VPHA-ALD-conference-list
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List of ALD conferences for the ALD History Review (#10 in the VPHA Publication Plan)
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* Info originally from the ALD History Blog http://aldhistory.blogspot.fi
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* to be updated with info from all sources
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* Some participant info from Parsons et al. review JVSTA 2013
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* To add info: please write new conference info in the VPHA-conference-to-be-added file, linked in http://vph-ald.com/VPHAopenfiles.html, direct link below
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https://docs.google.com/spreadsheets/d/1vWDElIVL5TTsu323bIm-T4zVqwUkLGjRwT5w8j4xv88/edit
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YearShortnameFull name
Optional: Section
Location & time
Country
(we will write country in an additional column, to allow country statistics)
Conference
chair(s)
Records# Attendees
# Presentations
Attendees from
# Countries
Note 1: conference info from
Note 2: participant info from
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Oral PosterTotal
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1984
VTT Symposium 54
First symposium on Atomic Layer EpitaxyEspoo, Finland, December 13-14, 1984FinlandLauri Niinistö, Ilkka SuniRecord: Proceedings, Ed. Riitta Paananen (copy can be obtained from VTT).???
Markku Leskelä gave info on the chairs
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1985UK Workshop on ALE
Standard Telecommunication Laboratories, Harlow, England
UK????
Licenciate's thesis of Olli Jylhä (written here by Riikka)
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1990ALE-11st International Symposium on Atomic Layer EpitaxyEspoo, Finland, June 11-13, 1990FinlandLauri NiinistöProceedings of the 1st International Symposium on Atomic Layer Epitaxy (Ed. L. Niinistö), Acta Polytechnica Scandinavica, Chemical Technology and Metallurgy Series No. 195 (1990), 209 pages.???
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1991Baltic ALDHelsinki University of Technology - Tartu University ALE SymposiumSjökulla/Espoo, Finland, November 15-16, 1991FinlandLauri NiinistöProgram and Abstracts V. Killström, L. Niinistö (ed.) ISBN 951-22-0842-3
Details from Markku Leskelä
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1991ACSI-1
ACSI-1 1ST INTERNATIONAL SYMPOSIUM ON ATOMICALLY CONTROLLED SURFACES AND INTERFACES: THE UNIVERSITY OF TOKYO, TOKYO, JAPAN, NOVEMBER 19–22, 1991
How much here was actually ALD? Note by Riikka
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1992ALE-22nd International Symposium on Atomic Layer EpitaxyRaleigh, North Carolina, USA, June 2-5, 1992USASalah BedairProceedings of the 2nd International Symposium on Atomic Layer Epitaxy, Raleigh, North Carolina, 1992, (Ed. S. M. Bedair), Thin Solid Films 225 (1993)
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1993ACSI-2
Second International Symposium on Atomically Controlled Surfaces and Interfaces
Joensuu, Finland, June 16-18, 1993FinlandTapani Pakkanen?Applied Surface Science 75 (1994) 1-363
Riikka Puurunen, via Tuula Pakkanen. Markku Leskelä told that he edited the proceedings - to be checked if he was the only Editor.
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1993TKK - TÜ 2ALE Sümpoosium, 2. ALE Symposiumi, 2nd ALE SymposiumTartu, Estonia, October 7-8, 1993Estonia?Programme and abstracts (programm ja teesid), ISBN 9985-56-008-6, Edited by: J. Aarik and A. Jaek
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1994ALE-33rd International Symposium on Atomic Layer Epitaxy and Related Surface ProcessesSendai, Japan, May 25-27, 1994JapanJun-ichi NishizawaProceedings of the 3rd International Symposium on Atomic Layer Epitaxy, Sendai, Japan, 1994 (Eds. M. Ozeki, A. Usui, Y. Aoyagi, Y. and J. Nishizawa), Appl. Surf. Sci. 82/83 (1994)
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1994ACSI-3
North Carolina University (is this the correct way of writing?), USA
USAProf. Jerry L. Whitten
Tuula Pakkanen, written here by Riikka Puurunen
extrqa note: Whitten was the advisor of Prof Tapani Pakkanen's thesis
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19953rd Baltic ALE Symposium
Helsinki, Finland, November 23-24, 1995
FinlandMarkku Leskelä
Programme and Abstracts Leskelä, Ritala, Kansikas (eds.), Yliopistopaino 1995
http://www.worldcat.org/title/programme-and-abstracts/oclc/58169072. Chair details from Markku Leskelä
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1995?ACSI-x?Atomically Controlled Surfaces and InterfacesRaleigh, USA ???USA????
