| A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | AA | AB | AC | AD | AE | AF | AG | AH | AI | AJ | AK | |
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1 | List of ALD conferences for the ALD History Review (#10 in the VPHA Publication Plan) | ||||||||||||||||||||||||||||||||||||
2 | * Info originally from the ALD History Blog http://aldhistory.blogspot.fi | ||||||||||||||||||||||||||||||||||||
3 | * to be updated with info from all sources | ||||||||||||||||||||||||||||||||||||
4 | * Some participant info from Parsons et al. review JVSTA 2013 | ||||||||||||||||||||||||||||||||||||
5 | * To add info: please write new conference info in the VPHA-conference-to-be-added file, linked in http://vph-ald.com/VPHAopenfiles.html, direct link below | ||||||||||||||||||||||||||||||||||||
6 | https://docs.google.com/spreadsheets/d/1vWDElIVL5TTsu323bIm-T4zVqwUkLGjRwT5w8j4xv88/edit | ||||||||||||||||||||||||||||||||||||
7 | |||||||||||||||||||||||||||||||||||||
8 | Year | Shortname | Full name | Optional: Section | Location & time | Country (we will write country in an additional column, to allow country statistics) | Conference chair(s) | Records | # Attendees | # Presentations | Attendees from # Countries | Note 1: conference info from | Note 2: participant info from | ||||||||||||||||||||||||
9 | Oral | Poster | Total | ||||||||||||||||||||||||||||||||||
10 | 1984 | VTT Symposium 54 | First symposium on Atomic Layer Epitaxy | Espoo, Finland, December 13-14, 1984 | Finland | Lauri Niinistö, Ilkka Suni | Record: Proceedings, Ed. Riitta Paananen (copy can be obtained from VTT). | ? | ? | ? | Markku Leskelä gave info on the chairs | ||||||||||||||||||||||||||
11 | 1985 | UK Workshop on ALE | Standard Telecommunication Laboratories, Harlow, England | UK | ? | ? | ? | ? | Licenciate's thesis of Olli Jylhä (written here by Riikka) | ||||||||||||||||||||||||||||
12 | 1990 | ALE-1 | 1st International Symposium on Atomic Layer Epitaxy | Espoo, Finland, June 11-13, 1990 | Finland | Lauri Niinistö | Proceedings of the 1st International Symposium on Atomic Layer Epitaxy (Ed. L. Niinistö), Acta Polytechnica Scandinavica, Chemical Technology and Metallurgy Series No. 195 (1990), 209 pages. | ? | ? | ? | |||||||||||||||||||||||||||
13 | 1991 | Baltic ALD | Helsinki University of Technology - Tartu University ALE Symposium | Sjökulla/Espoo, Finland, November 15-16, 1991 | Finland | Lauri Niinistö | Program and Abstracts V. Killström, L. Niinistö (ed.) ISBN 951-22-0842-3 | Details from Markku Leskelä | |||||||||||||||||||||||||||||
14 | 1991 | ACSI-1 | ACSI-1 1ST INTERNATIONAL SYMPOSIUM ON ATOMICALLY CONTROLLED SURFACES AND INTERFACES: THE UNIVERSITY OF TOKYO, TOKYO, JAPAN, NOVEMBER 19–22, 1991 | How much here was actually ALD? Note by Riikka | |||||||||||||||||||||||||||||||||
15 | 1992 | ALE-2 | 2nd International Symposium on Atomic Layer Epitaxy | Raleigh, North Carolina, USA, June 2-5, 1992 | USA | Salah Bedair | Proceedings of the 2nd International Symposium on Atomic Layer Epitaxy, Raleigh, North Carolina, 1992, (Ed. S. M. Bedair), Thin Solid Films 225 (1993) | ||||||||||||||||||||||||||||||
16 | 1993 | ACSI-2 | Second International Symposium on Atomically Controlled Surfaces and Interfaces | Joensuu, Finland, June 16-18, 1993 | Finland | Tapani Pakkanen? | Applied Surface Science 75 (1994) 1-363 | Riikka Puurunen, via Tuula Pakkanen. Markku Leskelä told that he edited the proceedings - to be checked if he was the only Editor. | |||||||||||||||||||||||||||||
