VPHA-ALD-conference-list

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1	List of ALD conferences for the ALD History Review (#10 in the VPHA Publication Plan)
2	* Info originally from the ALD History Blog http://aldhistory.blogspot.fi
3	* to be updated with info from all sources
4	* Some participant info from Parsons et al. review JVSTA 2013
5	* To add info: please write new conference info in the VPHA-conference-to-be-added file, linked in http://vph-ald.com/VPHAopenfiles.html, direct link below
6	https://docs.google.com/spreadsheets/d/1vWDElIVL5TTsu323bIm-T4zVqwUkLGjRwT5w8j4xv88/edit
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8	Year	Shortname	Full name	Optional: Section	Location & time	Country (we will write country in an additional column, to allow country statistics)	Conference chair(s)	Records	# Attendees	# Presentations			Attendees from # Countries	Note 1: conference info from	Note 2: participant info from
9										Oral	Poster	Total
10	1984	VTT Symposium 54	First symposium on Atomic Layer Epitaxy		Espoo, Finland, December 13-14, 1984	Finland	Lauri Niinistö, Ilkka Suni	Record: Proceedings, Ed. Riitta Paananen (copy can be obtained from VTT).	?	?			?	Markku Leskelä gave info on the chairs
11	1985		UK Workshop on ALE		Standard Telecommunication Laboratories, Harlow, England	UK	?	?	?				?	Licenciate's thesis of Olli Jylhä (written here by Riikka)
12	1990	ALE-1	1st International Symposium on Atomic Layer Epitaxy		Espoo, Finland, June 11-13, 1990	Finland	Lauri Niinistö	Proceedings of the 1st International Symposium on Atomic Layer Epitaxy (Ed. L. Niinistö), Acta Polytechnica Scandinavica, Chemical Technology and Metallurgy Series No. 195 (1990), 209 pages.	?	?			?
13	1991	Baltic ALD	Helsinki University of Technology - Tartu University ALE Symposium		Sjökulla/Espoo, Finland, November 15-16, 1991	Finland	Lauri Niinistö	Program and Abstracts V. Killström, L. Niinistö (ed.) ISBN 951-22-0842-3						Details from Markku Leskelä
14	1992	ALE-2	2nd International Symposium on Atomic Layer Epitaxy		Raleigh, North Carolina, USA, June 2-5, 1992	USA	Salah Bedair	Proceedings of the 2nd International Symposium on Atomic Layer Epitaxy, Raleigh, North Carolina, 1992, (Ed. S. M. Bedair), Thin Solid Films 225 (1993)
15	1993	ACSI-2	Second International Symposium on Atomically Controlled Surfaces and Interfaces		Joensuu, Finland, June 16-18, 1993	Finland	Tapani Pakkanen?	Applied Surface Science 75 (1994) 1-363						Riikka Puurunen, via Tuula Pakkanen. Markku Leskelä told that he edited the proceedings - to be checked if he was the only Editor.
16	1993	TKK - TÜ 2	ALE Sümpoosium, 2. ALE Symposiumi, 2nd ALE Symposium		Tartu, Estonia, October 7-8, 1993	Estonia	?	Programme and abstracts (programm ja teesid), ISBN 9985-56-008-6, Edited by: J. Aarik and A. Jaek
17	1994	ALE-3	3rd International Symposium on Atomic Layer Epitaxy and Related Surface Processes		Sendai, Japan, May 25-27, 1994	Japan	Jun-ichi Nishizawa	Proceedings of the 3rd International Symposium on Atomic Layer Epitaxy, Sendai, Japan, 1994 (Eds. M. Ozeki, A. Usui, Y. Aoyagi, Y. and J. Nishizawa), Appl. Surf. Sci. 82/83 (1994)
18	1995		3rd Baltic ALE Symposium		Helsinki, Finland, November 23-24, 1995	Finland	Markku Leskelä	Programme and Abstracts Leskelä, Ritala, Kansikas (eds.), Yliopistopaino 1995						http://www.worldcat.org/title/programme-and-abstracts/oclc/58169072. Chair details from Markku Leskelä
19	1995?	ACSI-x?	Atomically Controlled Surfaces and Interfaces		Raleigh, USA ???	USA	???	?								Info comes from the book Catalysis in Finland - an exciting pathway, p. 99, chapter by Lakomaa (and co-workers), row 9. According to this info, Suntola would have presented there TMA reaction results on porous catalysts.
