Thickness uniformity-Unaxis SiO2 HDR 250C - 2020

	B	C	D	E	F	G	H
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2		Thickness, A		Index @632.8nm		Thickn. Uniformity, %
3		Min	Max	Min	Max		Comment/Mike SIlva
4	Date	center of wafer	1cm from edge	center of wafer	1cm from edge	Thickness Uniformity, %
5	09-05-19	3278.20	3147.60	1.473	1.472	97.97	Thicker in the center
6	09-06-19	3280.13	3155.33	1.472	1.472	98.06	Thicker in the center
7	01-21-20	3479.90	3371.24	1.465	1.466	98.41	Thicker in the center
8	02-18-20	3489.45	3327.55	1.465	1.466	97.63	Thicker in the center
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18	Average:	3381.92	3250.43	1.469	1.469	98.02
19	Avg.+2%	3449.56	3315.44	1.498	1.498
20	Avg.-2%	3314.28	3185.42	1.439	1.440
21	Max	3489.45	3371.24	1.473	1.472	98.41
22	Min	3278.20	3147.60	1.465	1.466	97.63
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