17 | 1993 | TKK - TÜ 2 | ALE Sümpoosium, 2. ALE Symposiumi, 2nd ALE Symposium | Tartu, Estonia, October 7-8, 1993 | Estonia | ? | Programme and abstracts (programm ja teesid), ISBN 9985-56-008-6, Edited by: J. Aarik and A. Jaek | ||||||||||||||||||||||||||||||
18 | 1994 | ALE-3 | 3rd International Symposium on Atomic Layer Epitaxy and Related Surface Processes | Sendai, Japan, May 25-27, 1994 | Japan | Jun-ichi Nishizawa | Proceedings of the 3rd International Symposium on Atomic Layer Epitaxy, Sendai, Japan, 1994 (Eds. M. Ozeki, A. Usui, Y. Aoyagi, Y. and J. Nishizawa), Appl. Surf. Sci. 82/83 (1994) | ||||||||||||||||||||||||||||||
19 | 1994 | ACSI-3 | North Carolina University (is this the correct way of writing?), USA | USA | Prof. Jerry L. Whitten | Tuula Pakkanen, written here by Riikka Puurunen | extrqa note: Whitten was the advisor of Prof Tapani Pakkanen's thesis | ||||||||||||||||||||||||||||||
20 | 1995 | 3rd Baltic ALE Symposium | Helsinki, Finland, November 23-24, 1995 | Finland | Markku Leskelä | Programme and Abstracts Leskelä, Ritala, Kansikas (eds.), Yliopistopaino 1995 | http://www.worldcat.org/title/programme-and-abstracts/oclc/58169072. Chair details from Markku Leskelä | ||||||||||||||||||||||||||||||
21 | 1995? | ACSI-x? | Atomically Controlled Surfaces and Interfaces | Raleigh, USA ??? | USA | ??? | ? | Info comes from the book Catalysis in Finland - an exciting pathway, p. 99, chapter by Lakomaa (and co-workers), row 9. According to this info, Suntola would have presented there TMA reaction results on porous catalysts. | |||||||||||||||||||||||||||||
22 | 1996 | ALE-4 | 4th International Symposium on Atomic-layer Epitaxy and Related Surface Processes : ALE-4 | Linz, Austria, July 29-31, 1996 | Austria | Helmut Sitter | Proceedings of the 4th International Symposium on Atomic Layer Epitaxy, Linz, Austria, 1996 (Ed. H. Sitter and H. Heinrich), Appl. Surf. Sci. 112 (1997) | https://cds.cern.ch/record/325578/?ln=zh_TW | |||||||||||||||||||||||||||||
23 | 1997 | BaltALE-4 | The Fourth Baltic Symposium on Atomic Layer Epitaxy | Tartu, Estonia, October 10-11, 1997 | Estonia | Arnold Rosental, Lauri Niinistö | Book of abstracts (ISBN 9985-60-401-6, (c) Institute of Physics, Tartu) | http://erb.nlib.ee/?kid=10541688 | |||||||||||||||||||||||||||||
24 | 1999 | ALENET | ESF-ALENET symposium | Helsinki, Finland, June 20-23, 1999 | Finland | Markku Leskelä | (No formal book of abstracts made; instead, a bundle of abstracts was distributed to participants) | organization infro from Markku Leskelä https://tuhat.halvi.helsinki.fi/portal/en/activities/esfalenet-symposium(2ebdd6e2-dde7-4207-aa6e-4140dd41575f).html | |||||||||||||||||||||||||||||
25 | 2001 | ALD 2001 | American Vacuum Society Topical Conference on Atomic Layer Deposition | Monterey, California, USA, May 14-15, 2001 | USA | Steven George | Abstract book, CD/DVD proceedings. | 80 | http://ald2016.com/wp-content/uploads/2016/02/ALD-Sponsorship-prospectus.pdf | ||||||||||||||||||||||||||||
26 | 2002 | BALD-5 | Baltic ALD | Tartu, Estonia, 2002 | Estonia | Jaan Aarik, Arnold Rosental | ? | Chair info from Markku Leskelä | |||||||||||||||||||||||||||||
27 | 2003 | ALD '03 | Atomic Layer Deposition 2003 | San Jose, California, USA, August 4-6, 2013 | USA | Gregory Parsons | Abstract book, CD/DVD proceedings | ||||||||||||||||||||||||||||||
