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1000NameProjectStart TimeSubstrateProcessSRC3 Precursor: DoseTime (ms)SRC3 Precursor: Purge Time (ms)SCR3: Num DosesSRC1 Precursor: Dose Time (ms)SRC1 Precursor: Purge Time (ms)SRC1: Num DosesPrecursor TempChamber TemperatureNumber of CyclesFinish TimeNotes
2
2/28/2024Tyler BradyTraining8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)25060000500600001010:15 PMDavis Training
3
3/6/2024Giovanni RuizAl Depo8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)2506000050060000811:00 AM
4
3/6/2024Tyler BradyTesting TMA12:00SiTMA/water (Al2O3)2506000050060000302:00 PM
Everything functions
5
3/7/24Robert DavisAl Depo8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)2506000050060000209:30 AM
6
3/7/24Giovanni RuizAl Depo8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)2506000050060000209:40 AM
7
3/18/24Giovanni RuizAl Depo8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)2506000050060000209:40 AM
8
3/18/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)15030000150300002011:40 AM
9
3/20/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)15030000150300002011:00 AM
10
3/20/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)15030000150300001011:40 AM
11
3/20/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)1503000015030000511:40 AM
12
3/20/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)1503000015030000151:00 PM
13
3/29/24Josh HancockAl Depo12:00 PMCNTsTMA/water (Al2O3)301200030180001504:20 PM
14
4/1/24Giovanni RuizAl Depo8:00 AMSillicon/Brazed SS&CuTMA/water (Al2O3)250600005006000020
15
4/5/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)15030000150300001511:00 AM
16
4/5/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)101000150100001011:00 AM
17
4/5/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)1503000015030000512:00 PM
18
4/24/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)15060000150300002011:00 AM
19
4/24/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)1506000015060000511:00 AM
20
4/24/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)1506000015060000102:00 PM
21
4/24/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)1506000015060000152:00 PM
22
5/6/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)15060000150600001511:00 AM
23
5/6/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)15060000150600001511:00 AM
24
5/7/24Tyler BradyBDMADMS10:00 AMSilliconBDMADMSN/AN/AN/AN/A505:30 PM
25
5/8/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)15060000150600002011:00 AM
26
5/8/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)1506000015060000153:00 PM
27
5/8/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)150600001506000055:00 PM
28
5/9/24Tyler BradyBDMADMS12:00 PMSilliconBDMADMSN/AN/AN/AN/A1505:30 PM
29
5/14/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)1506000015060000201:00 PM
30
5/14/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)1506000015060000153:00 PM
31
5/16/24Joshua BradyFe(Cp)29:00 AMSilliconFe(Cp)2/O3400003000024000030000405:00 PM
