ABCDEFGHIJKLMNOPQRSTUVWXYZAAABACADAEAFAGAHAIAJAKALAMANAOAPAQARASATAUAVAWAXAY
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SLOT123456789101112131415789
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照射量(目標)1e153.00E+151e143.00E+155e132e131e135e12
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ビームカレント300nA300nA
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実照射量
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ドシメトリーAl番号
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照射面積 (mm2)40*4040*40
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名称finger4 chip shieldMOS Structure4 chip modulesMOS Structure
4 chip modules
MOS StructureMOS StructureMOS StructureMOS StructurefingerFinger
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1115 mm Al
ATLAS12A-W609-P1
1KEK109
ATLAS12A-W609-P3
KEK1111
ATLAS12A-W612-P2
ATLAS12A-W612-P4
ATLAS12A-W615-P3
ATLAS12A-W619-P3
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215 mm Al
ATLAS12A-W609-P2
KEK110
ATLAS12A-W612-P1
2
ATLAS12A-W612-P3
ATLAS12A-W615-P1
ATLAS12A-W619-P2
ATLAS12A-W619-P4
12
3(back-to-back)
ATLAS12M-W570-P3
(back-to-back)
ATLAS12M-W568-P4
3
ATLAS12M-W568-P2
ATLAS12M-Wno3-P3
ATLAS12M-Wno4-P1
ATLAS12M-Wno4-P2
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18To Cambridge
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19ATLAS07(HPK)
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ATLAS12M(HPK)
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21ATLAS12A(LIV)
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22ATLAS12A(LIV)
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24Pixel
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26Strip
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288 inch
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