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ABCD
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MECHANICAL SPECIFICATION OPTIONS
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Definition(F)
FINE POLISH
(O)
OPTICAL GRADE
(N)
NANO GRADE
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Diameter tolerance: (+/- mm)0.20.20.2
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Thickness tolerance: (+/- mm)0.20.050.05
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Flatness: (microns)<30<20<10
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TTV: (microns)<30<20<10
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LTV: (microns/sq.mm)<10<5<3
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Surface roughness: (nm RMS)<10<2<1.0
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Bow: (microns)<30<20<10
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Warp: (microns)<30<20<10
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Scratch & Dig:60/4040/2040/20
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Edge exclusion area: (mm)333
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Fine grind: (RMS)3-10--
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MECHANICAL SPECIFICATIONS