | ||||||||||||||
27 | 1979 | V. K. Gromov | Synthesis by the molecular layering method of titanium oxide layers on the surface of quartz, silicon, copper and ellipsometric study of substrate/ synthesized layer boundary | Russian | Синтез методом молекулярного наслаивания титан-кислородных слоев на поверхности кварца, кремния, меди и эллипсометрическое исследование границы сопряжения подложка - синтезированный слой | LTI by Lensovet | Leningrad | USSR | 179 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | South Korea | 32 | South Korea | 32 | ||||||||||||||||
28 | 1979 | V. N. Postnov | Synthesis of inorganic matrices using the molecular layering method and the study of their reactivity in the process of adsorption of amino acids | Russian | Синтез неорганических матриц методом молекулярного наслаивания и исследование их реакционной способности в процессе сорбции аминокислот | LTI by Lensovet | Leningrad | USSR | 166 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Sweden | 33 | Sweden | 33 | ||||||||||||||||
29 | 1980 | S. K. Gordeev | Synthesis of carbon, titanium, and chromium oxides on the diamond surface and study of their physicochemical properties | Russian | Синтез на поверхности алмаза углерода, оксидов титана и хрома и исследование их физико-химических свойств | LTI by Lensovet | Leningrad | USSR | 210 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Switzerland | 1 | Switzerland | 1 | ||||||||||||||||
30 | 1980 | V. D. Ivin | Synthesis of carbon and of phosphorus-carbon coatings on the carbon fiber surface and the study of their physico-chemical properties | Russian | Синтез углеродных и фосфоруглеродных покрытий на поверхности углеродного волокна и исследование их физико-химических свойств (translated by Oksana Yurkevich) | LTI by Lensovet | Leningrad | USSR | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | The Netherlands | 27 | The Netherlands | 27 | |||||||||||||||||
31 | 1980 | B. D. Sokolov | Effect of physical and chemical properties of carbon fiber surface on the reinforcement of composite materials | Russian | Влияние физико-химических свойств поверхности углеродных волокона упрочнение композиционных материалов | LTI by Lensovet | Leningrad | USSR | 219 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Taiwan | 0 | Taiwan | 0 | ||||||||||||||||
32 | 1980 | V. P. Tolstoy | Synthesis and physicochemical study of ultrathin oxide layers on metal surfaces | Russian | Синтез и физико-химическое исследование сверхтонких оксидных слоев на поверхности металлов | LTI by Lensovet | Leningrad | USSR | 143 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Turkey | 1 | Turkey | 1 | ||||||||||||||||
33 | 1980 | M. N. Tsvetkova | Molecular layering of active structures on the surface of the glass microspheres and study of their physical and chemical properties | Russian | Молекулярное наслаивание активных структур на поверхности стеклянных микросфер и исследование их физико-химических свойств | LTI by Lensovet | Leningrad | USSR | 196 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | UK | 6 | UK | 6 | ||||||||||||||||
34 | 1981 | A. V. Krasnobryzhii | Reaction of titanium (IV) and iron (III) chlorides, vanadium (V) and chromium (VI) oxychlorides with various graphite materials | Russian | Взаимодействие хлоридов титана (IV) и железа (Ш), оксихлоридов ванадия (V) и хрома (VI) с углеграфитовыми материалами | LTI by Lensovet | Leningrad | USSR | 183 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | USA | 73 | USA | 73 | ||||||||||||||||
35 | 1982 | V. F. Dergachev | Development of technology for gas phase silica gel modification by vanadium | Russian | Разработка технологии парогазового процесса модифицирования силикагеля ванадием | LTI by Lensovet | Leningrad | USSR | 148 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Oksana: developed automated multi-sectional ML apparatusfor powder coating using a fluidized bed mode | USSR | 49 | |||||||||||||||||
36 | 1982 | N. N. Kopylov | Structure and properties of ultrathin titanium oxide layers synthesized on the monocrystalline silicon surface in an electric field | Russian | Структура и свойства сверхтонких титаноксидных слоев, синтезированных на поверхности монокристаллического кремния в электрическом поле | LTI by Lensovet | Leningrad | USSR | 122 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | 24 | 516 | ||||||||||||||||||
37 | 1983 | A. V. Brykalov | Synthesis of silica gel based hemosorbents by molecular layering method and their physico-chemical properties | Russian | Синтез гемосорбентов на основе кремнезема методом молекулярного наслаивания и их физико-химические свойства | LTI by Lensovet | Leningrad | USSR | 153 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
