Advanced PECVD LS Nitride2 Data 2017

	B	C	D	E	F	G	H	I	J	K	O	S	T	U	V	W	X	Y	Z	AA	AB	AC
1	Date	User	Film	Recipe	Substrate T	Coat time	Dep.time	Thickness	JAW EC-400 (Woolam S.E.)		Dep.rate	HF e.r.	Stress	Avg Stress	Avg+50%	Avg-50%	LPD (Gain4) particle size 0.16-1.6um		LPD (Gain2) particle size 2.8-28.0um		Maintenance	Comments
2					300°C	min	sec	(Å)	Index @ 632.8nm	Index @ 1550nm	(nm/min)	(nm/min)	MPa				before deposition	after deposition	before deposition	after deposition	4"Si wafer, placed in the center of platen

3				LS Nitride 2					Index		Dep.rate		Stress	Avg.Stress	Avg+50%	Avg-50%
4	02/01/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2302.89	1.947	1.913	7.68	37.40	101.50	-0.48	-0.73	-0.24	17	145	no data	no data	No showerhead pattern
5	02/27/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2093.06	1.986	1.955	6.98	37.60	193.80	-0.48	-0.73	-0.24	no data	no data	no data	no data	Showerhead pattern!
6	03/20/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2146.30	1.971	1.934	7.15	31.80	80.45	-0.48	-0.73	-0.24	285	4391	no data	no data	Showerhead pattern!	New software installed 3-16-2017
7	04/18/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2142.89	1.957	1.922	7.14		109.10	-0.48	-0.73	-0.24	124	1199	no data	no data	Showerhead pattern!
8	05/22/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2152.51	1.955	1.921	7.18	47.21	109.74	-0.48	-0.73	-0.24	127	279	no data	no data	No showerhead pattern
9	06/16/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2890.29	1.966	1.934	9.63	32.91	101.45	-0.48	-0.73	-0.24	44	no data	no data	no data	no LPD data
10	08/07/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2583.46	1.949	1.914	8.61	28.60	-196.69	-0.48	-0.73	-0.24	0	4793	no data	no data	Showerhead pattern, a lot of particles (wafer sitting in the tool for 30min)	Key: run wet+ standard clean for a long time before particle check!
11	08/17/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2785.82	1.950	1.914	9.29	31.08	-48.83	-0.48	-0.73	-0.24	420	2895	72	98	Small showerhead pattern, some partciles near edge
12	08/23/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2542.02	1.953	1.918	8.47	32.70	-98.43	-0.48	-0.73	-0.24	34	1981	11	37	Small showerhead pattern, some partciles near edge
13	09/05/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2525.72	1.953	1.918	8.42	33.57	-134.66	-0.48	-0.73	-0.24	11	1589	4	19	No showerhead patterm, some particles near the edge
14	10/03/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2569.62	1.956	1.924	8.57		-92.30	-0.48	-0.73	-0.24	no data	no data	no data	no data
15	10/17/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2456.50	1.964	1.933	8.19	42.63	-40.91	-0.48	-0.73	-0.24	no data	no data	no data	no data	Dep. rate dropped!
16	10/25/17	Biljana	Si3N4	LS Nitride 2	300	10min	1800.00	2493.35	1.952	1.919	8.31	35.40	-90.52	-0.48	-0.73	-0.24	4015	14646	177	428	a lot of small partilces ( wafet had already a lot of articles in start)
17												35.54
18
19							Avg. Thickness	2437.26			8.12	Avg Stress	-0.48
20								Avg. Index	1.958	1.925	8.94	Avg+50%	-0.73
21								Index+1%	1.978	1.944	7.31	Avg-50%	-0.24
22								Index-1%	1.939	1.905
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