ABCDEFGHIJKLMNOPQRSTUVWXY
1
DateNameProjectStart TimeSubstrateProcessThrottle SRC1Setting SRC3SRC3 Precursor: DoseTime (ms)SRC3 Precursor: Purge Time (ms)SCR3: Num DosesSRC1 Precursor: Dose Time (ms)SRC1 Precursor: Purge Time (ms)SRC1: Num DosesNumber of CyclesFinish TimeNotes
2
2/28/2024Tyler BradyTraining8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)N/AN/A25060000500600001010:15 PMDavis Training
3
3/6/2024Giovanni RuizAl Depo8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)N/AN/A2506000050060000811:00 AM
4
3/6/2024Tyler BradyTesting TMA12:00SiTMA/water (Al2O3)N/AN/A2506000050060000302:00 PM
Everything functions
5
3/7/24Robert DavisAl Depo8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)N/AN/A2506000050060000209:30 AM
6
3/7/24Giovanni RuizAl Depo8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)N/AN/A2506000050060000209:40 AM
7
3/18/24Giovanni RuizAl Depo8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)N/AN/A2506000050060000209:40 AM
8
3/18/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A15030000150300002011:40 AM
9
3/20/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A15030000150300002011:00 AM
10
3/20/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A15030000150300001011:40 AM
11
3/20/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A1503000015030000511:40 AM
12
3/20/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A1503000015030000151:00 PM
13
3/29/24Josh HancockAl Depo12:00 PMCNTsTMA/water (Al2O3)N/AN/A301200030180001504:20 PM
14
4/1/24Giovanni RuizAl Depo8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)N/AN/A250600005006000020
15
4/5/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A15030000150300001511:00 AM
16
4/5/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A101000150100001011:00 AM
17
4/5/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A1503000015030000512:00 PM
18
4/24/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A15060000150300002011:00 AM
19
4/24/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A1506000015060000511:00 AM
20
4/24/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A1506000015060000102:00 PM
21
4/24/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A1506000015060000152:00 PM
22
5/6/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A15060000150600001511:00 AM
23
5/6/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A15060000150600001511:00 AM
24
5/7/24Tyler BradyBDMADMS10:00 AMSilliconBDMADMSN/AN/AN/AN/AN/AN/A505:30 PM
25
5/8/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A15060000150600002011:00 AM
26
5/8/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A1506000015060000153:00 PM
27
5/8/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A150600001506000055:00 PM
28
5/9/24Tyler BradyBDMADMS12:00 PMSilliconBDMADMSN/AN/AN/AN/AN/AN/A1505:30 PM
29
5/14/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A1506000015060000201:00 PM
30
5/14/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A1506000015060000153:00 PM
31
5/16/24Joshua BradyFe(Cp)29:00 AMSilliconFe(Cp)2/O3N/AN/A400003000024000030000405:00 PM
32
5/17/24Tyler BradyFe(Cp)29:00 AMSilliconFe(Cp)2/O3N/AN/A400003000024000030000405:00 PM
33
5/20/24Joshua BradyFe(Cp)210:00 AMsilliconFe(Cp)2/O3N/AN/A40000300002400003000031:pm
34
5/21/24Joshua BradyFe(Cp)212:00 PMsilliconFe(Cp)2/O3N/AN/A400003000024000030000455:00 PM
35
5/14/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A150600001506000015 :00:00 PM
36
5/23/24Tyler BradyAl Depo9:30 AMSilliconTMA/water (Al2O3)nN/AN/A15060000150600001605:00 PM
37
5/28/24Joshua BradyAl Depo11:00 AMTMA/water (Al2O3)n/aN/A15030000150300001005:pm
38
5/29/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A1506000015060000153:00 PM
39
06/03/24Joshua BradyAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A75250007515000200010:00 AM
40
06/05/24Rob DavisSS_Nuc14:15Silicon + SSTMA/water (Al2O3)​15060000150600005508:48 AM
41
06/07/24Joshua BradyAl Depo10:00 AMSilliconTMA/water (Al2O3)N/AN/A1506000015060000225010:00 AM
42
6/11/24Tyler BradyFerrocine10:00 AMSilliconFe(Cp)2/O3N/AN/A400003000024000030000368:00 PM
43
6/12/24Tyler BradyFerrocine10:00 AMSilliconFe(Cp)2/O3N/AN/A400003000024000030000728:00 PM
44
6/13/24Joshua BradyFe(Cp)21:00 PMSiliconFe(Cp)2/O3N/AN/A400003000024000030000143:00 PM
45
7/6/24Tyler BradyFe(Cp)211:00 AMSiliconFe(Cp)2/O3N/AN/A40000300002400003000029
46
7/7/2024Tyler BradyFe(Cp)211:00 AMSiliconFe(Cp)2/O3N/AN/A40000300002400003000018612:30
47
7/8/24Rob DavisSS_Nuc7:00 PMSilicon + SSTMA/water (Al2O3)N/AN/A15060000150600005501:47 PM
48
7/15/24Tyler Brady3DMAS10:00 AM
Sillicon + Alumina
3DMAS + O3N/AN/A500500010000100001305:00 PM
49
7/18/2024Samira JafariAl thin film09::00 AMSiliconTMA/water (Al2O3)N/AN/A250600005006000036:00 PM
50
7/18/2024Tyler Brady3DMAS7:00 PMSilicon3DMAS OzoneVaryVaryVaryVary120
51
7/22/2024Tyler Brady3DMAS9:00 AMSilicon3DMAS OzoneN/AN/AVaryVaryVaryVary1204:30 PM
52
3/29/24Josh HancockAl Depo2:00:00 PMCNTsTMA/water (Al2O3)N/AN/A301200030180001506:00 PM
53
07/31/24Joshua Brady3dmas12:00 PMsilicon3DMAS Ozonen/an/a800vary1000010000304:00 PM
54
8/2/24Rob Davis3dmas5:00 PMSS3DMAS Ozonen/an/a1000010000100001000055011:00 PM
55
08/12/24Joshua BradyFe(cp)212:00 PMsiliconFe(Cp)2/O3N/An/a400003000024000030000504:00 PM
56
57
58
59
60
61
62
Insert above this row
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Cycles Since water changed
7991
63
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65
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69
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73
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76
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78
79
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100