38 | 1983 | A. L. Egorov | Synthesis of thin oxide films on the surface of tantalum and gallium arsenide, their structure and properties | Russian | Синтез оксидных пленок на поверхности тантала и арсенида галлия, их структура и свойства | LTI by Lensovet | Leningrad | USSR | 201 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
39 | 1983 | Veli-Pekka Tanninen | X-ray diffraction studies of aluminium powder and electroluminescent zinc sulphide thin films | English | Helsinki University of Technology, Department of Technical Physics, Laboratory of Physics | Espoo | Finland | 33 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
40 | 1983 | Runar Törnqvist | Electroluminescence in ZnS:Mn thin film structures grown by atomic layer epitaxy | English | Helsinki University of Technology, Department of Technical Physics, Laboratory of Physics | Espoo | Finland | 34 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
41 | 1984 | Yu. M. Artemyev | Physico-chemical properties of iron polysilicates synthesized by chemical assembly | Russian | Физико-химические свойства полисиликатов железа, синтезированных методом химической сборки | LSU | Leningrad | USSR | 161 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | In the CVD 2015 essay, year is given as 1989. At the internet this dissertation bearing a date 1984. Confirmed with Malygin --> 1984 is correct | |||||||||||||||||||
42 | 1984 | S. E. Kurashvili | The reaction of ammonia with a copper-titanium and copper-vanadium films synthesized on the surface of copper | Russian | Взаимодействие аммиака с медно-титан- и медно-ванадийхлоридными пленками, синтезированными на поверхности меди | LTI by Lensovet | Leningrad | USSR | 186 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Oksana: Chemical assemble method. ALD cycle not mentioned (at least at the introduction). Thickness of the coatings were 100-500 nm. | |||||||||||||||||||
43 | 1985 | A. V. Evdokimov | Synthesis of multicomponent metal oxide monolayers on the silica gel surface and characteristics of their structure and inter-functional interactions | Russian | Синтез многокомпонентных элементоксидных монослоев на поверхности кремнезема, особенности их строения и межфункциональных взаимодействий | LTI by Lensovet | Leningrad | USSR | 193 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
44 | 1985 | A. A. Seitmagzimov | Chemical modification and the surface properties of the anode aluminum and titanium oxides | Russian | Химическое модифицирование и поверхностные свойства анодных оксидов алюминия и титана | LTI by Lensovet | Leningrad | USSR | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | |||||||||||||||||||||
45 | 1985 | T. A. Vitkovskaia | Surface modification of photoluminophors by the molecular layering technique | Russian | Модифицирование поверхности фотолюминофоров методом молекулярного наслаивания | LTI by Lensovet | Leningrad | USSR | 158 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
46 | 1986 | T. B. L'vova | Chemical modification of coal from the gaseous phase by vanadium (V), chromium (VI), and phosphorus (III) compounds and study of their absorptive properties | Russian | Химическое модифицирование углей из газовой фазы соединениями ванадия (V), хрома (VI), фосфора (III) и исследование свойств полученных адсорбентов | LTI by Lensovet | Leningrad | USSR | 186 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
47 | 1986 | A. B. Zhidkov | Gas phase kinetics of heterogeneous synthesis of titanium carbide and nitride on the surface of carbon materials | Russian | Кинетика гетерегенного синтеза карбида и нитрида титана из газовой фазы на поверхности углеродных материралов | LTI by Lensovet | Leningrad | USSR | 202 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
48 | 1987 | V.I. Gubaidullin | Synthesis and investigation of multilayer regular structures based on A2B6 compounds | Russian | Синтез и исследование многослойных регулярных структур на основе соединений A2B6 | LTI by Lensovet | Leningrad | USSR | ||||||||||||||||||||||
49 | 1987 | A. N. Kriulkin | Physico-chemical properties of multilayer titanium-vanadium oxide films synthesized by molecular layering method on the surface of silicon | Russian | Физико-химические свойства мультислоев оксидных пленок титана и ванадия синтезированных методом молекулярного наслаивания на поверхности кремния (translated by Oksana Yurkevich) | LTI by Lensovet | Leningrad | USSR | ? | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
