Chapter 2.01: Msink Summary Table
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msink #DescriptionChemicals UsedBaths/tanks?
Bath size
SRD?PR?Disposal MethodMetals used?
Furnace Compatible?
Notes/Comments
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msink1: 1165
PR clean (baths) and develop (beakers)base, solventyes - two 11658"yesyesEHS organic wasteyes - refractory metals onlyyes (after further clean steps)Note 2
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msink1: SVC-14
Pre-furnace metal cleansolvent SVC-148"yesnoEHS organic wasteyes - refractory metals onlyyes - metal contaminated furnaceNote 2
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msink2PR clean/develop - beaker and bath base, solventyes - SVC-14 and
two 1165
6"yesyesEHS organic wasteyes - AllnoNote 1
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msink3PR clean/develop - beaker only. Headway, ultrasonic, HMDSbase, solventnonoyesEHS organic wasteyes - Allno
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msink4 - KOHKOH bath for Si etchingbase yes - KOH6"nonodrain disposalnonoNote 3
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msink4 - TMAH
TMAH bath for Si etchingbase yes - TMAH6"nonodrain disposalnoyes - metal contaminated furnaceNote 2
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msink5 - bath
Make your own bath, primarily for metal etchantsacid, baseyes - "make your own" metal etchant8"noyes drain disposalyes - refractory metals onlyyes - metal contaminated furnaceNote 2
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msink5 - deck
Beaker level work. Refractory metals allowed.acid, base, solventno noyesdrain disposal,
EHS organic waste
yes - refractory metals onlyyes - metal contaminated furnaceNote 2
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msink6MOS-clean furnace -
HF. HCl, and piranha bath
acid, baseyes - 2 piranha, 1 HF, 1 HCl8"yesnodrain disposalnoyes - MOS clean
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msink7Hot phosphoric and "make your own" acid baths. Partially MOS-clean, partially non-MOSacid, baseyes - hot phosphoric, "make your own" acid6"noyesdrain disposalNoyes - details depend on side of sink and path forward
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msink8Non-MOS clean furnace -
HF and piranha bath
acid, baseyes - HF, piranha, "make your own" for 8" wafers8"yesnodrain disposalNoyes - Non-MOS furnace after this step, or pathway to msink6
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msink12III-V generalacid, base, solventnonoyesdrain disposal,
EHS organic waste
yes - refractory metals onlyyes - III-V furnaces onlyNote 3
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msink14Epi prep sinkacid, baseyes - RCA1, RCA2, HF6"nonodrain disposalnoyes - MOS clean
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msink16General use sinkacid, base, solventnonoyesdrain disposal,
EHS organic waste
yes - AllnoNote 1
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msink18General use sinkacid, base, solventnonoyesdrain disposal,
EHS organic waste
yes - AllnoNote 1
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msink20Diamond seeding, solvent ultrasonicatorsolventnonoyesDispose at msink16/18yes - Allno
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Note 1: Wafers processed at this sink are metal contaminated and NOT ALLOWED to return to msinks 6,7,8
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Note 2: Gold, copper, and/or other highly diffusive metals are NOT allowed at this sink.
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Note 3: Staff review required before wafers processed at this sink return to msinks 6,7,8.
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