20	1996	ALE-4	4th International Symposium on Atomic-layer Epitaxy and Related Surface Processes : ALE-4		Linz, Austria, July 29-31, 1996	Austria	Helmut Sitter	Proceedings of the 4th International Symposium on Atomic Layer Epitaxy, Linz, Austria, 1996 (Ed. H. Sitter and H. Heinrich), Appl. Surf. Sci. 112 (1997)						https://cds.cern.ch/record/325578/?ln=zh_TW
21	1997	BaltALE-4	The Fourth Baltic Symposium on Atomic Layer Epitaxy		Tartu, Estonia, October 10-11, 1997	Estonia	Arnold Rosental, Lauri Niinistö	Book of abstracts (ISBN 9985-60-401-6, (c) Institute of Physics, Tartu)						http://erb.nlib.ee/?kid=10541688
22	1999	ALENET	ESF-ALENET symposium		Helsinki, Finland, June 20-23, 1999	Finland	Markku Leskelä	(No formal book of abstracts made; instead, a bundle of abstracts was distributed to participants)						organization infro from Markku Leskelä https://tuhat.halvi.helsinki.fi/portal/en/activities/esfalenet-symposium(2ebdd6e2-dde7-4207-aa6e-4140dd41575f).html
23	2001	ALD 2001	American Vacuum Society Topical Conference on Atomic Layer Deposition		Monterey, California, USA, May 14-15, 2001	USA	Steven George	Abstract book, CD/DVD proceedings.	80						http://ald2016.com/wp-content/uploads/2016/02/ALD-Sponsorship-prospectus.pdf
24	2002	BALD-5	Baltic ALD		Tartu, Estonia, 2002	Estonia	Jaan Aarik, Arnold Rosental	?						Chair info from Markku Leskelä
25	2003	ALD '03	Atomic Layer Deposition 2003		San Jose, California, USA, August 4-6, 2013	USA	Gregory Parsons	Abstract book, CD/DVD proceedings
26	2004	ALD 2004	A joint American Vacuum Society ALD and Baltic ALD conference Celebrating 30 years of ALD		Helsinki, Finland, August 16-18, 2014	Finland	Mikko Ritala	Abstract book, CD/DVD proceedings						http://www.helsinki.fi/ALD2004/
27	2005	ALD 2005	AVS 5th International Conference on Atomic Layer Deposition		San Jose, California, USA, August 8-10, 2005	USA	Roy Gordon	Abstract book, CD/DVD proceedings
28	2005	ECS 2005	ECS 208th Meeting	Dielectric and Semiconductor Materials, Devices, and Processing: G2 Atomic Layer Deposition Applications: Challenges and Opportunities	Los Angeles, California, USA, October 16-21, 2005	USA	A.R. Londergan et al.	ECS Transactions, MA2005-02, Volume 1, Issue No. 10		21	17	38		http://ma.ecsdl.org/content/MA2005-02/12
29	2006	ALD 2006	ALD 2006		Seoul, Korea	Korea	Hyungjun Kim, Shi-Woo Rhee	Abstract book, CD/DVD proceedings.
30	2006	ECS 2006	210th ECS Meeting	Dielectric and Semiconductor Materials, Devices, and Processing: E1 Atomic Layer Deposition Applications 2	Cancun, Mexico, October 29 - November 3, 2006	Mexico	A. Londergan, S. De Gendt, J. Elam, S. Kang, G. Mathad, O. Van Der Straten	ECS Transactions, MA2006-02, Volume 3, Issue No. 15		25	12	37		http://ma.ecsdl.org/content/MA2006-02/21
31	2006	BALD 2006	Baltic ALD 2006		Oslo, Norway, June 19-20	Norway	?
32	2007	ALD 2007	7th International Conference on Atomic Layer Deposition		San Diego, California, USA, June 24-27, 2007	USA	Yves Chabal, Glen Wilk	Abstract book, CD/DVD proceedings.
