IBD Al2O3 Data 2018-1hr depositions

	A	B	C	D	E	F	G	H	I	J	K	L	M	N	O	P	Q	R	S	T	U	V	W	X	Y	Z	AA
1	Date	User	Film	Recipe	Dep.time	Thickness	JAW EC-400 (Woolam S. E.)		Dep. Rate	HF e.r.	Stress	Avg.Dep.Rate	Avg+10%	Avg-10%	Avg Index	Index+1%	Index -1%	Avg. Stress	Avg+10%	Avg-10%	LPD (Gain4) particle size 0.16-1.6um		LPD (Gain2) particle size 2.8-28.0um		Photos	Photos	Comment
2	01/01/14	User	Al2O3	1_Al2O3 Dep	(sec)	(A)	Index @632.8nmnm	Index @1550nm	(nm/min)	(nm/min)	(MPa)	Avg.Dep.Rate	Avg+10%	Avg-10%	Index @632.8nm	Index @632.8nm	Index @632.8nm	(MPa)	(MPa)	(MPa)	before deposition	after deposition	before deposition	after deposition	Surfscan	Opt. Micr.	40 degree fixture angle

3				Al2O3			Index		Dep. Rate		Stress	Avg.Dep.Rate	Avg+10%	Avg-10%	Avg Index	Index+1%	Index-1%	Avg. Stress	Avg+10%	Avg-10%
4
5	10/19/17	Bilja	Al2O3	1_Al2O3 Dep	3600	1296.58	1.656	1.642	2.16	179.10	-408.78	2.05	2.25	1.84	1.656	1.672	1.639	-331.81	-364.99	-298.63	297	1358	154	334	yes	no big particles
6	10/30/17	Bilja	Al2O3	1_Al2O3 Dep	3600	1212.70	1.656	1.641	2.02	154.94	-377.10	2.05	2.25	1.84	1.656	1.672	1.639	-331.81	-364.99	-298.63	no data	no data	no data	no data	no data	no data
7	11/14/17	Bilja	Al2O3	1_Al2O3 Dep	3600	1185.70	1.656	1.642	1.98	199.02	-277.94	2.05	2.25	1.84	1.656	1.672	1.639	-331.81	-364.99	-298.63	15	1296	14	86	yes	no big particles
8	02/06/18	Bilja	Al2O3	1_Al2O3 Dep	3600	1219.00	1.654	1.639	2.03	221.33	-263.41	2.05	2.25	1.84	1.656	1.672	1.639	-331.81	-364.99	-298.63	67	1211	26	680	yes	no big particles
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10					Avg. Thick.	1228.50
11						Avg. Index	1.656	1.641		Avg Stress	-331.81
12						Avg+1%	1.672	1.657		Avg+10%	-364.99
13						Avg-1%	1.639	1.674		Avg-10%	-298.63
14								Avg. Dep.Rate	2.05
15								Avg+10%	2.25
16								Avg-10%	1.84
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18									Avg. BHF e.r.	188.60
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