ABOPQR
1
2
LPD- light particle detection (sum of the all particles)
3
Gain4Gain 2
4
DateFilmParticles from film only
5
Oxide~300nm LPD ad-LPD bdLPD ad-LPD bd
6
DateOxideOxide
7
13-Nov-17Oxide641235
8
28-Nov-17Oxide320121
9
25-Jan-18Oxide10641
10
23-Feb-18Oxide24156207
11
26-Feb-18Oxide1127132
12
13-Apr-18Oxide997989
13
09-May-18Oxide*49524
14
13-Jun-18Oxide55871
15
14-Aug-18Oxide16366
16
8-Oct-18Oxide140954
17
2-Nov-18Oxide357240
18
19
Max24156207
20
Min10621
21
Nitride2~300nmNitride 2 Nitride 2
22
13-Nov-17Nitride 2 1048444
23
28-Nov-17Nitride 2 993363
24
25-Jan-18Nitride 2 16237
25
23-Feb-18Nitride 2
26
26-Feb-18Nitride 2
27
13-Apr-18Nitride 2 816624
28
09-May-18Nitride 2 56021
29
13-Jun-18Nitride 2 14647
30
14-Aug-18Nitride 2 9448
31
8-Oct-18Nitride 2 31095
32
2-Nov-18Nitride 2 7243
33
34
Max1048463
35
Min14621
36
LS Nitride2~300nmLS Nitride2LS Nitride2
37
13-Nov-17LS Nitride2524317
38
28-Nov-17LS Nitride2360327
39
25-Jan-18LS Nitride212839
40
23-Feb-18LS Nitride2
41
26-Feb-18LS Nitride2
42
13-Apr-18LS Nitride2426816
43
09-May-18LS Nitride288637
44
13-Jun-18LS Nitride2235145
45
14-Aug-18LS Nitride239443
46
8-Oct-18LS Nitride210526
47
2-Nov-18LS Nitride25270
48
49
Max5243145
50
Min12816
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100