Particles Adv.PECVD2 films-2019

	A	B	P	Q
1
2			LPD- light particle detection (sum of the all particles)
3			Gain4	Gain 2
4	Date	Film	Particles from film only
5	Oxide~300nm		LPD ad-LPD bd	LPD ad-LPD bd

6	Date		Oxide	Oxide
7	2-Nov-18	Oxide	357	240
8	05-Mar-19	Oxide	3296	156
9	02-Apr-19	Oxide	174	77
10	03-May-19	Oxide	420	282
11	03-Jun-19	Oxide	225	34
12	06-Aug-19	Oxide	260	165
13	07-Oct-19	Oxide	106	24
14	04-Nov-19	Oxide	646	42
15	02-Dec-19	Oxide	626	86
16
17
18	Max		3296	282
19	Min		106	24
20	Nitride2~300nm		Nitride 2	Nitride 2
21	2-Nov-18	Nitride 2	72	43
22	05-Mar-19	Nitride 2	4316	16
23	02-Apr-19	Nitride 2	4871	377
24	03-May-19	Nitride 2	2024	28
25	03-Jun-19	Nitride 2	2536	42
26	06-Aug-19	Nitride 2	198	35
27	07-Oct-19	Nitride 2	262	14
28	04-Nov-19	Nitride 2	389	86
29	02-Dec-19	Nitride 2	773	99
30
31
32
33	Max		4871	377
34	Min		72	14
35	LS Nitride2~300nm		LS Nitride2	LS Nitride2
36	2-Nov-18	LS Nitride2	52	70
37	15-Mar-19	LS Nitride2	1820	25
38	02-Apr-19	LS Nitride2	1367	49
39	03-May-19	LS Nitride2	542	57
40	03-Jun-19	LS Nitride2	1702	36
41	06-Aug-19	LS Nitride2	977	51
42	07-Oct-19	LS Nitride2	337	87
43	04-Nov-19	LS Nitride2	390	148
44	02-Dec-19	LS Nitride2	1150	30
45
46
47
48	Max		1820	148
49	Min		52	25
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