28 | 2004 | ALD 2004 | A joint American Vacuum Society ALD and Baltic ALD conference Celebrating 30 years of ALD | Helsinki, Finland, August 16-18, 2014 | Finland | Mikko Ritala | Abstract book, CD/DVD proceedings | http://www.helsinki.fi/ALD2004/ | |||||||||||||||||||||||||||||
29 | 2005 | ALD 2005 | AVS 5th International Conference on Atomic Layer Deposition | San Jose, California, USA, August 8-10, 2005 | USA | Roy Gordon | Abstract book, CD/DVD proceedings | ||||||||||||||||||||||||||||||
30 | 2005 | ECS 2005 | ECS 208th Meeting | Dielectric and Semiconductor Materials, Devices, and Processing: G2 Atomic Layer Deposition Applications: Challenges and Opportunities | Los Angeles, California, USA, October 16-21, 2005 | USA | A.R. Londergan et al. | ECS Transactions, MA2005-02, Volume 1, Issue No. 10 | 21 | 17 | 38 | http://ma.ecsdl.org/content/MA2005-02/12 | |||||||||||||||||||||||||
31 | 2006 | ALD 2006 | ALD 2006 | Seoul, Korea | Korea | Hyungjun Kim, Shi-Woo Rhee | Abstract book, CD/DVD proceedings. | ||||||||||||||||||||||||||||||
32 | 2006 | ECS 2006 | 210th ECS Meeting | Dielectric and Semiconductor Materials, Devices, and Processing: E1 Atomic Layer Deposition Applications 2 | Cancun, Mexico, October 29 - November 3, 2006 | Mexico | A. Londergan, S. De Gendt, J. Elam, S. Kang, G. Mathad, O. Van Der Straten | ECS Transactions, MA2006-02, Volume 3, Issue No. 15 | 25 | 12 | 37 | http://ma.ecsdl.org/content/MA2006-02/21 | |||||||||||||||||||||||||
33 | 2006 | BALD 2006 | Baltic ALD 2006 | Oslo, Norway, June 19-20 | Norway | ? | |||||||||||||||||||||||||||||||
34 | 2007 | ALD 2007 | 7th International Conference on Atomic Layer Deposition | San Diego, California, USA, June 24-27, 2007 | USA | Yves Chabal, Glen Wilk | Abstract book, CD/DVD proceedings. | ||||||||||||||||||||||||||||||
35 | 2007 | 2007 ECS | 212th ECS Meeting | Dielectric and Semiconductor Materials, Devices, and Processing: E1 Atomic Layer Deposition Applications 3 | Washington, D.C., USA, October 7-12 | USA | A. Londergan, S. Bent, S. De Gendt, J. Elam, S. Kang, O. Van der Straten | ECS Transactions, MA2007-02, Volume 11, Issue No. 7 | 27 | 8 | 35 | http://ma.ecsdl.org/content/MA2007-02/17 | |||||||||||||||||||||||||
36 | 2007 | Joint E-MRS + Baltic ALD | Warsaw, Poland, 2007 | Poland | ? | ||||||||||||||||||||||||||||||||
37 | 2008 | ALD 2008 | 8th International Conference on Atomic Layer Deposition | Bruges, Belgium, June 29 - July 2, 2008 | Belgium | Erwin Kessels, Annelies Delabie | Abstract book, CD/DVD proceedings | 89 | 106 | 195 | http://www.phys.tue.nl/ALD2008/ | ||||||||||||||||||||||||||
38 | 2008 | 2008 ECS | 214th ECS Meeting | Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 4 | Honolulu, Hawaii, USA, October 12-17, 2008 | USA | A. Londergan, S. Bent, S. De Gendt, J. Elam, S. Kang, O. Van der Straten | ECS Transactions, MA2008-02, Volume 16, Issue No. 4 | 34 | 12 | 46 | http://ma.ecsdl.org/content/MA2008-02/24 | |||||||||||||||||||||||||
39 | 2009 | ALD 2009 | 9th International Conference on Atomic Layer Deposition | Monterey, California, USA, July 19-22, 2009 | USA | Jeffrey Elam, Ana Londergan | Abstract book, CD/DVD proceedings. | ||||||||||||||||||||||||||||||
40 | 2009 | 2009 ECS | 216th ECS Meeting | Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 5 | Vienna, Austria, October 4-9, 2009 | Austria | S. De Gendt, S. Bent, A. Delabie, J. Elam, S. Kang, A. Londergan, O. Van der Straten | ECS Transactions, MA2009-02, Volume 25, Issue No. 4 | 39 | 6 | 45 | http://ma.ecsdl.org/content/MA2009-02/23 | |||||||||||||||||||||||||
