Thickness uniformity-Adv. PECVD STD LS Nitride2 2020

	B	C	D	E	F	G	H
1
2		Thickness, A		Index @632.8nm		Thickness Uniformity, %	Comment
3		Min	Max	Min	Max
4	Date	center of wafer	1cm from edge	center of wafer	1cm from edge	Thickness Uniformity, %
5	12-02-19	2395.85	2370.51	1.944	1.937	99.47	Thicker in the center
6	01-09-20	2474.74	2469.30	1.941	1.942	99.89	Thicker in the center
7	02-18-20	2444.95	2426.16	1.945	1.944	99.61	Thicker in the center
8	05-27-20	2182.77	2107.76	1.947	1.949	98.25	Thicker in the center
9	07-18-20	2161.15	2137.07	1.936	1.933	99.44	Thicker in the center
10	08-26-20	2130.80	2116.20	1.947	1.947	99.66	Thicker in the center
11	09-03-20	2183.57	2176.18	1.956	1.954	99.83	Thicker in the center
12	09-05-20	2440.17	2422.44	1.948	1.948	99.64	Thicker in the center
13	10-26-20	2135.48	2118.63	1.957	1.952	99.60	Thicker in the center
14	11-03-20	2228.60	2201.10	1.954	1.955	99.38	Thicker in the center
15	11-04-20	2225.50	2222.40	1.949	1.949	99.93	Thicker in the center
16	11-16-20	2198.03	2182.79	1.943	1.944	99.65	Thicker in the center
17	11-23-20	2170.99	2179.80	1.947	1.949		Thinner in the center
18	11-24-20	2194.81	2225.78	1.952	1.950		Thinner in the center
19	11-24-20	2180.86	2211.17	1.948	1.947		Thinner in the center
20	11-24-20	2207.60	2225.12	1.946	1.946		Thinner in the center
21	12-01-20	2152.47	2152.85	1.947	1.947		Thinner in the center
22	12-08-20	2141.32	2149.85	1.948	1.947		Thinner in the center
23
24
25
26	Average	2236.09	2227.51	1.948	1.947	99.53
27	Avg.+2%	2280.81	2272.06	1.986	1.986
28	Avg-2%	2191.37	2182.96	1.909	1.908
29	Max	2474.74	2469.30	1.957	1.955	99.93
30	Min	2130.80	2107.76	1.936	1.933	98.25
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60