50 | 1987 | A. I. Kudryashova | Acid-base properties of silicon, aluminum, zinc, and magnesium oxide surfaces and their changes in the process of structural and chemical transformations | Russian | Кислотно-основные свойства поверхности оксидов кремния, алюминия, цинка, магния и их изменения в процессах структурно-химических превращений | LTI by Lensovet | Leningrad | USSR | 221 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
51 | 1987 | Jukka Lahtinen | Electro-optical studies of semiconductor compounds for electroluminescent and laser devices | English | Helsinki University of Technology, Department of Technical Physics, Laboratory of Physics | Espoo | Finland | 51 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
52 | 1987 | V. A. Mitnikov | Synthesis, formation and some properties of zinc chalcogenide films produced by atomic layering | Russian | Синтез, формирование и некоторые свойства пленок халькогенидов цинка осажденных методом атомного наслаивания (translated by Oksana Yurkevich) | LTI by Lensovet | Leningrad | USSR | ? | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | Oksana: Atomic Layering method | |||||||||||||||||||
53 | 1987 | A.I. Romanychev | Precision synthesis of thin films of zinc and cadmium sulphides and multilayer periodic structures on their basis | Russian | Прецизионный синтез тонких пленок сульфидов цинка и кадмия и получение на их основе многослойных периодических структур | LSU | Leningrad | USSR | ||||||||||||||||||||||
54 | 1987 | S. A. Trifonov | Synthesis and thermal-oxidative stability of reaction products of phosphorus trichloride and phenolformaldehyde epoxy materials | Russian | Синтез и термоокислительная устойчивость продуктов взаимодействия треххлористого фосфора с поверхностью фенолоформальдегидных и эпоксифенольных материалов | LTI by Lensovet | Leningrad | USSR | 152 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
55 | 1987 | A. S. Yakovlev | Properties of interface boundaries between monocrystalline silicon and ultra-thin layers of titanium and silicon oxides synthesized by molecular layering method | Russian | Свойства поверхностных связей между монокристаллическим кремнием и ультратонкими слоями оксидов титана и кремния синтезированных методом молекулярного наслаивания (translated by Oksana Yurkevich) | LTI by Lensovet | Leningrad | USSR | ? | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
56 | 1988 | S. V. Murashov | Synthesis and formation of cadmium chalcogenide films by surface chemical assembly | Russian | Синтез и формирование пленок халькогенидов кадмия методом химической сборки, атомным наслаиванием компонентов | LTI by Lensovet | Leningrad | USSR | ? | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | The novelty of the results was proved by obtaining of author's certificate #1443492 for "method of the production thin films with compounds A2B6" co-authorod by Aleskovskii and Ezhovskii | |||||||||||||||||||
57 | 1988 | Markku Oikkonen | X-ray diffraction and ellipsometric studies of zinc sulfide thin films grown by atomic layer epitaxy | English | Helsinki University of Technology, Department of Technical Physics, Laboratory of Physics | Espoo | Finland | 46 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
58 | 1988 | E. Yu. Popova | Gas phase modification of the dispersed silicon dioxide material by Zn, Fe, Ti containing structures and the use of these synthetic products in polymer composites | Russian | Газофазная модификация материала дисперсного диоксида кремния структурами, содержащими Zn, Fe, Ti, и использования этих синтетических продуктов в полимерных композитах. (Translated by Oksana Yurkevich) | LTI by Lensovet | Leningrad | USSR | ? | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
59 | 1988 | Markku Tammenmaa | The atomic layer epitaxy growth and characterization of zinc sulfide and alkaline earth sulfide thin films for electroluminescent applications | English | Helsinki University of Technology, Laboratory of Inorganic and Analytical Chemistry | Espoo | Finland | 13 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
60 | 1989 | E. A. Avrutina | Physico-chemical properties of the optically active titanium oxide structures synthesized by the molecular layering method on the surface of highly dispersed silica and zinc | Russian | Физико-химические свойства оптически активных титанокоидных оболочек, синтезированных методом молекулярного наслаивания на поверхности высокодисперсных оксидов кремния и цинка | LTI by Lensovet | Leningrad | USSR | ? | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
