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Thickness, 3000(Å)Index @632.8nm
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center of wafer1cm from edgecenter of wafer1cm from edge4" Si Wafer
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DateMinMaxMinMaxThickness Uniformity %
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08-07-173074.693132.131.9371.94099.07Film thinner in the center
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08-22-173082.103169.701.9291.93498.60Film thinner in the center
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09-05-173055.933139.491.9371.94298.65Film thinner in the center
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10-23-173017.153049.361.9361.94099.47Film thinner in the center
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11-15-173075.573017.831.9491.954Film thicker in the center
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Average:3061.093101.701.9381.94298.95
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Avg. +2%3122.313163.741.9761.981
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Avg. -2%2999.873039.671.8991.903
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Max3082.103169.701.9491.95499.47
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Min3017.153017.831.9291.93498.60
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