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DateFilmRecipeSubs. TCoat.timeDep.timeThickness JAW EC-400 (Woolam S.E.)Avg IndexDep.rate Avg.dep. rateBHF e.r. Stress Avg StressLPD (gain4) paricle size (0.16-1.6)umHaze, for Gain 4LPD (gain2) particle size (1.6-28.0)umPhotosPhotosComment/Brian Ling maintenance
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°Cminmin(nm)Index @ 632.8nmIndex @ 1550nmIndex @ 632.8nm(nm/min)(nm/min)(nm/min)MPaBefore depositionAfter deposition%Before depositionAfter depositionSurfscanOpt.micr. DF4"Si wafer placed in the center of platen
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OxideIndexAvg.IndexDep.rate Avg.dep.rateStress Avg.StressMaintenance
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11/02/18SiO2STD oxide3001010390.641.4711.4611.47539.0631.03405.54-266.27-273.882359421241Good!DF-no particleswafer moved during deposition
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01/22/19SiO2STD oxide3001010363.761.4721.4611.47536.3831.03560.56-224.20-273.88no datano datano datano datano dataMike replaced inulator on 2/7/19
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02/11/19SiO2STD oxide3001010301.601.4751.4641.47530.1631.03430.46-274.39-273.88no datano datano datano datano datawafer moved during dep. toward BR corner
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03/05/19SiO2STD oxide3001010273.031.4751.4651.47527.3031.03494.20-291.05-273.883633329022178Goodnot doneShowerhead pattern!
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04/02/19SiO2STD oxide3001010272.051.4761.4651.47527.2131.03494.59-291.01-273.882519998380very few big partcilesdone, OKLooks good
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05/03/19SiO2STD oxide3001010273.961.4751.4651.47527.4031.03498.02-281.41-273.882136337747329Gooddone, OKLooks good
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06/03/19SiO2STD oxide3001010292.801.4781.4631.47529.2831.03490.12-265.83-273.8811534051943GoodOKLooks good
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08/06/19SiO2STD oxide3001010303.491.4751.4621.47530.3531.03444.46-264.91-273.8835295no data25190Gooddone, OKNo showerhead pattern
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09/17/19SiO2STD oxide3001010297.871.4741.4631.47529.7931.03450.90-270.58-273.88no datano datano datano datano dataGooddone, OKNo showerhead pattern
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10/07/19SiO2STD oxide3001010318.851.4751.4621.47531.8931.03447.62-301.86-273.8813323911135Gooddone, OKThrottle valve changed 9/24/19
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11/04/19SiO2STD oxide3001010324.571.4741.4621.47532.4631.03424.88-289.81-273.8817281813981Gooddone, OKNo showerhead pattern
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12/02/19SiO2STD oxide3001010311.581.4751.4641.47531.1631.03437.40-265.23-273.88113739131117Gooddone, goodSome showerehead pattern (not much)
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Avg Thickness310.35464.90
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Avg Index1.4751.46331.03Avg Stress-273.88
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Index+1%1.4891.47834.14Avg+30%-356.04
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Index-1%1.4601.44827.93Avg-30%-191.72
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