IBD Ta2O5 Data-15 min dep 2015

	A	B	C	D	E	F	G	H	I	J	K	L	M	N	O	P	Q	R	S	T	U	V	W	X
1	Date	User	Film	Recipe	Dep.time	Thickness	JAW EC-400 (Woolam S. E.)		Avg Index	Index+1%	Index -1%	Dep. Rate	Avg.dep.rate	Avg+5%	Avg-5%	HF e.r.	Stress	Avg. Stress	Avg+10%	Avg-10%	LPD (light point defects)		Comment	Mike Silva
2	01/01/14	User	SiO2	1_Ta2O5Dep	(sec)	(A)	Index @632.8nm	Index @1550nm	Index @632.8nm			(nm/min)	(nm/min)	(nm/min)	(nm/min)	(nm/min)	(MPa)	(MPa)	(MPa)	(MPa)	LPD before deposition	LPD after deposition

3				Ta2O5			Index		Avg.Index	Index+1%	Index-1%	Dep.rate	Avg, Dep.rate	Avg.+5%	Avg.-5%		Stress	Avg.Stress	Avg+10%	Avg.-10%			40degree able fixture
4	15-Dec-14	Bilja	Ta2O5	Bilja_Ta2O5_dep	900	1081.78	2.173	2.121	2.171	2.193	2.149	7.21	7.39	7.76	7.02	0.38	-246.60	-253.89	-279.28	-228.50	170	600
5	24-Dec-14	Bilja	Ta2O5	Bilja_Ta2O5_dep	900	1102.42	2.172	2.121	2.171	2.193	2.149	7.35	7.39	7.76	7.02	0.08	-280.40	-253.89	-279.28	-228.50
6	20-Jan-15	Bilja	Ta2O5	Bilja_Ta2O5_dep	900	1104.69	2.166	2.125	2.171	2.193	2.149	7.36	7.39	7.76	7.02	0.10	-217.42	-253.89	-279.28	-228.50	417	587
7	17-Feb-15	Bilja	Ta2O5	Bilja_Ta2O5_dep	900	1143.31	2.168	2.124	2.171	2.193	2.149	7.62	7.39	7.76	7.02	0.15	-240.28	-253.89	-279.28	-228.50	88	9840	LPD failed!	IBD open day before
8
9
10					Avg. Thickness	1108.05									Avg HF e.r.	0.18
11						Avg. Index	2.170	2.123			Avg. Dep.Rate	7.39				Avg Stress	-246.18
12						Avg+1%	2.191	2.144			Avg+5%	7.76				Avg+10%	-270.79
13						Avg-1%	2.148	2.102			Avg-5%	7.02				Avg-10%	-221.56
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100