ABCDEFGHIJKLMNOPQ
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Thickness, AIndex @632.8nmThickn. Uniformity, %CommentObservation
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MaxMinMinMax
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Datecenter of wafer
1cm from edge
center of wafer1cm from edgeThickness Uniformity, %
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02-07-172488.122451.871.9761.97799.27Film thicker in the center
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02-27-172366.542332.152.0072.00999.27Film thicker in the center
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04-19-172341.522290.031.9851.98898.89Film thicker in the center
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05-22-172380.012379.281.9881.98899.98Film thicker in the center
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06-16-172349.542328.351.9972.00099.55Film thicker in the center
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08-07-172547.002512.871.9821.98399.33Film thicker in the center
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08-22-172544.122540.431.9821.98299.93Film thicker in the center
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09-05-172492.462455.221.9841.98599.25Film thicker in the center
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10-25-172441.902392.521.9951.99698.98Film thicker in the center
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11-13-172404.112357.421.9891.99199.02Film thicker in the center
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11-28-172354.832278.871.9811.98598.36Film thicker in the center
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Average2428.202392.641.9881.98999.26
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Avg.+2%2476.762440.492.0282.029
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Avg.-2%2379.632344.781.9481.950
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Max2547.002540.432.0072.00999.98
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Min2341.522278.871.9761.97798.36
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