8.7.1 - SCA 2.87E14 cm-3 Nsc Measurement Specification

	B	C	D	E	G	H	I	K
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4	Measurement Specification: 8.7.1 - 2.87E14 cm-3 Nsc (sca)
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6	Description:	This monitor tracks the average, standard deviation, and range of doping concentration (Nsc), surface minority carrier lifetime (Ts), charge in the oxide (Qox), and density of interface traps (Dit) with a 5-point measurement on a NIST traceable standard wafer of SiO2 that is 3058 Å thick on top of a Si substrate. Process Staff should be notified if the 5-point measurement of the Nsc value on the standard is more than +/- 5%.						Measurement Performance
7	Description:
8	Tool:	(sca)
9	Standard:	NIST Traceable SCA Checkout Wafer Nsc = 2.87E14 SemiLab
10	Location of Saved Data:	Found in Test Results or Statistics and Mapping option in UI. Enter "CHECKOUT" into all descriptor fields when taking measurements.
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12	Tool Specifications
13	Step		Tool	Settings
14	8.7.1 - Measure		(sca)	Make a 5-point measurements along X- and Y-axis. Choose Start Test, Setup Test, Operation = Manual, Operating Mode = Normal, Do not override Initial Parameters, Set Lot ID and Cassette to CHECKOUT. Double click on slot 1 and set Wafer ID and Comments to CHECKOUT, Recipe = OXIDE, Pattern = 5 Point, Tox = 3058.
15	8.7.1 - Measure		(sca)
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17	Output Response
18	Response 1: Nsc	Description			Target (cm-3)	USL (cm-3)	LSL (cm-3)
19	Response 1: Nsc	Description			Target (cm-3)	USL (cm-3)	LSL (cm-3)
20	Average Nsc	5-point average of measurements taken along X- and Y-axis. USL and LSL are at +/- 5% of target.			2.87E+14	3.01E+14	2.73E+14
21	Response 2: Ts	Description			Target (ms)	USL (ms)	LSL (ms)
22	Average Ts	5-point average of measurements taken along X- and Y-axis. USL and LSL are at +/- 5% of target.			336	353	319
23	Response 2: Qox	Description			Target (cm-2)	USL (cm-2)	LSL (cm-2)
24	Average Qox	5-point average of measurements taken along X- and Y-axis. USL and LSL are at +/- 10% of target.			4.46E+10	4.68E+10	4.24E+10
25	Response 2: Dit	Description			Target (cm-2*eV)	USL (cm-2*eV)	LSL (cm-2*eV)
26	Average Dit	5-point average of measurements taken along X- and Y-axis. USL and LSL are at +/- 10% of target.			4.17E+10	4.38E+10	3.96E+10
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28	For more information: tinyurl.com/sca-287
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