ABCDEFGHIJKLMNOPQ
1
2
Thickness, (Å)Index @632.8nm
3
DateMaxMinMaxMinThickness Uniformity, %Comment
4
center of wafer1cm from edgecenter of wafer1cm from edge
5
08-18-143119.723075.241.7241.71199.28nice, uniform film
6
08-29-143203.073097.381.7081.69498.32
7
09-16-143248.063169.421.7081.68498.77
8
10-01-143320.323246.491.7061.68698.88
9
10-15-143238.073176.971.7201.70899.05
10
11-06-143337.153208.081.7161.69798.03
11
12-08-143065.412974.601.7421.72598.50( silane,and O2 low)
12
13
14
Average3218.833135.451.7181.70198.69
15
Avg.+2%3283.213198.161.7521.735
16
Avg.-2%3154.453072.751.6831.667
17
Max3337.153246.491.7421.72599.28
18
Min3065.412974.601.7061.68498.03
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66