33	2007	2007 ECS	212th ECS Meeting	Dielectric and Semiconductor Materials, Devices, and Processing: E1 Atomic Layer Deposition Applications 3	Washington, D.C., USA, October 7-12	USA	A. Londergan, S. Bent, S. De Gendt, J. Elam, S. Kang, O. Van der Straten	ECS Transactions, MA2007-02, Volume 11, Issue No. 7		27	8	35		http://ma.ecsdl.org/content/MA2007-02/17
34	2007		Joint E-MRS + Baltic ALD		Warsaw, Poland, 2007	Poland	?
35	2008	ALD 2008	8th International Conference on Atomic Layer Deposition		Bruges, Belgium, June 29 - July 2, 2008	Belgium	Erwin Kessels, Annelies Delabie	Abstract book, CD/DVD proceedings		89	106	195		http://www.phys.tue.nl/ALD2008/
36	2008	2008 ECS	214th ECS Meeting	Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 4	Honolulu, Hawaii, USA, October 12-17, 2008	USA	A. Londergan, S. Bent, S. De Gendt, J. Elam, S. Kang, O. Van der Straten	ECS Transactions, MA2008-02, Volume 16, Issue No. 4		34	12	46		http://ma.ecsdl.org/content/MA2008-02/24
37	2009	ALD 2009	9th International Conference on Atomic Layer Deposition		Monterey, California, USA, July 19-22, 2009	USA	Jeffrey Elam, Ana Londergan	Abstract book, CD/DVD proceedings.
38	2009	2009 ECS	216th ECS Meeting	Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 5	Vienna, Austria, October 4-9, 2009	Austria	S. De Gendt, S. Bent, A. Delabie, J. Elam, S. Kang, A. Londergan, O. Van der Straten	ECS Transactions, MA2009-02, Volume 25, Issue No. 4		39	6	45		http://ma.ecsdl.org/content/MA2009-02/23
39	2009	BALD 2009	Baltic ALD 2009		Uppsala, Sweden	Sweden
40	2010	BALD 2010	Joint Baltic ALD / GerALD Conference 2010		Hamburg, Germany, September 16-17, 2010	Germany
41	2010	ALD 2010	10th International ALD conference		Seoul, Korea	Korea	Cheol Seong Hwang, Cha Young Yoo	Abstract book, CD/DVD proceedings
42	2010	2010 ECS	2018th ECS Meeting	Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 6	Las Vegas, Nevada, USA, October 9-14	USA	J. Elam, S. Bent, S. De Gendt, A. Delabie, A. Londergan, F. Roozeboom, O. Van der Straten	ECS Transactions, MA2010-02, Volume 33, issue No. 2		42	13	55		http://ma.ecsdl.org/content/MA2010-02/20
43	2010		1st ALD Scientific Meeting 2010 China		Shanghai, China	China	Wei Zhang							http://www.picosun.com/sitenews/view/-/nid/31/ngid/6
44	2011	ALD 2011	11th International Conference on Atomic Layer Deposition		Cambridge, Massachuchetts, USA, June 26-29, 2011	USA	Jill Becker, Gary Rubloff	Abstract book, CD/DVD proceedings.						http://www2.avs.org/conferences/ald/2011/index.html
45	2011	2011 ECS	ECS 220th Binnual Meeting	Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 7	Boston, Massachusetts, USA, October 9-14, 2011	USA	J. Elam, S. Bent, S. De Gendt, A. Delabie, A. Londergan, F. Roozeboom, O. Van der Straten	ECS Meeting Abstracts, MA 2011-02, Issue No. 13, Volume 41		36	7	43		http://ma.ecsdl.org/content/MA2011-02/26
46	2012	Joint AVS-ALD & BALD 2012	12th International Conference on Atomic Layer Deposition		Dresden, Germany, June 17-20, 2012	Germany	Uwe Schröder, Mato Knez	Abstract book, CD/DVD proceedings		105	18			http://ald2012.namlab.com/
47	2012		Symposium of the ALD Lab Dresden 2012		Drezden, Germany, October 9, 2012 (at SEMICON Europa 2012)	Germany	Johan W. Bartha, Jonas Sundqvist			8				https://tu-dresden.de/die_tu_dresden/fakultaeten/fakultaet_elektrotechnik_und_informationstechnik/ihm/news/semicon2012
48	2012	2012 ECS	222d ECS Meeting	Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 8	Honolulu, Hawaii, USA, October 7-12, 2012	USA	J. Elam, S. Bent, S. De Gendt, A. Delabie, A. Londergan, F. Roozeboom, O. Van der Straten	ECS Meeting Abstracts, MA 2012-02, Issue No. 13, Volume 50		25	4	29		http://ma.ecsdl.org/content/MA2012-02/28
49	2012		1st International Conference on ALD Applications and 2nd China ALD Conference		Shanghai, China, October 15-16, 2012	China	David Wei Zhang, Wei-Min Li		~100					?	by PICOSUN report
50	2013		Finnish Symposium on ALD by the ALDCoE (with Kemianpäivät)		Helsinki, Finland, May 21, 2013	Finland	Markku Leskelä							?
