Advanced PECVD LS Nitride2 Thickness uniformity 2015

	A	B	C	D	E	F	G	H
1	99.45911371
2			Thickness, A		Index @632.8nm		Thickness Uniformity, %	Comment
3			Min	Max	Min	Max
4		Date	center of wafer	1cm from edge	center of wafer	1cm from edge	Thickness Uniformity, %
5		12-09-14	2403.41	2378.21	1.943	1.944	99.47	Thicker in the center
6		12-23-14	2329.27	2341.32	1.933	1.924		Thinner in the center
7		01-14-15	2307.93	2294.72	1.939	1.934	99.71	Thicker in the center
8		02-09-15	2327.77	2344.69	1.937	1.932		Thinner in the center
9		02-23-15	2326.31	2301.28	1.936	1.937	99.46	Thicker in the center
10		04-06-15	1993.70	1879.76	1.951	1.954	97.06	Thicker in the center
11		04-17-15	2431.70	2317.11	1.937	1.939	97.59	Thicker in the center
12		05-11-15	2473.99	2465.45	1.936	1.937	99.83	Thicker in the center
13		05-13-15	2469.55	2415.01	1.939	1.941	98.88	Thicker in the center
14		05-28-15	2453.39	2447.17	1.943	1.943	99.87	Thicker in the center
15		06-15-15	2164.31	2152.38	1.943	1.946	99.72	Thicker in the center
16		10-02-15	2372.41	2475.58	1.943	1.941		Thinner in the center
17		11-06-15	2091.54	2142.00	1.952	1.950		Thinner in the center
18		11-10-15	2101.29	2155.06	1.954	1.955		Thinner in the center
19		11-16-15	2160.84	2213.94	1.947	1.947		Thinner in the center
20		11-18-15	2143.35	2165.69	1.950	1.949		Thinner in the center
21
22		Average	2284.42	2280.59	1.943	1.942	99.07
23		Avg.+2%	2330.11	2326.20	1.981	1.981
24		Avg-2%	2238.73	2234.97	1.904	1.903
25		Max	2473.99	2475.58	1.954	1.955	99.87
26		Min	1993.70	1879.76	1.933	1.924	97.06
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