PECVD1 SIN Data 2017

	B	C	D	E	F	G	H	I	J	K	L	M	N	O	P	Q	R	S	T	U	V	W	X	Y
1	Date	User	Film	Recipe	Substrate T	Thickness	Dep.time	JAW EC-400 (Woolam Spec. Ell.)		Dep.rate	Stress	BHF etch rate wafer	LPD ( light point defects)		AVG dep.rate	AVG+10%	AVG-10%	AVG index@632.8	AVG+2%	AVG-2%	AVG.Stress	Avg+30%	Avg-30%	Comments/Brian Lingg PM
2						Wafer center
3	1/1/2012	User	SiN	SiN_10	250 °C	(Å)	sec	Index @ 632.8nm	Index @ 1550nm	( nm/min)	MPa	( nm/min)	before dep.	after dep.										Deposition done on 4"Si wafer

4								Index @ 632.8nm	Index @ 1550nm	Dep.rate	Stress				Avg.dep.rate	Avg.+10%	Avg.-10%	Avg.Index	Avg+2%	Avg-2%	Avg.Stress	Avg.s.+30%	Avg.s. -30%
5	02-01-2017	Biljana	SiN	SiN_10	250	1115.77	568.1	2.079	2.004	11.78	240.08	48.00			11.94	13.13	10.75	1.953	1.992	1.914	424.80	552.24	297.36
6	02-06-2017	Biljana	SiN	SiN_10	250	1022.25	517.2	1.914	1.872	11.86	491.02	96.80			11.94	13.13	10.75	1.953	1.992	1.914	424.80	552.24	297.36	Brian adjusted dep.rate, dep.time and corr.factor
7	02-27-2017	Biljana	SiN	SiN_10	250	1052.46	517.2	1.927	1.909	12.21	558.35	92.40	66	426	11.94	13.13	10.75	1.953	1.992	1.914	424.80	552.24	297.36
8	04-11-2017	Biljana	SiN	SiN_10	250	1036.94	517.2	1.881	1.845	12.03	568.28	125.27	7	144	11.94	13.13	10.75	1.953	1.992	1.914	424.80	552.24	297.36
9	05-19-2017	Biljana	SiN	SiN_10	250	1010.39	517.2	1.881	1.892	11.72		119.45	282	641	11.94	13.13	10.75	1.953	1.992	1.914	424.80	552.24	297.36	I could not meassure stress on SiN film!
10	06-16-2017	Biljana	SiN	SiN_10	250	1037.58	517.2	2.035	1.968	12.04	266.27	45.81	2	175	11.94	13.13	10.75	1.953	1.992	1.914	424.80	552.24	297.36	Replaced the Silane and Ammonia MFCs
11																								CF for NH3 adjusted from 0.73 to 0.50
12																								Try on Monday CF=0.55
13
14
15
16					Avg.Thickness	1045.90
17							Avg. Index	1.953
18							Avg+2%	1.992
19							Avg-2%	1.914
20								Avg. Index	1.915
21								Avg+2%	1.953
22								Avg-2%	1.877
23									Avg Dep.Rate	11.94
24									Avg +10%	13.13
25									Avg - 10%	10.75
26										Avg. Stress	424.80
27										Avg +30%	552.24
28										Avg - 30%	297.36
29											Avg. HF e.r.	87.96
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100