PECVD#1 300nm SIN film - 2018

	A	B	C	D	E	F	G	H	I	J	K	L	M	N	O	P	Q	R	S	T	U	V	W	X	Y	Z	AA	AB	AC
1	Date	Film	Recipe	Subs. T	Thickness	Dep.time	JAW EC-400 (Woolam Spec. Ell.)		Dep.rate	Stress	BHF etch rate wafer	LPD (Gain4) particle size (0.16-1.6)um		Haze, for Gain 4	LPD (Gain2) particle size (2.8-28.0)um		Photos	Photos	AVG dep.rate	AVG+10%	AVG-10%	AVG index@632.8	AVG+2%	AVG-2%	AVG.Stress	Avg+30%	Avg-30%	Comments/Brian Lingg PM	Notes
2					Wafer center
3	1/1/2012	SiN	SiN_10	250 °C	(Å)	sec	Index @ 632.8nm	Index @ 1550nm	( nm/min)	MPa	( nm/min)	Before Deposition	After Deposition	%	Before Deposition	After Deposition	Surfscan	Optical Microscope										Deposition done on 4"Si wafer

4							Index @ 632.8nm	Index @ 1550nm	Dep.rate	Stress							Dropbox/Biljana/Photos/2017/Particles/PECVD#1	Biljana/Gmail account	Avg.dep.rate	Avg.+10%	Avg.-10%	Avg.Index	Avg+2%	Avg-2%	Avg.Stress	Avg.s.+30%	Avg.s. -30%	Replaced the Silane and Ammonia MFCs-Avg-2017
5	11-15-2017	SiN	SiN_30	250	3075.57	1551.7	1.949	1.906	11.89	435.45	133.68	16	1932	no data	12	519	grouped particles	DF-particles	12.00	13.20	10.80	1.942	1.981	1.903	441.87	574.43	309.31	Same: A lot of small, grouped particles #2(0.213-0.284)um	BHF for 15sec
6	12-01-2017	SiN	SiN_30	250	3147.76	1551.7	1.949	1.906	12.17	444.12	137.82	9	1996	no data	12	204	grouped particles	DF-particles	12.00	13.20	10.80	1.942	1.981	1.903	441.87	574.43	309.31	Small grouped paricles	BHF for 15sec
7	01-25-2018	SiN	SiN_30	250	3161.63	1551.7	1.952	1.906	12.23	457.77	135.71	34	389	no data	2	34	no particles	DF-no particles	12.00	13.20	10.80	1.942	1.981	1.903	441.87	574.43	309.31	No grouped paricles	BHF for 15sec
8	02-26-2018	SiN	SiN_30	250	3086.60	1551.7	1.949	1.905	11.94	458.53	134.08	123	199	no data	35	54	no particles	DF-no particles	12.00	13.20	10.80	1.942	1.981	1.903	441.87	574.43	309.31	No grouped paricles	BHF for 15sec
9	04-12-2018	SiN	SiN_30	250	3037.60	1551.7	1.945	1.902	11.75	433.89	84.37	134	3137	no data	74	391	big particles	DF-big particles	12.00	13.20	10.80	1.942	1.981	1.903	441.87	574.43	309.31	Some grouped aprticles/Brian would replace shoewrhead	Some users do not clean, they just run deposition!, BHF=30sec
10	04-17-2018	SiN	SiN_30	250	3023.40	1551.7	1.933	1.892	11.69	447.41	86.78	75	1959	no data	26	88	some big particles	DF-some big particles	12.00	13.20	10.80	1.942	1.981	1.903	441.87	574.43	309.31	After replacing shower head	BHF=30sec
11	06-14-2018	SiN	SiN_30	250	3044.77	1551.7	1.939	1.897	11.77	438.47	75.28	1	1247	97	3	49	small partciles	DF-some big particles	12.00	13.20	10.80	1.942	1.981	1.903	441.87	574.43	309.31	Showerhead pattern	BHF=30sec
12	08-14-2018	SiN	SiN_30	250	3232.23	1551.7	1.937	1.903	12.50	443.43	88.31	18	1610	100	3	57	grouped particles	inspect again	12.00	13.20	10.80	1.942	1.981	1.903	441.87	574.43	309.31	Showerhead pattern	BHF=30sec
13	11-02-2018	SiN	SiN_30	250	3015.49	1500.0	1.923	1.884	12.06	417.72	108.64	3	114	73	1	44	good	good	12.00	13.20	10.80	1.942	1.981	1.903	441.87	574.43	309.31	No showerhead pattern	BHF=30sec
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21				Avg.Thickness	3091.67
22						Avg. Index	1.942
23						Avg+2%	1.981
24						Avg-2%	1.903
25							Avg. Index	1.900
26							Avg+2%	1.938
27							Avg-2%	1.862
28								Avg Dep.Rate	12.00
29								Avg +10%	13.20
30								Avg - 10%	10.80
31									Avg. Stress	441.87
32									Avg +30%	574.43
33									Avg - 30%	309.31
34										Avg. HF e.r.	109.41
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