Particles Unaxis films @250C-2020

	A	B	C	D	E	F	G	H	I	J	K	L	M	N	O	P	Q
1
2			LPD- light particle detection (sum of the all particles)
3			Gain4 (0.16-1.60)um							Gain2 (2.80-28.0)um						Gain4	Gain 2
4	Date	Film	BEFORE Dep (bd)			AFTER Dep (ad)				BEFORE Dep (bd)			AFTER dep (ad)			Particles from film only
5	SiO2 LDR 250C film~300nm		LPD bd	#1(0.16-0.213)um	#8(1.20-1.60)um	LPD ad	#1(0.16-0.213)um	#8(1.20-1.60)um	Haze, %	LPD bd	#1(2.8-3.73)um	#8(21.0-28.0)um	LPD ad	#1(2.8-3.73)um	#8(21.0-28.0)um	LPD ad-LPD bd	LPD ad-LPD bd
6	Date		particle count			particle count				particle count			particle count			Gain4-SiO2-LDR~300nm,250C	Gain2-SiO2-LDR~300nm,2500C
7	2-Dec-19	SiO2 LDR	184	124	1	380	201	15	0	33	3	5	76	16	14	196	43
8	3-Dec-19	SiO2 LDR	27	14	2	309	82	19	1	17	1	3	80	16	13	282	63
9	21-Jan-20	SiO2 LDR	97	50	8	145	42	5	1	37	7	7	46	3	11	48	9
10	18-Feb-20	SiO2 LDR	96	32	10	812	504	28	1	106	10	22	171	20	39	716	65
11
12
13
14
15
16
17
18	Max															716	65
19	Min															48	9
20	SiO2 HDR 250C film~300nm															Gain4-SiO2-HDR~300nm,250C	Gain2-SiO2-HDR~300nm,250C
21	2-Dec-19	SiO2 HDR	50	24	7	180	66	16	1	24	4	3	58	8	10	130	34
22	03-Dec-19	SiO2 HDR	91	50	9	288	83	33	1	105	6	4	240	39	34	197	135
23	21-Jan-20	SiO2 HDR	86	45	4	140	50	9	1	25	4	8	48	7	14	54	23
24	18-Feb-20	SiO2 HDR	33	21	1	86	36	11	1	18	0	4	97	7	23	53	79
25
26
27
28
29
30
31
32	Max															197	135
33	Min															53	23
34	SiN 250C film~300nm															Gain4 SiN~300nm, 250C	Gain2 SiN~300nm, 250C
35	2-Dec-19	SiN 12.5sccm
36	16-Dec-19	SiN 12.5sccm	108	64	6	245	107	7	52	7	1	4	54	9	14	137	47
37	21-Jan-20	SiN 12.5sccm	119	56	8	214	57	6	52	29	8	9	48	5	14	95	19
38	18-Feb-20	SiN 12.5sccm	19	10	1	118	30	6	26	11	0	4	88	7	27	99	77
39
40
41
42
43
44
45
46
47
48	Max															137	77
49	Min															95	19
50	SiN LS 250C film~300nm															Gain4 SiN LS~300nm, 250C	Gain2 SiN LS~300nm, 250C
51	2-Dec-19	SiN Low Stress
52	16-Dec-19	SiN Low Stress
53	21-Jan-20	SiN Low Stress	119	56	8	214	57	6	52	29	8	9	48	5	14	95	19
54	18-Feb-20	SiN Low Stress	34	18	1	280	71	44	94	24	3	6	228	34	35	246	204
55
56
57
58
59
60
61
62
63
64
65	Max															246	204
66	Min															95	19
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100