Table for SiN 100C

	A	B	C	D	E	F	G	H	I	J	K
1	SiN 100C
2	Sequence Contents	Pre dep 100C-SEQUENCE					SiN 100C Gas Stab	SiN 100C Ignition	SiN 100C Dep	Post Dep PD-Purge-SEQUENCE
3	Process step	PreDep100C Pumpdown	PreDep100C O2Ar Gas Stab	PreDep100C O2Ar Ignition	PreDep100C O2Ar Plasma	PreDep100C Pumpdown	SiN 100C Gas Stab	SiN 100C Ignition	SiN 100C Dep	Post Process Flush	Post Process Pumpdown
4	Parameters
5	Process time (sec)	30	15	3	90	30	15	6	As required	30	30
6	Pressure (mTorr)	0	5	5	5	0	5	5	5	10	0
7	Temperature2 (deg C)	100	100	100	100	100	100	100	100	100	100
8	RF1 Forward Power (W)	0	0	130	0	0	0	150	0	0	0
9	RF2 Forward Power (W)	0	0	600	600	0	0	800	800	0	0
10	SiH4 100% (sccm)						10	10	10
11	N2 500 (sccm)									100
12	AR 100 (sccm)		50	50	50		20	20	20
13	O2 100 (sccm)
14	N2 20 (sccm)						7.5	7.5	7.5
15
16	Temperature1=40 C
17	Temperature3=40 C
18	Helium Cooler Pressure Setpint=5000mTorr
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100