61 | 1989 | V. D. Kupriyanov | Synthesis on the dispersed silicon dioxide surface and modification of the luminescent zinc sulfide type structures | Russian | Синтез на поверхности дисперсного диоксида кремния и модифицирование люминисцентных структур цинксульфидного типа | LTI by Lensovet | Leningrad | USSR | ? | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
62 | 1990 | A. I. Klusevich | The synthesis and properties of thin film structures based on aluminum and tantalum oxides | Russian | Синтез и свойства тонкопленочных структур, созданых на базе оксидов алюминия и тантала (translated by Oksana Yurkevich) | LTI by Lensovet | Leningrad | USSR | ? | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
63 | 1990 | P. V. Rogowskii | Physico-chemical properties and reactivity of multilayer vanadium, phosphorus and titanium oxide systems obtained by the molecular layering method | Russian | Физико-химические свойства и реактивность мультислоев оксидных систем ванадия, фосфора и титана полученных методом молекулярного наслаивания (translated by Oksana Yurkevich) | LTI by Lensovet | Leningrad | USSR | ? | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
64 | 1991 | Structural-chemical transformations on the surface of silicon dioxide by molecular layering, titanium- and silicon-nitrogen structures in the temperature range 200-800°C | Structural-chemical transformations on the surface of silicon dioxide by molecular layering, titanium - and silicon-nitrogen structures in the temperature range 200–800°C | Russian | Структурно-химические превращения на поверхности диоксида кремния в процессе молекулярного наслаивания титаноксидных, титан- и кремнийазотных структур в интервале температур 200-800°С | LTI by Lensovet | Leningrad | USSR | 208 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
65 | 1992 | Pipsa Helena Hirva | Theoretical studies on adsorption interactions on inorganic surfaces: Applications to semiconductors and inorganic oxides | English | Joensuun Yliopisto | Joensuun | Finland | 30 | AngelYanguas-Gil | http://search.library.northwestern.edu/primo_library/libweb/action/openurl?genre=article&sid=ProQ:&atitle=Theoretical+studies+on+adsorption+interactions+on+inorganic+surfaces%3A+Applications+to+semiconductors+and+inorganic+oxides&title=Theoretical+studies+on+adsorption+interactions+on+inorganic+surfaces%3A+Applications+to+semiconductors+and+inorganic+oxides&issn=&date=1992-01-01&volume=&issue=&spage=&pid=Hirva%2C+Pipsa+Helena&vid=nwu_services_page&institution=01NWU&url_ctx_val=&url_ctx_fmt=null&isSerivcesPage=true | ||||||||||||||||||||
66 | 1992 | Marina Lindblad | Cluster models for chemisorption on non-metallic surfaces | English | University of Joensuu, Department of Chemistry | Joensuu | Finland | 25 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
67 | 1992 | Hele Siimon | Atomic layer molecular beam epitaxy of A2B6 compounds described on the basis of kinetic equations model | English | University of Tartu | Tartu | Estonia | 115 | Väino Sammelselg | http://www.ester.ee/record=b4062993*est | ||||||||||||||||||||
68 | 1993 | Markku Åberg | An electroluminescent display simulation system and its application for developing grey scale driving methods | English | VTT Electronics. Acta Polytechnica Scandinavica. Electrical Engineering Series 74. | Espoo | Finland | 76 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
69 | 1993 | Suvi Haukka | Characterization of surface species generated in atomic layer epitaxy on silica | English | University of Helsinki, Department of Chemistry, Analytical Chemistry Division | Helsinki | Finland | 46 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
70 | 1994 | Lars-Peter Lindfors | Hydrogenation of toluene on supported nickel - from catalyst preparation to reaction kinetics | English | Åbo Akademi, Department of Chemical Engineering | Turku | Finland | 50 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
71 | 1994 | Mikko Ritala | Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films | English | University of Helsinki, Department of Chemistry, Laboratory of Inorganic Chemistry | Helsinki | Finland | 48 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
72 | 1996 | Markku Ylilammi | Preparation and analysis of thin film electroluminescent devices | English | VTT Electronics | Espoo | Finland | 79 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | need to re-check the location! | ||||||||||||||||||||
73 | 1997 | S. D. Dubrovenskii | Synthesis of vanadium titanium oxide nanostructures on the surface of silica gel and pyrographite and simulation of the processes of their formation | Russian | Синтез ванадий(титан) оксидных наноструктур на поверхности силикагеля и пирографита и моделирование процессов их формирования | Saint-Petersburg State Technological Institute (SPbSTI) | Saint Petersburg | Russia | 229 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