Info comes from the book Catalysis in Finland - an exciting pathway, p. 99, chapter by Lakomaa (and co-workers), row 9. According to this info, Suntola would have presented there TMA reaction results on porous catalysts.
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1996ALE-44th International Symposium on Atomic-layer Epitaxy and Related Surface Processes : ALE-4Linz, Austria, July 29-31, 1996AustriaHelmut SitterProceedings of the 4th International Symposium on Atomic Layer Epitaxy, Linz, Austria, 1996 (Ed. H. Sitter and H. Heinrich), Appl. Surf. Sci. 112 (1997)
https://cds.cern.ch/record/325578/?ln=zh_TW
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1997BaltALE-4The Fourth Baltic Symposium on Atomic Layer EpitaxyTartu, Estonia, October 10-11, 1997EstoniaArnold Rosental, Lauri NiinistöBook of abstracts (ISBN 9985-60-401-6, (c) Institute of Physics, Tartu)
http://erb.nlib.ee/?kid=10541688
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1999ALENETESF-ALENET symposiumHelsinki, Finland, June 20-23, 1999FinlandMarkku Leskelä(No formal book of abstracts made; instead, a bundle of abstracts was distributed to participants)
organization infro from Markku Leskelä
https://tuhat.halvi.helsinki.fi/portal/en/activities/esfalenet-symposium(2ebdd6e2-dde7-4207-aa6e-4140dd41575f).html
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2001ALD 2001American Vacuum Society Topical Conference on Atomic Layer DepositionMonterey, California, USA, May 14-15, 2001USASteven GeorgeAbstract book, CD/DVD proceedings.80
http://ald2016.com/wp-content/uploads/2016/02/ALD-Sponsorship-prospectus.pdf
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2002BALD-5Baltic ALDTartu, Estonia, 2002EstoniaJaan Aarik, Arnold Rosental?
Chair info from Markku Leskelä
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2003ALD '03Atomic Layer Deposition 2003San Jose, California, USA, August 4-6, 2013USAGregory ParsonsAbstract book, CD/DVD proceedings
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2004ALD 2004A joint American Vacuum Society ALD and Baltic ALD conference Celebrating 30 years of ALDHelsinki, Finland, August 16-18, 2014FinlandMikko RitalaAbstract book, CD/DVD proceedings
http://www.helsinki.fi/ALD2004/
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2005ALD 2005AVS 5th International Conference on Atomic Layer DepositionSan Jose, California, USA, August 8-10, 2005USARoy GordonAbstract book, CD/DVD proceedings
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2005ECS 2005ECS 208th Meeting
Dielectric and Semiconductor Materials, Devices, and Processing: G2 Atomic Layer Deposition Applications: Challenges and Opportunities
Los Angeles, California, USA, October 16-21, 2005USAA.R. Londergan et al.ECS Transactions, MA2005-02, Volume 1, Issue No. 10 211738
http://ma.ecsdl.org/content/MA2005-02/12
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2006ALD 2006ALD 2006Seoul, KoreaKoreaHyungjun Kim, Shi-Woo RheeAbstract book, CD/DVD proceedings.
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2006ECS 2006210th ECS Meeting
Dielectric and Semiconductor Materials, Devices, and Processing: E1 Atomic Layer Deposition Applications 2
Cancun, Mexico, October 29 - November 3, 2006MexicoA. Londergan, S. De Gendt, J. Elam, S. Kang, G. Mathad, O. Van Der StratenECS Transactions, MA2006-02, Volume 3, Issue No. 15 251237
http://ma.ecsdl.org/content/MA2006-02/21
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2006BALD 2006Baltic ALD 2006Oslo, Norway, June 19-20Norway?