51	2013	ALD 2013	13th International Conference on Atomic Layer Deposition		San Diego, California, USA, July 28-31, 2013	USA	Jiyoung Kim, Paul Ma	Abstract book, CD/DVD proceedings.		133	198	331		http://www2.avs.org/conferences/ALD/2013/index.html
52	2013	2013 ECS	224th ECS Meeting	Dielectric and Semiconductor Materials, Devices and Processing: E2 Atomic Layer Deposition Applications 9	San-Francisco, California, USA, October 27 - November 1, 2013	USA	F. Roozeboom, S. De Gendt, A. Delabie, J. W. Elam, A. Londergan, O. van der Straten	ECS Meeting Abstracts, MA2013-02, 58 pages		25	7	32		https://ecs.confex.com/ecs/224/webprogram/start.html
53	2013		Atomic Layer Deposition Symposium of the ALD Lab Dresden		Dresden, Germany, October 8, 2013 (at SEMICON Europa 2013)	Germany	Johan W. Bartha, Jonas Sundqvist							https://tu-dresden.de/die_tu_dresden/fakultaeten/fakultaet_elektrotechnik_und_informationstechnik/ihm/news/semicon2013
54	2014	Baltic ALD 2014	12th International Baltic Conference on Atomic Layer Deposition		Helsinki, Finland, May 12-13, 2014	Finland	Markku Leskelä			51	80	131		http://www.aldcoe.fi/bald2014/
55	2014	ALD 2014	14th International Conference on Atomic Layer Deposition		Kyoto, Japan, 15-18 June, 2014	Japan	Yukihiro Shimogaki and Christian Dussarrat	Abstract book, CD/DVD proceedings		109	199	308		http://www.ald2014.org/
56	2014	2014 ECS	2014 ECS and SMEQ Joint International Meeting	Electronic Materials and Processing section: P1 Atomic Layer Deposition Applications 10	Cancun, Mexico, October 5-9, 2014	Mexico	F. Roozeboom and co-organizers: Stefan De Gendt, Annelies Delabie, J. W. Elam, O. van der Straten, A. Londergan	ECS Meeting Abstracts Ma2014-02, Volume 64		30	7	37		https://ecs.confex.com/ecs/226/webprogram/start.html
57	2014		Symposium of the ALD Lab Dresden 2014		Grenoble, France, October 7, 2014 (at SEMICON Europa 2014)	France	Johan W. Bartha, Jonas Sundqvist
58	2014		The 2nd International Conference on ALD Applications & 3rd China ALD conference		Shanghai, China, October 16-17, 2014	China	Shi-Jin Ding, Yongfeng Mei	? Nanoscae Research Letters		59	57	116		http://www.c-ald.org/ald/index.html	http://www.c-ald.org/ald/CALD2014-Program.pdf
59	2015	ALDCoE	3rd Annual Seminar of Finnish Centre of Excellence in Atomic Layer Deposition		Helsinki, Finland, March 19, 2015	Finland	Markku Leskelä							http://kemianseurat.fi/kemia/kp2015/
60	2015		Nanomanufacturing: ALD FUNdamentals		Eindhoven, The Netherlands, June 8-9, 2015	Netherlands	Workshop leader: Erwin Kessels							http://www.nanomanufacturing.nl/
61	2015	ALD 2015	15th International Conference on Atomic Layer Deposition		Portland, Oregon, USA, July 1-2, 2015	USA	Charles Winter, Dae-Gyu Par	? Journal of Vacuum Science & Technology A		199	200	399		http://www2.avs.org/conferences/ALD/2015/index.html
62	2015		Workshop - ALD for Batteries		Ghent, Belgium, September 15-16, 2015	Belgium	?			13				http://www.cocoon.ugent.be/workshop-batteries