32
5/17/24Tyler BradyFe(Cp)29:00 AMSilliconFe(Cp)2/O3400003000024000030000405:00 PM
33
5/20/24Joshua BradyFe(Cp)210:00 AMsilliconFe(Cp)2/O340000300002400003000031:pm
34
5/21/24Joshua BradyFe(Cp)212:00 PMsilliconFe(Cp)2/O3400003000024000030000455:00 PM
35
5/14/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)150600001506000015 :00:00 PM
36
5/23/24Tyler BradyAl Depo9:30 AMSilliconTMA/water (Al2O3)15060000150600001605:00 PM
37
5/28/24Joshua BradyAl Depo11:00 AMTMA/water (Al2O3)15030000150300001005:pm
38
5/29/24SamiraAl Depo10:00 AMSilliconTMA/water (Al2O3)1506000015060000153:00 PM
39
06/03/24Joshua BradyAl Depo10:00 AMSilliconTMA/water (Al2O3)75250007515000200010:00 AM
40
06/05/24Rob DavisSS_Nuc14:15Silicon + SSTMA/water (Al2O3)15060000150600005508:48 AM
41
06/07/24Joshua BradyAl Depo10:00 AMSilliconTMA/water (Al2O3)1506000015060000225010:00 AM
42
6/11/24Tyler BradyFerrocine10:00 AMSilliconFe(Cp)2/O3400003000024000030000368:00 PM
43
6/12/24Tyler BradyFerrocine10:00 AMSilliconFe(Cp)2/O3400003000024000030000728:00 PM
44
6/13/24Joshua BradyFe(Cp)21:00 PMSiliconFe(Cp)2/O3400003000024000030000143:00 PM
45
7/6/24Tyler BradyFe(Cp)211:00 AMSiliconFe(Cp)2/O340000300002400003000029
46
7/7/2024Tyler BradyFe(Cp)211:00 AMSiliconFe(Cp)2/O340000300002400003000018612:30
47
7/8/24Rob DavisSS_Nuc7:00 PMSilicon + SSTMA/water (Al2O3)15060000150600005501:47 PM
48
7/15/24Tyler Brady3DMAS10:00 AM
Sillicon + Alumina
3DMAS + O3500500010000100001305:00 PM
49
7/18/2024Samira JafariAl thin film09::00 AMSiliconTMA/water (Al2O3)250600005006000036:00 PM
50
7/18/2024Tyler Brady3DMAS7:00 PMSilicon3DMAS OzoneVaryVaryVaryVary120
51
7/22/2024Tyler Brady3DMAS9:00 AMSilicon3DMAS OzoneVaryVaryVaryVary1204:30 PM
52
3/29/24Josh HancockAl Depo2:00:00 PMCNTsTMA/water (Al2O3)301200030180001506:00 PM
53
07/31/24Joshua Brady3dmas12:00 PMsilicon3DMAS Ozone800vary1000010000304:00 PM
54
8/2/24Rob Davis3dmas5:00 PMSS3DMAS Ozone1000010000100001000055011:00 PM
55
08/12/24Joshua BradyFe(cp)212:00 PMsiliconFe(Cp)2/O3400003000024000030000504:00 PM
56
10/04/24Joshua BradyAl Depo6:00 PMsilicon
TMA/water (Al2O3)
75250007515000608:20 PM
57
10/08/24Joshua Brady3dmas11:00 AMsilicon3dmas500100015000100006012:42 PM
58
10/10/24Joshua Brady3dmas9:40 AMsilicon3dmas500100015000100003011:00 PM
59
10/11/24Joshua BradyFe(cp)21:00 PMsiliconFe(Cp)2/O3400003000024000030000254:00 PM
60
11/13/24Rob Davis3dmas7:00 PMSilicon + SS3DMAS Ozone1000100001500010000
extra purge 10000
1006:00 AM
61
11/14/24Rob Davis3dmas8:00 PMSilicon + SS3DMAS Ozone1000100001500010000
extra purge 10000
80011:12 AM
62
11/19/24Josh HancockAl Depo2:10 PMCNTsTMA/water (Al2O3)301200030180001004:00 PM
63
12/4/24Tyler Brady3DMAS12:00CNTs3DMAS + O350010001500010000603:00
64
12/4/2024Melanie MilesTraining4:00 PMCNTsTMA/water (Al2O3)150500015050003006:00
65
01/28/2025Brock SchindlerTraining11:00 AMSilicon3DMAS + O31005000500015000512:00
66
2/10/25Tyler Brady3DMAS3:50CNTs3DMAS + O3100010001500010000755:45
67
2/25/25Brock Schindler3DMAS1:15Silicon3DMAS + O32501000015000100002504:20
68