41 | 2009 | BALD 2009 | Baltic ALD 2009 | Uppsala, Sweden | Sweden | ||||||||||||||||||||||||||||||||
42 | 2010 | BALD 2010 | Joint Baltic ALD / GerALD Conference 2010 | Hamburg, Germany, September 16-17, 2010 | Germany | ||||||||||||||||||||||||||||||||
43 | 2010 | ALD 2010 | 10th International ALD conference | Seoul, Korea | Korea | Cheol Seong Hwang, Cha Young Yoo | Abstract book, CD/DVD proceedings | ||||||||||||||||||||||||||||||
44 | 2010 | 2010 ECS | 2018th ECS Meeting | Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 6 | Las Vegas, Nevada, USA, October 9-14 | USA | J. Elam, S. Bent, S. De Gendt, A. Delabie, A. Londergan, F. Roozeboom, O. Van der Straten | ECS Transactions, MA2010-02, Volume 33, issue No. 2 | 42 | 13 | 55 | http://ma.ecsdl.org/content/MA2010-02/20 | |||||||||||||||||||||||||
45 | 2010 | 1st ALD Scientific Meeting 2010 China | Shanghai, China | China | Wei Zhang | http://www.picosun.com/sitenews/view/-/nid/31/ngid/6 | |||||||||||||||||||||||||||||||
46 | 2011 | ALD 2011 | 11th International Conference on Atomic Layer Deposition | Cambridge, Massachuchetts, USA, June 26-29, 2011 | USA | Jill Becker, Gary Rubloff | Abstract book, CD/DVD proceedings. | http://www2.avs.org/conferences/ald/2011/index.html | |||||||||||||||||||||||||||||
47 | 2011 | 2011 ECS | ECS 220th Binnual Meeting | Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 7 | Boston, Massachusetts, USA, October 9-14, 2011 | USA | J. Elam, S. Bent, S. De Gendt, A. Delabie, A. Londergan, F. Roozeboom, O. Van der Straten | ECS Meeting Abstracts, MA 2011-02, Issue No. 13, Volume 41 | 36 | 7 | 43 | http://ma.ecsdl.org/content/MA2011-02/26 | |||||||||||||||||||||||||
48 | 2012 | Joint AVS-ALD & BALD 2012 | 12th International Conference on Atomic Layer Deposition | Dresden, Germany, June 17-20, 2012 | Germany | Uwe Schröder, Mato Knez | Abstract book, CD/DVD proceedings | 105 | 18 | http://ald2012.namlab.com/ | |||||||||||||||||||||||||||
49 | 2012 | Symposium of the ALD Lab Dresden 2012 | Drezden, Germany, October 9, 2012 (at SEMICON Europa 2012) | Germany | Johan W. Bartha, Jonas Sundqvist | 8 | https://tu-dresden.de/die_tu_dresden/fakultaeten/fakultaet_elektrotechnik_und_informationstechnik/ihm/news/semicon2012 | ||||||||||||||||||||||||||||||
50 | 2012 | 2012 ECS | 222d ECS Meeting | Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 8 | Honolulu, Hawaii, USA, October 7-12, 2012 | USA | J. Elam, S. Bent, S. De Gendt, A. Delabie, A. Londergan, F. Roozeboom, O. Van der Straten | ECS Meeting Abstracts, MA 2012-02, Issue No. 13, Volume 50 | 25 | 4 | 29 | http://ma.ecsdl.org/content/MA2012-02/28 | |||||||||||||||||||||||||
51 | 2012 | 1st International Conference on ALD Applications and 2nd China ALD Conference | Shanghai, China, October 15-16, 2012 | China | David Wei Zhang, Wei-Min Li | ~100 | ? | by PICOSUN report | |||||||||||||||||||||||||||||
52 | 2013 | Finnish Symposium on ALD by the ALDCoE (with Kemianpäivät) | Helsinki, Finland, May 21, 2013 | Finland | Markku Leskelä | ? | |||||||||||||||||||||||||||||||
53 | 2013 | ALD 2013 | 13th International Conference on Atomic Layer Deposition | San Diego, California, USA, July 28-31, 2013 | USA | Jiyoung Kim, Paul Ma | Abstract book, CD/DVD proceedings. | 133 | 198 | 331 | http://www2.avs.org/conferences/ALD/2013/index.html | ||||||||||||||||||||||||||