63	2015	ALD Russia 2015	International workshop Atomic Layer Deposition Russia 2015		Moscow-Dolgoprudny, Russia, September 21-23, 2015	Russia	Anatoly Malygin			32	15			http://ald-conf.ru/
64	2015	Baltic ALD 2015	13th International Baltic Conference on Atomic Layer Deposition		Tartu, Estonia, September 28-29, 2015	Estonia	Jaan Aarik and Kaupo Kukli			43	49	92		http://www.bald2015.ee/
65	2015	HERALD Day	Annual meeting of the COST project HERALD		Tartu, Estonia, September 30, 2015	Estonia	Leader: Simon Elliot			?			?	http://www.cost.eu/COST_Actions/mpns/MP1402
66	2015	ALD symposium 2015	Symposium of the ALD-Lab: Workshop on Atomic Layer Processing		Drezden, Germany, October 6, 2015 (at SEMICON Europa 2015)	Germany	Johan W. Bartha, Jonas Sundqvist.		?	12			?	http://www.semiconeuropa.org/node/2171
67	2015	2015 ECS	228th ECS Meeting	Electronic Materials and Processing section: G01 Atomic Layer Deposition Applications 11	Phoenix, Arizona, USA, October 11-16, 2015	USA	Fred Roozeboom, Jeffrey W. Elam, A. Londergan, O.van der Straten, Annelies Delabie, Stefan De Gendt	ECS Transactions (ECST) volume 69, Issue 7	?	30	5	35	?	https://ecs.confex.com/ecs/228/webprogram/Symposium2632.html
68	2016		Novel High k Application Workshop 2016		NaMLab, Drezden, Germany, March 14-15, 2015	Germany	Uwe Schroeder	?	>80	36	3	39		http://aldhistory.blogspot.ru/	http://www.namlab.com/news/events-1/novel-high-k-application-workshop
69	2016	MAM 2016	Workshop on ALD for BEOL Applications (Dedicated workshop on ALD for BEOL Applications in an extended metallization session during the Materials for Advanced Metallization MAM 2016 conference)	Metal and ALD 1, Metal and ALD 2, Pannel: ALD for BEOL	Brussels, Belgium, March 20-23, 2016.	Belgium	Christopher J. Wilson, Christophe Detavernier							http://www.mamconference.org/index.php
70	2016	ASD 2016	Area selective deposition workshop - ASD 2016		IMEC, Leuven, Belgium, April 15	Belgium								http://www2.imec.be/be_en//education/conferences/asd-workshop-2016.html
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76	2016	HERALD WG2, ALDCoE	HERALD WG2 workshop; Annual Seminar of Finnish Centre of Excellence in Atomic Layer Deposition (ALDCoE)		Helsinki, Finland, May 23-24, 2016	Finland	Markku Leskelä							http://www.aldcoe.fi/herald/index.html
77	2016		Workshop Synchrotron radiation to study atomic layer deposition		Barcelona, Spain, Jun 13-15, 2016	Spain	Massimo Tallarida, Jolien Dendooven							https://indico.cells.es/indico/event/63/
78	2016	ALD 2016	16th International Conference on Atomic Layer Deposition		Dublin, Ireland, July 24-27, 2016	Ireland	Simon Elliott, Jonas Sundqvist							http://ald2016.com/
79	2017		Joint EuroCVD21- Baltic ALD 15		Linköping, Sweden, June 11-14, 2017	Sweden	Henrik Pedersen							http://eurocvd-balticald2017.se/
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