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DATE CommentsDeviation
(%)		FILM
THICKNESS
(kÅ)		STRESS
(MPa)		Sheet
Resistance
(Res/sq)		Resistivity
(Ω⋅m)		Exclude from SPC?Exclude from plot?
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AVERAGE:9.671.1925.560.333.76E-08
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05/09/2025Gold dep rate was very high (5.0) at first, then went down to 1.6 then 1.0. The shutters were also overextended (closed) when I opened the chamber. Thickness and everything seem to be fine though0.58551.06513.6500.376814.01E-08
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03/21/2025DekTak thickness much lower than expected, this is because the wrong metal tooling factor was used on accident-47.97080.8184218.8330.39943.27E-08y
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01/30/2025NO LONGER TAKING Ti DATA
Changed tooling factor 120% → 145%.
Had to run in two deps since first one stopped at 60nm(did not see rate 3) and then deposited 40nm on second run. So not sure how accurate this run is		5.45201.119961.650.356383.99E-08
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01/02/2025Looks good.30.58551.382915.020.29384.06E-08
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12/20/2024Looks good.19.01231.262716.000.290333.67E-08
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12/18/2024Looks good.23.62561.311730.650.291213.82E-08
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12/17/2024Uniformity shield was loose and when process was finished it shifted a lot from original position. Crucible had a lot of Au pellets which could've been why power was very high for this run9.81071.165120.070.300253.50E-08
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12/09/2024Looks good.20.83021.280828.620.294813.78E-08y
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12/04/2024Dep rate was not constant so did not finish dep.n/an/an/an/an/a
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11/14/2024This was second layer deposited on Ti. So Thickness also includes Ti layer and Au layer25.06141.3244n/an/an/a
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