2/26/25Joshua BradyFe(cp)23:00 PMsiliconFe(Cp)2/O34000030000240000300001001:00 AM
69
2/27/25Joshua BradyFe(cp)210:00 AMsiliconFe(Cp)2/O34000030000240000300001011:30 AM
70
2/27/25Joshua BradyFe(cp)210:00 PMsiliconFe(Cp)2/O3400003000024000030000504:00 AM
71
2/28/25Joshua BradyFe(cp)211:00 AMsiliconFe(Cp)2/O3400003000024000030000303:00 PM
72
2/28/25Joshua BradyFe(cp)23:00 PMsiliconFe(Cp)2/O3400003000024000030000205:00 PM
73
04/01/25Joshua BradyFe(Cp)23:00 PMsiliconFe(Cp)2/O3400003000024000030000205:00 PM
74
05/06/25Joshua BradyFe(Cp)212:00 PMsiliconFe(Cp)2/O3400003000024000030000304:30 PM
75
05/07/25Joshua BradyFe(Cp)23:00 PMsiliconFe(Cp)2/O3400003000024000030000306:30 PM
76
05/08/25Joshua BradyFe(Cp)21:00 PMsiliconFe(Cp)2/O340000300003200003000019012:00 PM
77
05/13/25Joshua BradyFe(Cp)212:00 PMsiliconFe(Cp)2/O3400003000032000030000202:30 PM
78
05/15/25Joshua BradyFe(Cp)22:30 PMsiliconFe(Cp)2/O3400003000032000030000154:00 PM
79
05/19/25Joshua BradyFe(Cp)210:00 AMsiliconFe(Cp)2/O300320000100000202:00 PM
80
05/19/25Joshua BradyFe(Cp)22:30 PMsiliconFe(Cp)2/O34000038000000205:00 PM
81
05/20/25Joshua BradyFe(Cp)210:00 AMSiliconFe(Cp)2/O32000012000016000030000201:00 PM
82
05/20/25Joshua BradyFe(Cp)22:00 PMSiliconFe(Cp)2/O32000012000016000030000105:00 PM
83
5/22/25Rob Davis3dmas2:00 PMSilicon + SS3DMAS Ozone1000100001500010000300
84
5/23/25Alexander Randall3DMAS2:00 PM
Iron Powder Test
3DMAS + O317.560005000150001004:00 PM
85
05/27/25Joshua BradyFe(Cp)22:00 PMSiliconFe(Cp)2/O34000012000032000030000105:00 PM
86
05/28/25Joshua BradyFe(Cp)210:00 AMSiliconFe(Cp)2/O34000012000032000030000202:00 PM
87
05/29/25Joshua BradyFe(Cp)210:00 AMSiliconFe(Cp)2/O34000012000032000030000202:00 PM
88
05/30/25Alexander Randall3DMAS2:00 PM
Silicon + Porous SS
3DMAS + O31000100001500010000100200503:00 PM
89
05/30/25Alexander Randall3DMAS9:00 PMSilicon + CNT3DMAS + O310001000015000100001002005010:30 PM
15min manual ozone clean
90
05/30/25Alexander Randall3DMAS10:45 PMSilicon + CNT3DMAS + O31001000015000100001002005012:15 PM
15min manual ozone clean
91
05/31/25Alexander Randall3DMAS4:00 PMSilicon3DMAS + O31001000015000100001002001005:00 PM
92
06/03/25Joshua BradyFe(Cp)210:00 AMSiliconFe(Cp)2/O34000012000032000030000305:00 PM
93
06/03/25Joshua BradyFe(Cp)211:00 AMSiliconFe(Cp)2/O3400001200003200003000091:30 PM
94
06/05/25​Testing TMA10:45 AMStainlessSteelTMA/water (Al2O3)15100001815.51500018200184:20 PM
95
06/06/25Alexander Randall3DMAS14:30
Silicon + Porous SS
3DMAS + O31001000010015000100001001002001004:00 PM
10s dose wait time
96
06/06/25Alexander Randall3DMAS5:30 PM
Silicon + Powder
3DMAS + O310001000050150001000050100200506:30 PM
97
06/07/25Alexander Randall3DMAS1:30 PM
Silicon + Porous SS
3DMAS + O310001000050150001000050100200502:30 PM
98
06/09/25Alexander Randall3DMAS3:00 PM
Silicon + Porous
3DMAS + O310001000050150001000050100200504:00 PM
99
06/16/25Joshua BradyTesting TMA11:00 AMSiliconTMA/water (Al2O3)601000020401000202002012:00 PM
100
06/03/25Joshua BradyFe(Cp)211:00 AMSiliconFe(Cp)2/O340000120000432000030000480200412:30 PM