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| A | B | C | D | |
|---|---|---|---|---|
1 | MECHANICAL SPECIFICATION OPTIONS | |||
2 | Definition | (F) FINE POLISH | (O) OPTICAL GRADE | (N) NANO GRADE |
3 | Diameter tolerance: (+/- mm) | 0.2 | 0.2 | 0.2 |
4 | Thickness tolerance: (+/- mm) | 0.2 | 0.05 | 0.05 |
5 | Flatness: (microns) | <30 | <20 | <10 |
6 | TTV: (microns) | <30 | <20 | <10 |
7 | LTV: (microns/sq.mm) | <10 | <5 | <3 |
8 | Surface roughness: (nm RMS) | <10 | <2 | <1.0 |
9 | Bow: (microns) | <30 | <20 | <10 |
10 | Warp: (microns) | <30 | <20 | <10 |
11 | Scratch & Dig: | 60/40 | 40/20 | 40/20 |
12 | Edge exclusion area: (mm) | 3 | 3 | 3 |
13 | Fine grind: (RMS) | 3-10 | - | - |
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