74 | 1997 | Janne Jokinen | Time-of-flight spectrometry of recoiled atoms in the analysis of thin films | English | University of Helsinki, Department of Physics, Accelerator Laboratory | Helsinki | Finland | 38 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
75 | 1997 | Zh. N. Ishutina | Phase formation and properties of materials in the compositions on the basis of the system Al2O3-SiO2-TiO2 | Russian | Фазообразование и свойства материалов в нанокомпозициях на основе системы Al2 O3-SiO2-TiO2 | Saint-Petersburg State Technological Institute (SPbSTI) | Saint Petersburg | Russia | 182 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
76 | 1997 | Arla Kytökivi | Growth of ZrO2 and CrOx on high surface area oxide supports by atomic layer epitaxy | English | Helsinki University of Technology, Department of Chemical Technology, Laboratory of Inorganic and Analytical Chemistry | Espoo | Finland | 54 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
77 | 1998 | I.O. Nikiforova | Formation and investigation of charge properties of MOS structures based on alumina | Russian | Формирование и исследование зарядовых свойств МДП структур на основе оксида алюминия | Saint-Petersburg State University | Saint Petersburg | Russia | ||||||||||||||||||||||
78 | 1998 | Yasutoshi Ohtake | Study of high efficiency Cu(InGa)Se2 thin-film solar cells with various buffer layers | English | Tokyo | Tokyo | Japan | from K. Shima to Riikka | https://ci.nii.ac.jp/naid/500000165338?l=en | |||||||||||||||||||||
79 | 1998 | O. V. Osipenkova | Local physico-chemical transformations on the surface of silica in the processes of interaction with TiCl4, VOCl3, CrO2Cl2 and H2O | Russian | Локальные физико-химические превращения на поверхности кремнезёма в процессах взаимодействия с TiCl4, VOCl3, Cr02Cl2 и Н20 | Saint-Petersburg State Technological Institute (SPbSTI) | Saint Petersburg | Russia | 177 | Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240 | ||||||||||||||||||||
80 | 1998 | Baosheng Sang | Study of transparent conducting ZnO grown by atomic layer deposition and its applications to amorphous silicon solar cells | English | Tokyo Institute of Technology | Tokyo | Japan | from K. Shima to Riikka | https://ci.nii.ac.jp/naid/500000165346?l=en | |||||||||||||||||||||
81 | 1998 | Per Tägtström | Vapor phase deposition of WO and WC | English | Uppsala University, Department of Chemistry | Uppsala | Sweden | 46 | Mats Boman | no full text | ||||||||||||||||||||
82 | 1998 | Marja Tiitta | Studies on precursors and their application in the atomic layer epitaxy growth of thin films for electroluminescent devices | English | Helsinki University of Technology, Department of Chemical Technology, Laboratory of Inorganic and Analytical Chemistry | Helsinki | Finland | 44 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
83 | 1999 | Arja Hakuli | Preparation and characterization of supported CrOx catalysts for butane dehydrogenation | English | Helsinki University of Technology, Department of Chemical Technology, Laboratory of Industrial Chemistry | Espoo | Finland | 48 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
84 | 1999 | Kaupo Kukli | Atomic layer deposition of artificially structured dielectric materials | English | University of Tartu | Tartu | Estonia | 68 | 160 | Väino Sammelselg | http://dspace.ut.ee/handle/10062/43525 | |||||||||||||||||||
85 | 1999 | Maria Kurhinen | Interactions of Mo(CO)6 and Co2(CO)8 with alumina and silica supports: IR spectroscopic, modelling and temperature programmed studies | English | University of Joensuu, Department of Chemstry | Joensuu | Finland | 36 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
86 | 1999 | Per Mårtensson | Atomic layer epitaxy of copper | English | Uppsala University, Department of Chemistry | Uppsala | Sweden | 45 | Mats Boman | no full text is avaliable | ||||||||||||||||||||
87 | 1999 | Sari Myllyoja | Chromium hexacarbonyl supported on alumina and silica surfaces by gas phase adsorption; characterisation and activity in hydrodesulphurisation | English | University of Joensuu, Department of Chemstry | Joensuu | Finland | 36 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
88 | 1999 | Sari Suvanto | Co2(CO)8 adsorbed on SiO2 and MCM-41: Gas phase preparation and characterisation | English | University of Joensuu, Department of Chemstry | Joensuu | Finland | 33 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
