Advanced PECVD Nitride2 Data 2017

	B	C	D	E	F	G	H	I	J	K	O	S	T	X	Y	Z	AA	AB
1	Date	User	Film	Recipe	Substrate T	Coat time	Dep.time	Thickness	JAW EC-400 (Woolam S. E.)		Dep.rate	HF e.r.	Stress	LPD (Gain4) particle size 0.16-1.6um		LPD (Gain2) particle size 2.8-28.0um		Comment/Mike Silva maintenance
2					300°C	min	sec	(Å)	Index @ 632.8nm	Index @ 1550nm	(nm/min)	(nm/min)	(MPa)	before deposition	after deposition	before deposition	after deposition	4"Si wafer, placed in the center of platen,~500um thick

3				Nitride 2			Dep.time		Index		Dep.rate		Stress					Maintenance
4	02/07/17	Biljana	Si3N4	Nitride 2	300	10min	1800.00	2488.12	1.976	1.937	8.29	41.00	466.97	no data	no data	no data	no data
5	02/27/17	Biljana	Si3N4	Nitride 2	300	10min	1800.00	2366.54	2.007	1.969	7.89	44.40	382.89	no data	no data	no data	no data	Test done on 800um test Si wafer
6	04/18/17	Biljana	Si3N4	Nitride 2	300	10min	1800.00	2341.52	1.985	1.945	7.81	45.76	487.52	132	825	no data	no data	showerhead pattern, but less then in oxide
7	05/22/17	Biljana	Si3N4	Nitride 2	300	10min	1800.00	2380.01	1.988	1.947	7.93	47.56	498.31	73	530	no data	no data
8	06/16/17	Biljana	Si3N4	Nitride 2	300	10min	1800.00	2349.54	1.997	1.955	7.83	47.00	482.45	22	273	no data	no data	showerhead pattern, but less then in oxide
9	08/07/17	Biljana	Si3N4	Nitride 2	300	10min	1800.00	2547.00	1.982	1.940	8.49	32.70	460.87	1	2537	no data	no data	showerhead pattern, but less then in oxide
10	08/22/17	Biljana	Si3N4	Nitride 2	300	10min	1800.00	2544.12	1.992	1.947	8.48	35.71	455.50	19	680	9	54	showerhead pattern
11	09/05/17	Biljana	Si3N4	Nitride 2	300	10min	1800.00	2492.46	1.984	1.943	8.31	37.45	457.17	21	287	2	26	No showerhead pattern
12	10/25/17	Biljana	Si3N4	Nitride 2	300	10min	1800.00	2441.90	1.995	1.951	8.14	37.83	475.20	209	9776	22	64	A lot small particles, no shower head pattern
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16												41.05
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18												Avg Stress	462.99
19												Avg+30%	601.88
20							Avg. Thickness	2439.02			8.13	Avg-30%	324.09
21								Avg. Index	1.990	1.948	8.94
22								Avg+1%	2.009	1.968	7.32
23								Avg-1%	1.970	1.929
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