Ebeam4 Plots

	A	B	C	D	E	F	G	H	I
1	DATE	Comments	Deviation (%)	FILM THICKNESS (kÅ)	STRESS (MPa)	Sheet Resistance (Res/sq)	Resistivity (Ω⋅m)	Exclude from SPC?	Exclude from plot?
2	AVERAGE:		-8.69	0.94	100.42	16.49	1.52E-06
3	11/22/2025	MT= 165% Rise2=6%	-13.942	0.8666	60.88	14.700	1.27E-06
4	10/25/2025	MT= 165%	-17.994	0.8258	53.30	17.600	1.45E-06
5	09/22/2025	Thickness was low	-22.9791	0.7756	73.88	18.300	1.42E-06
6	05/21/2025	Thickness went up a little, but not by a lot	5.879	1.0662	57.20	14.989	1.60E-06
7	04/18/2025	Stress and Bow are varied	2.410	1.0384	117.60	15.039	1.56E-06
8	01/28/2025	Someone changed Sweep Amp(20%→ 18%) and Freq(1Hz→ 2Hz) for Ti. Changed master tooling 183% → 165% as well as soak 2 power from 11% → 7%. Also changed soak1 time to 5min and pressure went down to 1.8E-6 torr	-0.3481	1.0075	98.08	14.601	1.47E-06
9	01/07/2025	Looks Good	-14.2924	0.8939	19.08	15.51	1.39E-06
10	01/05/2025	Power in Rise 2 Varied by 7 mA	9.1499	1.1297	64.57	16.67	1.88E-06
11	01/03/2025	Higher than average sheet resistance	-15.0341	0.8828	161.97	18.03	1.59E-06
12	12/18/2024	When DekTak-ing I doubled the length which made thickness closer to Ebeam4 measurements	-1.6664	1.0187	36.42	16.5315	1.68E-06
13	12/17/2024	Again measured thickness lower than what Ebeam4 says and stress/bow also very low. Also uniformity shield is loose as when I open chamber after process finished shield is very off and not at all aligned as I had left it beforehand	-14.3414	0.8900	66.23	17.3753	1.55E-06
14	12/14/2024	Measured thickness much lower than what Ebeam4 measured. Tool would not pump down for second run.	-20.2847	0.8259	372.17	17.2904	1.43E-06
15	11/25/2024	measured thickness was way lower than expected	-19.2841	0.8403	124.05	17.7091	1.49E-06
16	11/14/2024	Used reclaimed wafers from Biljana and left some sort of pattern on wafer that is clearly visible	1.0415	1.0478	n/a	n/a	n/a
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