8.7.1 - SCA 2.87E14 cm-3 Nsc Measurement Specification
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Measurement Specification: 8.7.1 - 2.87E14 cm-3 Nsc (sca)
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Description:This monitor tracks the average, standard deviation, and range of doping concentration (Nsc), surface minority carrier lifetime (Ts), charge in the oxide (Qox), and density of interface traps (Dit) with a 5-point measurement on a NIST traceable standard wafer of SiO2 that is 3058 Å thick on top of a Si substrate. Process Staff should be notified if the 5-point measurement of the Nsc value on the standard is more than +/- 5%.Measurement Performance
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Tool:(sca)
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Standard:NIST Traceable SCA Checkout Wafer Nsc = 2.87E14 SemiLab
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Location of Saved Data:Found in Test Results or Statistics and Mapping option in UI. Enter "CHECKOUT" into all descriptor fields when taking measurements.
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Tool Specifications
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StepToolSettings
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8.7.1 - Measure(sca)Make a 5-point measurements along X- and Y-axis. Choose Start Test, Setup Test, Operation = Manual, Operating Mode = Normal, Do not override Initial Parameters, Set Lot ID and Cassette to CHECKOUT. Double click on slot 1 and set Wafer ID and Comments to CHECKOUT, Recipe = OXIDE, Pattern = 5 Point, Tox = 3058.
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Output Response
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Response 1:
Nsc
DescriptionTarget
(cm-3)
USL
(cm-3)
LSL
(cm-3)
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Average Nsc5-point average of measurements taken along X- and Y-axis.

USL and LSL are at +/- 5% of target.
2.87E+143.01E+142.73E+14
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Response 2:
Ts
Description
Target
(ms)
USL
(ms)
LSL
(ms)
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Average Ts5-point average of measurements taken along X- and Y-axis.

USL and LSL are at +/- 5% of target.
336353319
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Response 2:
Qox
Description
Target
(cm-2)
USL
(cm-2)
LSL
(cm-2)
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Average Qox5-point average of measurements taken along X- and Y-axis.

USL and LSL are at +/- 10% of target.
4.46E+104.68E+104.24E+10
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Response 2:
Dit
Description
Target
(cm-2*eV)
USL
(cm-2*eV)
LSL
(cm-2*eV)
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Average Dit5-point average of measurements taken along X- and Y-axis.

USL and LSL are at +/- 10% of target.
4.17E+104.38E+103.96E+10
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For more information: tinyurl.com/sca-287
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