PECVD1 SiO2-1000A Thickness uniformity 2017

	B	C	D	E	F	G	H
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2		Thickness, (Å)		Index @632.8nm			Comment
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4		center of wafer	1cm from edge	center of wafer	1cm from edge
5	Date	Max	Min	Min	Max	Thickness Uniformity %
6	02-01-17	1,310.92	1,325.42	1.464	1.463		Film thinner in the center
7	02-06-17	957.13	905.99	1.464	1.462	97.26	Film thicker in the center, uniform
8	02-27-17	1,007.88	947.30	1.453	1.463	96.90	Film thicker in the center, uniform
9	04-11-17	841.70	796.97	1.455	1.453	97.27	Film thicker in the center, uniform
10	05-19-17	894.89	818.88	1.466	1.464	95.56	Film thicker in the center, uniform
11	06-16-17	1,197.96	1,228.75	1.470	1.461		Film thinner in the center
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15	Average:	887.21	860.47	1.253	1.252	96.75
16	Avg +2%	904.96	877.68	1.278	1.277
17	Avg-2%	869.47	843.26	1.228	1.227
18	Max	1,310.92	1,325.42	1.470	1.464	97.27
19	Min	841.70	796.97	1.453	1.453	95.56
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