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2007ALD 20077th International Conference on Atomic Layer DepositionSan Diego, California, USA, June 24-27, 2007USAYves Chabal, Glen WilkAbstract book, CD/DVD proceedings.
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20072007 ECS212th ECS Meeting
Dielectric and Semiconductor Materials, Devices, and Processing: E1 Atomic Layer Deposition Applications 3
Washington, D.C., USA, October 7-12USAA. Londergan, S. Bent, S. De Gendt, J. Elam, S. Kang, O. Van der StratenECS Transactions, MA2007-02, Volume 11, Issue No. 7 27835
http://ma.ecsdl.org/content/MA2007-02/17
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2007Joint E-MRS + Baltic ALDWarsaw, Poland, 2007Poland?
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2008ALD 20088th International Conference on Atomic Layer DepositionBruges, Belgium, June 29 - July 2, 2008BelgiumErwin Kessels, Annelies DelabieAbstract book, CD/DVD proceedings89106195
http://www.phys.tue.nl/ALD2008/
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20082008 ECS214th ECS Meeting
Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 4
Honolulu, Hawaii, USA, October 12-17, 2008USAA. Londergan, S. Bent, S. De Gendt, J. Elam, S. Kang, O. Van der StratenECS Transactions, MA2008-02, Volume 16, Issue No. 4341246
http://ma.ecsdl.org/content/MA2008-02/24
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2009ALD 20099th International Conference on Atomic Layer DepositionMonterey, California, USA, July 19-22, 2009USAJeffrey Elam, Ana LonderganAbstract book, CD/DVD proceedings.
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20092009 ECS216th ECS Meeting
Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 5
Vienna, Austria, October 4-9, 2009AustriaS. De Gendt, S. Bent, A. Delabie, J. Elam, S. Kang, A. Londergan, O. Van der StratenECS Transactions, MA2009-02, Volume 25, Issue No. 439645
http://ma.ecsdl.org/content/MA2009-02/23
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2009BALD 2009Baltic ALD 2009Uppsala, SwedenSweden
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2010BALD 2010Joint Baltic ALD / GerALD Conference 2010Hamburg, Germany, September 16-17, 2010Germany
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2010ALD 201010th International ALD conferenceSeoul, KoreaKoreaCheol Seong Hwang, Cha Young YooAbstract book, CD/DVD proceedings
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20102010 ECS2018th ECS Meeting
Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 6
Las Vegas, Nevada, USA, October 9-14USAJ. Elam, S. Bent, S. De Gendt, A. Delabie, A. Londergan, F. Roozeboom, O. Van der StratenECS Transactions, MA2010-02, Volume 33, issue No. 2421355
http://ma.ecsdl.org/content/MA2010-02/20
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20101st ALD Scientific Meeting 2010 ChinaShanghai, ChinaChinaWei Zhang
http://www.picosun.com/sitenews/view/-/nid/31/ngid/6
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2011ALD 201111th International Conference on Atomic Layer DepositionCambridge, Massachuchetts, USA, June 26-29, 2011USAJill Becker, Gary RubloffAbstract book, CD/DVD proceedings.
