Particulates in PECVD1-2017

	A	B	C	D	E	F	G	H	I	J	K
1	Films:1000A of SiN and 1000A of SiO2				LPD count, All size particles (0.160-1.600)um		Delta(All size particles)	Gain4 [LPD#1( 0.160-0.213)um]		Delta(particles #1)	Comments
2	Date	Film	Time(sec)	Tool	LPD before deposition	LPD after depsotion	LPD(ad)-LPD(bd)	LPD before deposition	LPD after deposition	LPD(ad)-LPD(bd)	Comments

3	Date	~1000A					Particles in SiO2
4	11/18/16	SiO2	167.8	PECVD1	22	90	68	2	22	20
5	12/14/16	SiO2	167.8	PECVD1	97	242	145	19	110	91
6	2/27/17	SiO2	146.3	PECVD1	81	143	62	22	74	52
7	4/11/17	SiO2	146.3	PECVD1	23	136	113	5	36	31
8	5/19/17	SiO2	146.3	PECVD1	102	235	133	19	64	45
9	6/16/17	SiO2	146.3	PECVD1	44	149	105	18	43	25
10
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16
17	max ΔLPD						145			91
18	min ΔLPD						62			20
19		~1000A					Particles in SiN
20	11/18/16	Si3N4	568.1	PECVD1	0	1031	1031	0	102	102
21	12/14/16	Si3N4	568.1	PECVD1	187	1274	1087	56	219	163
22	2/27/17	Si3N4	517.2	PECVD1	66	426	360	128	226	98
23	4/11/17	Si3N4	517.2	PECVD1	7	144	137	2	28	26
24	5/19/17	Si3N4	517.2	PECVD1	282	641	359	58	183	125
25	6/16/17	Si3N4	517.2	PECVD1	2	175	173	1	31	30
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32
33
34	max ΔLPD						1087			163
35	min ΔLPD						137			26
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