54 | 2013 | 2013 ECS | 224th ECS Meeting | Dielectric and Semiconductor Materials, Devices and Processing: E2 Atomic Layer Deposition Applications 9 | San-Francisco, California, USA, October 27 - November 1, 2013 | USA | F. Roozeboom, S. De Gendt, A. Delabie, J. W. Elam, A. Londergan, O. van der Straten | ECS Meeting Abstracts, MA2013-02, 58 pages | 25 | 7 | 32 | https://ecs.confex.com/ecs/224/webprogram/start.html | |||||||||||||||||||||||||
55 | 2013 | Atomic Layer Deposition Symposium of the ALD Lab Dresden | Dresden, Germany, October 8, 2013 (at SEMICON Europa 2013) | Germany | Johan W. Bartha, Jonas Sundqvist | https://tu-dresden.de/die_tu_dresden/fakultaeten/fakultaet_elektrotechnik_und_informationstechnik/ihm/news/semicon2013 | |||||||||||||||||||||||||||||||
56 | 2014 | Baltic ALD 2014 | 12th International Baltic Conference on Atomic Layer Deposition | Helsinki, Finland, May 12-13, 2014 | Finland | Markku Leskelä | 51 | 80 | 131 | http://www.aldcoe.fi/bald2014/ | |||||||||||||||||||||||||||
57 | 2014 | ALD 2014 | 14th International Conference on Atomic Layer Deposition | Kyoto, Japan, 15-18 June, 2014 | Japan | Yukihiro Shimogaki and Christian Dussarrat | Abstract book, CD/DVD proceedings | 109 | 199 | 308 | http://www.ald2014.org/ | ||||||||||||||||||||||||||
58 | 2014 | 2014 ECS | 2014 ECS and SMEQ Joint International Meeting | Electronic Materials and Processing section: P1 Atomic Layer Deposition Applications 10 | Cancun, Mexico, October 5-9, 2014 | Mexico | F. Roozeboom and co-organizers: Stefan De Gendt, Annelies Delabie, J. W. Elam, O. van der Straten, A. Londergan | ECS Meeting Abstracts Ma2014-02, Volume 64 | 30 | 7 | 37 | https://ecs.confex.com/ecs/226/webprogram/start.html | |||||||||||||||||||||||||
59 | 2014 | Symposium of the ALD Lab Dresden 2014 | Grenoble, France, October 7, 2014 (at SEMICON Europa 2014) | France | Johan W. Bartha, Jonas Sundqvist | ||||||||||||||||||||||||||||||||
60 | 2014 | The 2nd International Conference on ALD Applications & 3rd China ALD conference | Shanghai, China, October 16-17, 2014 | China | Shi-Jin Ding, Yongfeng Mei | ? Nanoscae Research Letters | 59 | 57 | 116 | http://www.c-ald.org/ald/index.html | http://www.c-ald.org/ald/CALD2014-Program.pdf | ||||||||||||||||||||||||||
61 | 2015 | ALDCoE | 3rd Annual Seminar of Finnish Centre of Excellence in Atomic Layer Deposition | Helsinki, Finland, March 19, 2015 | Finland | Markku Leskelä | http://kemianseurat.fi/kemia/kp2015/ | ||||||||||||||||||||||||||||||
62 | 2015 | Nanomanufacturing: ALD FUNdamentals | Eindhoven, The Netherlands, June 8-9, 2015 | Netherlands | Workshop leader: Erwin Kessels | http://www.nanomanufacturing.nl/ | |||||||||||||||||||||||||||||||
63 | 2015 | ALD 2015 | 15th International Conference on Atomic Layer Deposition | Portland, Oregon, USA, July 1-2, 2015 | USA | Charles Winter, Dae-Gyu Par | ? Journal of Vacuum Science & Technology A | 199 | 200 | 399 | http://www2.avs.org/conferences/ALD/2015/index.html | ||||||||||||||||||||||||||
64 | 2015 | Workshop - ALD for Batteries | Ghent, Belgium, September 15-16, 2015 | Belgium | ? | 13 | http://www.cocoon.ugent.be/workshop-batteries | ||||||||||||||||||||||||||||||
65 | 2015 | ALD Russia 2015 | International workshop Atomic Layer Deposition Russia 2015 | Moscow-Dolgoprudny, Russia, September 21-23, 2015 | Russia | Anatoly Malygin | 32 | 15 | http://ald-conf.ru/ | ||||||||||||||||||||||||||||