http://www2.avs.org/conferences/ald/2011/index.html
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20112011 ECSECS 220th Binnual Meeting
Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 7
Boston, Massachusetts, USA, October 9-14, 2011USAJ. Elam, S. Bent, S. De Gendt, A. Delabie, A. Londergan, F. Roozeboom, O. Van der StratenECS Meeting Abstracts, MA 2011-02, Issue No. 13, Volume 4136743
http://ma.ecsdl.org/content/MA2011-02/26
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2012Joint AVS-ALD & BALD 201212th International Conference on Atomic Layer DepositionDresden, Germany, June 17-20, 2012GermanyUwe Schröder, Mato KnezAbstract book, CD/DVD proceedings10518
http://ald2012.namlab.com/
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2012Symposium of the ALD Lab Dresden 2012Drezden, Germany, October 9, 2012 (at SEMICON Europa 2012)GermanyJohan W. Bartha, Jonas Sundqvist8
https://tu-dresden.de/die_tu_dresden/fakultaeten/fakultaet_elektrotechnik_und_informationstechnik/ihm/news/semicon2012
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20122012 ECS222d ECS Meeting
Dielectric and Semiconductor Materials, Devices, and Processing: E2 Atomic Layer Deposition Applications 8
Honolulu, Hawaii, USA, October 7-12, 2012
USAJ. Elam, S. Bent, S. De Gendt, A. Delabie, A. Londergan, F. Roozeboom, O. Van der StratenECS Meeting Abstracts, MA 2012-02, Issue No. 13, Volume 50 25429
http://ma.ecsdl.org/content/MA2012-02/28
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20121st International Conference on ALD Applications and 2nd China ALD ConferenceShanghai, China, October 15-16, 2012ChinaDavid Wei Zhang, Wei-Min Li~100?
by PICOSUN report
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2013Finnish Symposium on ALD by the ALDCoE (with Kemianpäivät)Helsinki, Finland, May 21, 2013FinlandMarkku Leskelä?
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2013ALD 201313th International Conference on Atomic Layer DepositionSan Diego, California, USA, July 28-31, 2013USAJiyoung Kim, Paul MaAbstract book, CD/DVD proceedings.133198331
http://www2.avs.org/conferences/ALD/2013/index.html
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20132013 ECS224th ECS Meeting
Dielectric and Semiconductor Materials, Devices and Processing: E2 Atomic Layer Deposition Applications 9
San-Francisco, California, USA, October 27 - November 1, 2013USAF. Roozeboom, S. De Gendt, A. Delabie, J. W. Elam, A. Londergan, O. van der StratenECS Meeting Abstracts, MA2013-02, 58 pages25732
https://ecs.confex.com/ecs/224/webprogram/start.html
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2013Atomic Layer Deposition Symposium of the ALD Lab DresdenDresden, Germany, October 8, 2013 (at SEMICON Europa 2013)GermanyJohan W. Bartha, Jonas Sundqvist
https://tu-dresden.de/die_tu_dresden/fakultaeten/fakultaet_elektrotechnik_und_informationstechnik/ihm/news/semicon2013
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2014Baltic ALD 201412th International Baltic Conference on Atomic Layer DepositionHelsinki, Finland, May 12-13, 2014FinlandMarkku Leskelä5180131
http://www.aldcoe.fi/bald2014/
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2014ALD 201414th International Conference on Atomic Layer DepositionKyoto, Japan, 15-18 June, 2014JapanYukihiro Shimogaki and Christian DussarratAbstract book, CD/DVD proceedings109199308
http://www.ald2014.org/
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20142014 ECS2014 ECS and SMEQ Joint International Meeting
Electronic Materials and Processing section: P1 Atomic Layer Deposition Applications 10
Cancun, Mexico, October 5-9, 2014MexicoF. Roozeboom and co-organizers: Stefan De Gendt, Annelies Delabie, J. W. Elam, O. van der Straten, A. LonderganECS Meeting Abstracts Ma2014-02, Volume 64 30737
https://ecs.confex.com/ecs/226/webprogram/start.html
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2014Symposium of the ALD Lab Dresden 2014
Grenoble, France, October 7, 2014 (at SEMICON Europa 2014)
FranceJohan W. Bartha, Jonas Sundqvist
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2014The 2nd International Conference on ALD Applications & 3rd China ALD conferenceShanghai, China, October 16-17, 2014ChinaShi-Jin Ding, Yongfeng Mei? Nanoscae Research Letters5957116
http://www.c-ald.org/ald/index.html
http://www.c-ald.org/ald/CALD2014-Program.pdf
