PECVD#1 300nm SiO2 film-2020

	B	C	D	E	F	G	H	I	J	K	L	M	N	O	P	Q	R	S	T	U	AE
1		Film	Recipe	Subs.T	Thickness (Woollam)	Thickness (Wafer Mapping)	Dep.time	JAW EC-400 (Woolam Spec. Ell.)		Dep.rate	Stress	BHF etch rate wafer	LPD (Gain4) particle size (0.16-1.6)um			Haze, for Gain4	LPD (Gain2) particle size (2.8-28.0)um		Photos	Photos	Comments/Brian Lingg PM
2			Production category		wafer center	25 points (avg.)															Maintenance
3		SiO2	SiO2 Deposition	250° C	(nm)	(nm)	sec	Index @ 632.8nm	Index @ 1550nm	( nm/min)	(MPa)	( nm/min)	Before Deposition	After Deposition		%	Before Deposition	After Deposition	Surfscan	Optical microscope	Deposition done on 4"Si wafer

4								Index		Dep.rate	Stress										Replaced the Silane and Ammonia MFCs-Avg-2017
5	12-02-19	SiO2	SiO2 Deposition	250	320.17	324.15	425.0	1.466	1.463	45.20	-464.87	561.85	95	211	116	35	24	63	good	done, OK	No showerhead pattern
6	01-09-20	SiO2	SiO2 Deposition	250	316.44	314.24	425.0	1.462	1.451	44.67	-457.00	462.18	108	435	327	42	32	141	good	done, OK	No showerhead pattern, some big particles
7	02-18-20	SiO2	SiO2 Deposition	250	317.34	316.08	425.0	1.474	1.464	44.80	-487.38	559.78	106	643	537	100	11	100	good	done, OK	Some showerhead pattern, some particles
8	05-27-20	SiO2	SiO2 Deposition	250	333.67	340.32	425.0	1.469	1.456	47.11	-476.69	528.14	35	2992	2957	67	13	875	good	done, OK	Has some pattern toward center, OK
9	07-20-20	SiO2	SiO2 Deposition	250	330.13	338.69	425.0	1.469	1.458	46.61	-439.52	512.60	79	382	303	59	37	105	good	done, OK	good
10	08-26-20	SiO2	SiO2 Deposition	250	322.11	330.04	425.0	1.469	1.458	45.47	-435.71	530.72	96	258	162	80	74	43	good	done, OK	good
11	10-05-20	SiO2	SiO2 Deposition	250	315.65	319.28	425.0	1.466	1.455	44.56	-434.11	499.90	101	297	196	55	70	130	good	done, OK	good
12	10-14-20	SiO2	SiO2 Deposition	250	287.84	296.00	374.7	1.459	1.448	46.09	-366.78	508.16	150	274	124	100	75	81	good	done, OK	good, some random particles
13	12-11-20	SiO2	SiO2 Deposition	250	331.30	330.54	425.0	1.463	1.448	46.77	-391.45	559.44	84	507	423	52	34	53	good	done, OK	good, some showerhead pattern
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18				Avg.Thickness	319.41		Avg Index	1.466	1.456
19							Index+1%	1.481	1.470
20							Index-1%	1.452	1.441
21									Avg Dep.Rate	45.70
22									Avg +10%	50.27
23									Avg - 10%	41.13
24										Avg. Stress	-439.28
25										Avg +30%	-571.06
26										Avg - 30%	-307.50
27											Avg. HF e.r.	524.75
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