6.22 CVD - Parylene C QM
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CVD - Parylene - Parylene C
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Process Specification
Process Performance
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Tool Name:Parylene
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Description: This monitor tracks the film thickness, rate of deposition and uniformity
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Recipe:Parylene C standard recipe
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Layer Material: Parylene C
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Weight of Dimer:~2.77g
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Targeted Results:
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TargetDescription
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Thickness 1 [A]:~3um5 point avg using Ellipse
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Thickness 2 [A]:Dektak L+R/2
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Non-Uniformity [%]:<5Calculated using (MAX-MIN) / (MAX+MIN) method on thickness data.
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Process Conditions:
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Base/Process Pressure: <10 / >26
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Furnace/Pyrolyzer/Chamber Gauge Temp:
690/175/135
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QM Process Procedure:
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StepToolDescription
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Stock Wafer-Bare Si P-type Test wafer
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CVDParyleneStandard Parylene C
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Follow manual step by step everytime!
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FT1Ellipse
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FT2Dektak
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