IBD SiO2 Data 2016-1hr depositions

	A	B	C	D	E	F	G	H	I	J	K	L	M	N	O	P	Q	R	S	T	U	V	W	X	Y
1	Date	User	Film	Recipe	Dep.time	Thickness	JAW EC-400 (Woolam S. E.)		Avg Index	Index+1%	Index -1%	Dep. Rate	Avg.dep.rate	Avg+10%	Avg-10%	HF e.r.	Stress	Avg. Stress	Avg+10%	Avg-10%	LPD (light point defects)		Comment	Mike Silva	Deposition time
2	01/01/14	User	SiO2	1_SiO2Dep	(sec)	(A)	Index @632.8nmnm	Index @1550nm	Index @632.8nm	Index @632.8nm	Index @632.8nm	(nm/min)	(nm/min)	(nm/min)	(nm/min)	(nm/min)	(MPa)	(MPa)	(MPa)	(MPa)	LPD before deposition	LPD after deposition	40 degree fixture angle

3				SiO2			Index		Avg Index	Index+1%	Index-1%	Dep. Rate	Avg.dep.rate	Avg+10%	Avg-10%		Stress	Avg. Stress	Avg+10%	Avg-10%
4	02/27/15	Bilja	SiO2	Bilja_SiO2_dep	3600	3461.75	1.492	1.480	1.495	1.510	1.480	5.77	3.84	4.23	3.46	355.92	-369.63	-344.87	-379.36	-310.39	211	6317	LPD failed	sandblasted carrier	1hr
5	11/19/15	Bilja	SiO2	Bilja_SiO2_dep	3600	2662.99	1.494	1.483	1.495	1.510	1.480	4.44	3.84	4.23	3.46	all etched in 30sec	-397.10	-344.87	-379.36	-310.39	57	1129	a lot of particles	HF etch done in 30sec, all SIO2 etched	1hr
6	02/01/16	Bilja	SiO2	Bilja_SiO2_dep	3481	2663.21	1.490	1.480	1.495	1.510	1.480	4.29	3.84	4.23	3.46	all etched in 30sec	-329.89	-344.87	-379.36	-310.39	212	1650	a lot of particles	HF etch done in 30sec, all SIO2 etched	58min
7	03/21/16	Bilja	SiO2	Bilja_SiO2_dep	3600	2346.59	1.495	1.483	1.495	1.510	1.480	3.91	3.84	4.23	3.46	354.62	-322.19	-344.87	-379.36	-310.39				HF etch: Shorter, 10"!	1hr
8	03/23/16	Bilja	SiO2	Bilja_SiO2_dep	3600	2594.03	1.491	1.481	1.495	1.510	1.480	4.32	3.84	4.23	3.46	415.14	-326.22	-344.87	-379.36	-310.39				HF etch: Shorter, 10"!	1hr
9	05/23/16	Bilja	SiO2	Bilja_SiO2_dep	3600	1741.25	1.498	1.484	1.495	1.510	1.480	2.90	3.84	4.23	3.46	to do!	-348.47	-344.87	-379.36	-310.39	88	623		Recipe for Ta2O5 modified 3/23/16	Maybe SiO2 recipe changed too?!
10	05/24/16	Bilja	SiO2	Bilja_SiO2_dep	3600	1767.81	1.499	1.484	1.495	1.510	1.480	2.95	3.84	4.23	3.46	to do!	-350.06	-344.87	-379.36	-310.39
11	05/24/16	Bilja	SiO2	Bilja_SiO2_dep	3600	1700.11	1.498	1.483	1.495	1.510	1.480	2.83	3.84	4.23	3.46	to do!	-332.49	-344.87	-379.36	-310.39
12	05/24/16	Bilja	SiO2	Bilja_SiO2_dep	3600	1912.91	1.498	1.484	1.495	1.510	1.480	3.19	3.84	4.23	3.46	to do!	-327.82	-344.87	-379.36	-310.39
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17					Avg. Thick.	2316.74									Avg HF e.r.	375.23
18						Avg. Index	1.495	1.482			Avg. Dep.Rate	3.84				Avg Stress	-344.87
19						Avg+1%	1.510	1.497			Avg+10%	4.23				Avg+10%	-379.36
20						Avg-1%	1.480	1.512			Avg-10%	3.46				Avg-10%	-310.39
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