8.11.1 - ASIQ 502 A Step 20 um Pitch Measurement Specification
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Measurement Specification: 8.11.1 - ASIQ 502 Å Step, 20 um Pitch on (asiq)
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Description:This monitor tracks the average, standard deviation, and range of step height and pitch measurments using a 5-point measurement on a film of SiO2 that is 502 Å thick on top of a Si substrate. Process Staff should be notified if the 5-point measurement of the standard is more than +/- 5%Measurement Performance
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Tool:(asiq)
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Standard:VLSI Step Height Standard Step Height 502 Å (883-008-003)
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Location of Saved Data:N/A
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Tool Specifications
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StepToolSettings
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8.11.1 - Measure(asiq)Lines and spaces should be aligned vertically in field of view. Scan direction is left to right, Scan length = 500 µm, Scan speed = 20 µm/s, Sample rate = 200 Hz, Sensor Range = 20 µm, Analysis = Step Height, Contact speed = 5, Required radius = 5 µm, Level sample using two zones. Measure step with two zones.
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Output Response
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Response 1:
Step
DescriptionTarget
(Å)
USL
(Å)
LSL
(Å)
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Average step5-point average of measurement taken at bottom left region of chip. Target location is labeled Test Track Pitch = 20 µm.

USL and LSL are +/- 5% of target.
502527477
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Response 2:
Pitch
Description
Target
(um)
USL
(um)
LSL
(um)
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Average pitch5-point average of measurement taken at bottom left region of chip. Target location is labeled Test Track Pitch = 20 µm.

USL and LSL are at +/- 5% of target.
20.0021.0019.00
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For more information: tinyurl.com/asiq-502-20
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