Particulates in films in Advanced PECVD2-2015

	A	B	C	D	E	F	G	H	I	J	K
1
2	Date	Film	Time(sec)	Tool	LPD count, all size particles(0.160-1.60)um		Delta (all size of particles)	LPD, ONLY particles size#1(0.160-0.213)um		Delta( particles #1)	Comments
3								smallest particles
4					before deposition	after deposition	LPDad-LPDbd	before deposition	after deposition	LPDad-LPDbd
5	Date						Particles in SiO2
6	05-Nov-14	Oxide	600	Advanced PECVD	78	128	50	30	33	3
7	09-Dec-14	Oxide	600	Advanced PECVD	111	262	151	41	60	19
8	14-Jan-15	Oxide	600	Advanced PECVD	127	152	25	53	56	3
9	09-Feb-15	Oxide	600	Advanced PECVD	156	630	474	103	149	46
10	06-Apr-15	Oxide	600	Advanced PECVD	377	444	67	126	190	64
11	28-May-15	Oxide	600	Advanced PECVD	128	248	120	66	96	30
12	16-Jun-15	Oxide	600	Advanced PECVD	567	2469	1902	290	2067	1777
13	06-Nov-15	Oxide	600	Advanced PECVD	129	213	84	75	98	23
14	Max						1902			1777
15	Min						25			3
16							Particles in Nitride2
17	05-Nov-14	Nitride 2	1800	Advanced PECVD	87	174	87	35	53	18
18	09-Dec-14	Nitride 2	1800	Advanced PECVD	149	430	281	57	82	25
19	14-Jan-15	Nitride 2	1800	Advanced PECVD	105	270	165	34	96	62
20	09-Feb-15	Nitride 2	1800	Advanced PECVD	76	270	194	46	60	14
21	06-Apr-15	Nitride 2	1800	Advanced PECVD	217	323	106	55	76	21
22	28-May-15	Nitride 2	1800	Advanced PECVD	173	438	265	91	191	100
23	16-Jun-15	Nitride 2	1800	Advanced PECVD	491	995	504	253	465	212
24	06-Nov-15	Nitride 2	1800	Advanced PECVD	62	123	61	23	76	53
25
26	Max						504			212
27	Min						61			14
28							Particles in LS Nitride2
29	05-Nov-14	LS Nitride2	1800	Advanced PECVD	144	530	386	53	126	73
30	09-Dec-14	LS Nitride2	1800	Advanced PECVD	439	695	256	98	110	12
31	14-Jan-15	LS Nitride2	1800	Advanced PECVD	202	354	152	150	187	37
32	09-Feb-15	LS Nitride2	1800	Advanced PECVD	87	412	325	79	112	33
33	06-Apr-15	LS Nitride2	1800	Advanced PECVD	333	1141	808	107	806	699
34	13-May-15	LS Nitride2	1800	Advanced PECVD	177	519	342	99	238	139
35	28-May-15	LS Nitride2	1800	Advanced PECVD	218	756	538	99	317	218
36	18-Jun-15	LS Nitride2	1800	Advanced PECVD	220	297	77	84	106	22
37	06-Nov-15	LS Nitride2	1800	Advanced PECVD	47	138	91	24	50	26
38	Max						808			699
39	Min						77			12
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