4.10 Quintel Lamp Intensity Monitor (i-line & g-line)
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4.10 - Intensity Measurements on Quintel
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Description:This monitor tracks lamp intensity on quintel. Measurements are 5-point and include center, top, flat, right, and left intensity readings taken with a handheld intensity meter. These readings are used to calculate a mean and lamp uniformity. The lamp is set to constant power mode and opperates at 350 watts. Intensity is expected to drop slightly over time as the lamp ages.Process Performance
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Tool:QUINTEL
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Meter: G & R Labs Model 202 Intensity Meter
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Process Procedure
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StepDescription
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4.10.1 - Tool setup Navigate to lamp test and manual shutter mode in the quintel controls menu
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4.10.2 - Lamp TestMeasure and record the lamp intensity with the handheld intensity meter using a 5-point measurement at 5 cm intervals. Check the lamp power.
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4.10.3 - AnalysisCalculate the 5-point mean. Calculate the lamp uniformity using Uniformity = (max reading - min reading)/(max reading + min reading) x 100
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Output Response
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ResponseDescriptionTargetUSLLSL
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i-line (365 nm) Intensity (mW/cm²)Comparison of the 5-point mean intensity and center point intensity readings for i-line. 675
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g-line (436 nm) Intensity (mW/cm²)Comparison of the 5-point mean intensity and center point intensity readings for g-line. 675
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