89 | 1999 | Mika Suvanto | Hydrotreating catalysts based on tungsten hexacarbonyl: Controlled preparation, characterisation and activity in thiophene hydrodesulphurisation | English | University of Joensuu, Department of Chemstry | Joensuu | Finland | 34 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
90 | 1999 | Mikko Utriainen | Exploiting atomic layer epitaxy thin film deposition technique in solid-state chemical sensor applications | English | Helsinki University of Technology, Department of Chemical Technology, Laboratory of Inorganic and Analytical Chemistry | Espoo | Finland | 80 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | |||||||||||||||||||||
91 | 2000 | Koji Dairiki | Study of Amorphous Silicon Solar Cells with High Stabilized-Efficiency | English | Tokyo Institute of Technology | Tokyo | Japan | from K. Shima to Riikka | https://ci.nii.ac.jp/naid/500000197768?l=en | |||||||||||||||||||||
92 | 2000 | Wei-Min Li | Characterization and modification of SrS based blue thin film electroluminescent phosphors | English | University of Helsinki, Department of Chemistry, Laboratory of Inorganic Chemistry | Helsinki | Finland | 44 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | http://ethesis.helsinki.fi/julkaisut/mat/kemia/vk/li/characte.html | Oksana: Atomic Layer Epitaxy, but ALD also mentioned. No mention of ALD cycle | |||||||||||||||||||
93 | 2000 | Mikael Schuisky | CVD and ALD in the Bi-Ti-O system | English | Uppsala University, Department of Chemistry | Uppsala | Sweden | 47 | Mats Boman | http://www.diva-portal.org/smash/get/diva2:166046/FULLTEXT01.pdf | ||||||||||||||||||||
94 | 2000 | El Bekkaye Yousfi | Study of Atomic Layer Epitaxy (ALE) of oxides (ZnO, Al2O3) and sulfides (ZnS, In2S3) thin films: In situ quartz crystal microgravimetry and application for Cu(In,Ga)Se2 solar cells | French | Etude de la croissance de couches minces d'oxydes (ZnO, Al2O3) et de sulfures (ZnS, In2S3) par la méthode de dépôt chimique en phase vapeur à flux alternés (ALE): Etude par microgravimétrie à quartz et application à la réalisation des cellules solaires à base de Cu(In,Ga)Se2 | Université Pierre et Marie Curie | Paris | France | 220 | 228 | N. Schneider | |||||||||||||||||||
95 | 2001 | Katarina Forsgren | CVD and ALD of Group IV- and V-Oxides for Dielectric Applications. | English | Uppsala University, Department of Materials Chemistry. | Uppsala | Sweden | 55 | Thesis online | https://www.diva-portal.org/smash/get/diva2:160934/FULLTEXT01.pdf | ||||||||||||||||||||
96 | 2001 | Marika Juppo | Atomic Layer Deposition of Metal and Transition Metal Nitride Thin Films and In Situ Mass Spectrometry Studies | English | University of Helsinki, Department of Chemistry, Laboratory of Inorganic Chemistry | Helsinki | Finland | 65 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | http://ethesis.helsinki.fi/julkaisut/mat/kemia/vk/juppo/ | Oksana: In this thesis terms ALD, ALD cycle, temperature window are used | |||||||||||||||||||
97 | 2001 | Jung-Wook Lim | A study on the kinetic model the thin film growth in ALD | English | Korea Advanced Institute of Science and Technology | Deajeon | Republic of Korea | 91 | Korea Advnaced Institute of Science and Technology (KAIST) | http://library.kaist.ac.kr/thesis01/2001/2001D000965336_S1Ver2.pdf | ||||||||||||||||||||
98 | 2001 | Björn Mårlid | Theoretical modelling of thin film growth in the B-N system | English | Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry. | Uppsala | Sweden | 64 | Mats Boman | http://kutol.narod.ru/PUBL/films.pdf | ||||||||||||||||||||
99 | 2001 | Minna Nieminen | Deposition of binary and ternary oxide thin films of trivalent metals by atomic layer epitaxy | English | Helsinki University of Technology, Department of Chemical Technology, Laboratory of Inorganic and Analytical Chemistry | Espoo | Finland | 57 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf | http://lib.tkk.fi/Diss/2001/isbn9512259141/ | Oksana: Author uses the original name ALE, but says "Other names have therefore been suggested, such as atomic layer deposition (ALD), atomic layer chemical vapor deposition (ALCVD), atomic layer growth (ALG), digital layer epitaxy (DLE) and molecular layer epitaxy (MLE).Since the late 1990s,the name atomic layer deposition (ALD) appears to have won over the others." (with the ref. of Ritala, M. and Leskelä, M, in Handbook of Thin Film Materials 2001). | |||||||||||||||||||
100 | 2001 | Jarkko Räty | Re2(CO)10 deposited on g-alumina: temperature programmed studies, modelling and activity in thiophene hydrodesulphurization | English | University of Joensuu, Department of Chemstry | Joensuu | Finland | 34 | FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf |