Advanced PECVD Nitride2 Thickness uniformity 2017

	B	C	D	E	F	G	H	I
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2		Thickness, A		Index @632.8nm		Thickn. Uniformity, %	Comment	Observation
3		Max	Min	Min	Max
4	Date	center of wafer	1cm from edge	center of wafer	1cm from edge	Thickness Uniformity, %
5	02-07-17	2488.12	2451.87	1.976	1.977	99.27	Film thicker in the center
6	02-27-17	2366.54	2332.15	2.007	2.009	99.27	Film thicker in the center
7	04-19-17	2341.52	2290.03	1.985	1.988	98.89	Film thicker in the center
8	05-22-17	2380.01	2379.28	1.988	1.988	99.98	Film thicker in the center
9	06-16-17	2349.54	2328.35	1.997	2.000	99.55	Film thicker in the center
10	08-07-17	2547.00	2512.87	1.982	1.983	99.33	Film thicker in the center
11	08-22-17	2544.12	2540.43	1.982	1.982	99.93	Film thicker in the center
12	09-05-17	2492.46	2455.22	1.984	1.985	99.25	Film thicker in the center
13	10-25-17	2441.90	2392.52	1.995	1.996	98.98	Film thicker in the center
14	11-13-17	2404.11	2357.42	1.989	1.991	99.02	Film thicker in the center
15	11-28-17	2354.83	2278.87	1.981	1.985	98.36	Film thicker in the center
16
17	Average	2428.20	2392.64	1.988	1.989	99.26
18	Avg.+2%	2476.76	2440.49	2.028	2.029
19	Avg.-2%	2379.63	2344.78	1.948	1.950
20	Max	2547.00	2540.43	2.007	2.009	99.98
21	Min	2341.52	2278.87	1.976	1.977	98.36
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