66 | 2015 | Baltic ALD 2015 | 13th International Baltic Conference on Atomic Layer Deposition | Tartu, Estonia, September 28-29, 2015 | Estonia | Jaan Aarik and Kaupo Kukli | 43 | 49 | 92 | http://www.bald2015.ee/ | |||||||||||||||||||||||||||
67 | 2015 | HERALD Day | Annual meeting of the COST project HERALD | Tartu, Estonia, September 30, 2015 | Estonia | Leader: Simon Elliot | ? | ? | http://www.cost.eu/COST_Actions/mpns/MP1402 | ||||||||||||||||||||||||||||
68 | 2015 | ALD symposium 2015 | Symposium of the ALD-Lab: Workshop on Atomic Layer Processing | Drezden, Germany, October 6, 2015 (at SEMICON Europa 2015) | Germany | Johan W. Bartha, Jonas Sundqvist. | ? | 12 | ? | http://www.semiconeuropa.org/node/2171 | |||||||||||||||||||||||||||
69 | 2015 | 2015 ECS | 228th ECS Meeting | Electronic Materials and Processing section: G01 Atomic Layer Deposition Applications 11 | Phoenix, Arizona, USA, October 11-16, 2015 | USA | Fred Roozeboom, Jeffrey W. Elam, A. Londergan, O.van der Straten, Annelies Delabie, Stefan De Gendt | ECS Transactions (ECST) volume 69, Issue 7 | ? | 30 | 5 | 35 | ? | https://ecs.confex.com/ecs/228/webprogram/Symposium2632.html | |||||||||||||||||||||||
70 | 2016 | Novel High k Application Workshop 2016 | NaMLab, Drezden, Germany, March 14-15, 2015 | Germany | Uwe Schroeder | ? | >80 | 36 | 3 | 39 | http://aldhistory.blogspot.ru/ | http://www.namlab.com/news/events-1/novel-high-k-application-workshop | |||||||||||||||||||||||||
71 | 2016 | MAM 2016 | Workshop on ALD for BEOL Applications (Dedicated workshop on ALD for BEOL Applications in an extended metallization session during the Materials for Advanced Metallization MAM 2016 conference) | Metal and ALD 1, Metal and ALD 2, Pannel: ALD for BEOL | Brussels, Belgium, March 20-23, 2016. | Belgium | Christopher J. Wilson, Christophe Detavernier | http://www.mamconference.org/index.php | |||||||||||||||||||||||||||||
72 | 2016 | ASD 2016 | Area selective deposition workshop - ASD 2016 | IMEC, Leuven, Belgium, April 15 | Belgium | http://www2.imec.be/be_en//education/conferences/asd-workshop-2016.html | |||||||||||||||||||||||||||||||
73 | 2016 | HERALD WG2, ALDCoE | HERALD WG2 workshop; Annual Seminar of Finnish Centre of Excellence in Atomic Layer Deposition (ALDCoE) | Helsinki, Finland, May 23-24, 2016 | Finland | Markku Leskelä | http://www.aldcoe.fi/herald/index.html | ||||||||||||||||||||||||||||||
74 | 2016 | Workshop Synchrotron radiation to study atomic layer deposition | Barcelona, Spain, Jun 13-15, 2016 | Spain | Massimo Tallarida, Jolien Dendooven | https://indico.cells.es/indico/event/63/ | |||||||||||||||||||||||||||||||
75 | 2016 | ALD 2016 | 16th International Conference on Atomic Layer Deposition | Dublin, Ireland, July 24-27, 2016 | Ireland | Simon Elliott, Jonas Sundqvist | http://ald2016.com/ | ||||||||||||||||||||||||||||||
76 | (many events missing from 2017) | ||||||||||||||||||||||||||||||||||||
77 | 2017 | Joint EuroCVD21- Baltic ALD 15 | Linköping, Sweden, June 11-14, 2017 | Sweden | Henrik Pedersen | http://eurocvd-balticald2017.se/ | |||||||||||||||||||||||||||||||
78 | 2017 | ALD 2017 | 17th International Conference on Atomic Layer Deposition | Denver CO, July 15-18, 2017 | USA | John Conley, Charles Dezelah | |||||||||||||||||||||||||||||||
79 | 2017 | AVS64 | (to be filled) | Many sessions on ALD | (to be filled) | USA | (to be filled) | ||||||||||||||||||||||||||||||
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