ABCD
1
MECHANICAL SPECIFICATION OPTIONS
2
Definition(F)
FINE POLISH
(O)
OPTICAL GRADE
(N)
NANO GRADE
3
Diameter tolerance: (+/- mm)0.20.20.2
4
Thickness tolerance: (+/- mm)0.20.050.05
5
Flatness: (microns)<30<20<10
6
TTV: (microns)<30<20<10
7
LTV: (microns/sq.mm)<10<5<3
8
Surface roughness: (nm RMS)<10<2<1.0
9
Bow: (microns)<30<20<10
10
Warp: (microns)<30<20<10
11
Scratch & Dig:60/4040/2040/20
12
Edge exclusion area: (mm)333
13
Fine grind: (RMS)3-10--