Thickness uniformity-Adv. PECVD Nitride2 2019

	B	C	D	E	F	G	H	I
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2		Thickness, A		Index @632.8nm		Thickn. Uniformity, %	Comment	Observation
3		Max	Min	Min	Max
4	Date	center of wafer	1cm from edge	center of wafer	1cm from edge	Thickness Uniformity, %
5	10-08-18	2398.10	2335.90	1.991	1.995	98.69	Film thicker in the center
6	11-02-18	2298.22	2265.37	2.003	2.002	99.28	Film thicker in the center
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16	Average	2348.16	2300.64	1.997	1.999	98.98
17	Avg.+2%	2395.12	2346.65	2.037	2.038
18	Avg.-2%	2301.20	2254.62	1.957	1.959
19	Max	2398.10	2335.90	2.003	2.002	99.28
20	Min	2298.22	2265.37	1.991	1.995	98.69
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