Instrument-Status.xlsx
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AcronymOperatorLabStatusComment
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ALDEliáš, MarekDry etching/CVDOperational
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APCVDMünz, FilipDry etching/CVDOperational
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CITOPRESSHolas, Jiří
Sample prep/StAn
Operational
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CITOVACHolas, Jiří
Sample prep/StAn
Operational
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CRYOGENIC
Dubroka, Adam
ElectricalOperational
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DEKTAKŠulc, DaliborPhotolithographyOperational
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DIENEREliáš, MarekPhotolithographyOperational
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DRIEEliáš, MarekDry etching/CVDOperational
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DWLPálesch, ErikEBLOperational
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EVAPORATOREliáš, MarekPVDOperational
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Experimental-PECVDEliáš, MarekPECVDOperational
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FISCHIONE-160Holas, Jiří
Sample prep/StAn
Operational
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FISCHIONE-170Holas, Jiří
Sample prep/StAn
Operational
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FISCHIONE-200Holas, Jiří
Sample prep/StAn
Operational
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FISCHIONE-TEM MILLHolas, Jiří
Sample prep/StAn
Operational
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FTIRNebojsa, AloisOpticalOperational
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FUMEHOOD-DEVELOPMENT
Pálesch, ErikPhotolithographyOperationalCover should stay fixed in one position - service already contacted.
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FUMEHOOD-STRIPPINGPálesch, ErikPhotolithographyMinor issueUS/MS not working, cover should stay fixed in one position - service already contacted.
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HELIOSMan, OndřejFIB lab/StAnMinor issueTEAM software unable to start. EDX + EBSD unavailable.
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ICON-SPMŠulc, DaliborSPMOperationalWe have borought SPM Head from MUNI.
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JAZ3Nebojsa, AloisOpticalOperational
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KAUFMAN
Gablech, Imrich
PVDOperational
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KEITHLEY-4200Dóczy, RobertElectricalOperational
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KRATOS-XPSPolčák, JosefUHVNon-operational
Short circuit in the stage and leaking gate valve solved. Ion source gauge broken - cluster mode not operational. Remote service 13.8. - 17.8. for calibrations.
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LABOTOM5Holas, Jiří
Sample prep/StAn
Operational
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LAKESHORE
Lišková, Zuzana
ElectricalMinor issueVaccum issue
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LASER-DICERŠulc, DaliborService LabOperational
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LAURELL-SPIN COATERŠvarc, VojtěchPhotolithographyOperational
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LECTROPOLHolas, Jiří
Sample prep/StAn
Operational
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LEICACOAT-NANOŠvarc, VojtěchEmptyLabOperational
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LEICACOAT-STANMan, Ondřej
Sample prep/StAn
Operational
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LPCVD - NitridesMünz, FilipDry etching/CVDOperational
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LPCVD - PolySiMünz, FilipDry etching/CVDOperational
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LYRA
Šamořil, Tomáš
FIB lab/NanoMajor issueFIB not working. SEM is still operational.
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MAGNETRONEliáš, MarekPVDMinor issueAngle for tungsten target is only the highest position of substrate.
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MIRAŠvarc, VojtěchEBLNon-operational
Turbo does not working. Vibrations in the lab, limited resolution, long-term solution, we're working on it. Calibration needed to be done.
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MOCVDMünz, FilipDry etching/CVDOperational
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MPS150Dóczy, RobertElectricalOperational
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NANOCALCŠvarc, VojtěchPhotolithographyOperationalWorks on Virtual PC on DEKTAK PC
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NANOINDENTOR
Králová, Veronika
SPMOperational
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NANOSAM
Otevřel, Marek
UHVOperationalion gauge: only filament #2 available; filaments to be checked/replaced during next chamber opening
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NIRQUEST512Nebojsa, AloisOpticalOperational
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PARYLENEJan, PekárekService LabOperational
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PECVDEliáš, MarekDry etching/CVDOperational
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PECVD-NANOFABEliáš, MarekDry etching/CVDOperational
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RAITHDóczy, RobertEBLMinor issue
Vibrations in the lab better than MIRA, limited resolution, long-term solution, we're working on it. USH holder issue - do not use the holder until further noticed.
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RIE-FLUORINEEliáš, MarekDry etching/CVDOperational
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RIE-CHLORINEEliáš, MarekDry etching/CVDMinor issue
MFC BCl3 changed - use the correction factor for flow rate. Ask responsible operator before usage of the equipment !
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RIGAKU3
Roupcová, Pavla
XRDOperational
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RIGAKU9Caha, OndřejXRDNon-operationalX-ray source turbo pump crashed. Date of repair not known (a month per our guess).
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SAW-ACCUTOMHolas, Jiří
Sample prep/StAn
Operational
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SCIAEliáš, MarekDry etching/CVDOperational
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SIMS
Otevřel, Marek
UHVOperational
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SNOM-NANONICSDvořák, Petr
Nanophotonics/C01.07
Operational
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STEMIHolas, Jiří
Sample prep/StAn
Operational
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SUMMITDóczy, RobertElectricalOperational
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SUSS-MA8Švarc, VojtěchPhotolithographyMinor issueThe detector #2 for 405nm does not work. Use only detector #1 for 365nm in constant dose mode.
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SUSS-RCD8Pálesch, ErikPhotolithographyOperational
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SUSS-WETBENCHPálesch, ErikPhotolithographyOperational
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TEGRAMINHolas, Jiří
Sample prep/StAn
Operational
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TENUPOLHolas, Jiří
Sample prep/StAn
Operational
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TERSMünz, FilipOptical/MUNIOperational
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TIC3XMan, Ondřej
Sample prep/StAn
Operational
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TITANMichalička, JanSEM/TEMMinor issue
HV needs small increments (3kV) above 275kV, even smaller increments1kV above 285kV, and super small (100-300eV) above 295kV.
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UHV-DEPOSITION
Otevřel, Marek
UHVOperational
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UHV-LEEM
Otevřel, Marek
UHVMinor issuePressure gauge at the UV source not working properly. It has been removed from the system. Repair ongoing.
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UHV-LEIS
Otevřel, Marek
UHVOperational
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UHV-MBE
Otevřel, Marek
UHVOperational
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UHV-PLD
Otevřel, Marek
UHVOperational
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UHV-PREPARATION
Otevřel, Marek
UHVOperational
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UHV-SPM
Otevřel, Marek
UHVMinor issueNo functional AFM sensor available. Negotiation with SPECS ongiong.
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UHV-XPS
Otevřel, Marek
UHVNon-operational
Water droplets in the X-ray source - probably due to gasket failure. Replacement will require venting. The parts are on their way to CEITEC.
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VERIOSMan, OndřejSEM/TEMOperational
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VUVASNebojsa, AloisOpticalOperational
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WIRE-BONDERDóczy, RobertElectricalOperational
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WOOLLAM-MIRNebojsa, AloisOpticalOperational
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WOOLLAM-VISNebojsa, AloisOpticalOperational
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XEF2Jan, PekárekService LabOperational
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XERIONMünz, FilipPVDMinor issueBroken thermocouple, only pyrometer control.
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ZEISS-A2Švarc, VojtěchPhotolithographyOperational
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ZEISS-Z1MHolas, Jiří
Sample prep/StAn
Operational
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