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2015ALDCoE3rd Annual Seminar of Finnish Centre of Excellence in Atomic Layer DepositionHelsinki, Finland, March 19, 2015FinlandMarkku Leskelä
http://kemianseurat.fi/kemia/kp2015/
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2015Nanomanufacturing: ALD FUNdamentalsEindhoven, The Netherlands, June 8-9, 2015NetherlandsWorkshop leader: Erwin Kessels
http://www.nanomanufacturing.nl/
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2015ALD 201515th International Conference on Atomic Layer DepositionPortland, Oregon, USA, July 1-2, 2015USACharles Winter, Dae-Gyu Par? Journal of Vacuum Science & Technology A199200399
http://www2.avs.org/conferences/ALD/2015/index.html
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2015Workshop - ALD for Batteries
Ghent, Belgium, September 15-16, 2015
Belgium?13
http://www.cocoon.ugent.be/workshop-batteries
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2015ALD Russia 2015International workshop Atomic Layer Deposition Russia 2015Moscow-Dolgoprudny, Russia, September 21-23, 2015RussiaAnatoly Malygin3215
http://ald-conf.ru/
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2015Baltic ALD 201513th International Baltic Conference on Atomic Layer DepositionTartu, Estonia, September 28-29, 2015EstoniaJaan Aarik and Kaupo Kukli434992
http://www.bald2015.ee/
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2015HERALD DayAnnual meeting of the COST project HERALDTartu, Estonia, September 30, 2015EstoniaLeader: Simon Elliot??
http://www.cost.eu/COST_Actions/mpns/MP1402
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2015ALD symposium 2015Symposium of the ALD-Lab: Workshop on Atomic Layer ProcessingDrezden, Germany, October 6, 2015 (at SEMICON Europa 2015)GermanyJohan W. Bartha, Jonas Sundqvist.?12?
http://www.semiconeuropa.org/node/2171
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20152015 ECS228th ECS Meeting
Electronic Materials and Processing section: G01 Atomic Layer Deposition Applications 11
Phoenix, Arizona, USA, October 11-16, 2015USAFred Roozeboom, Jeffrey W. Elam, A. Londergan, O.van der Straten, Annelies Delabie, Stefan De GendtECS Transactions (ECST) volume 69, Issue 7?30535?
https://ecs.confex.com/ecs/228/webprogram/Symposium2632.html
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2016Novel High k Application Workshop 2016NaMLab, Drezden, Germany, March 14-15, 2015GermanyUwe Schroeder?>8036339
http://aldhistory.blogspot.ru/
http://www.namlab.com/news/events-1/novel-high-k-application-workshop
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2016MAM 2016Workshop on ALD for BEOL Applications (Dedicated workshop on ALD for BEOL Applications in an extended metallization session during the Materials for Advanced Metallization MAM 2016 conference)
Metal and ALD 1, Metal and ALD 2, Pannel: ALD for BEOL
Brussels, Belgium, March 20-23, 2016.BelgiumChristopher J. Wilson, Christophe Detavernier
http://www.mamconference.org/index.php
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2016ASD 2016Area selective deposition workshop - ASD 2016IMEC, Leuven, Belgium, April 15Belgium
http://www2.imec.be/be_en//education/conferences/asd-workshop-2016.html
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2016HERALD WG2, ALDCoEHERALD WG2 workshop; Annual Seminar of Finnish Centre of Excellence in Atomic Layer Deposition (ALDCoE)Helsinki, Finland, May 23-24, 2016FinlandMarkku Leskelä
http://www.aldcoe.fi/herald/index.html
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2016Workshop Synchrotron radiation to study atomic layer depositionBarcelona, Spain, Jun 13-15, 2016SpainMassimo Tallarida, Jolien Dendooven
https://indico.cells.es/indico/event/63/
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2016ALD 201616th International Conference on Atomic Layer DepositionDublin, Ireland, July 24-27, 2016IrelandSimon Elliott, Jonas Sundqvist
http://ald2016.com/
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(many events missing from 2017)
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2017Joint EuroCVD21- Baltic ALD 15Linköping, Sweden, June 11-14, 2017SwedenHenrik Pedersen
http://eurocvd-balticald2017.se/
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2017ALD 2017
17th International Conference on Atomic Layer Deposition
Denver CO, July 15-18, 2017USAJohn Conley, Charles Dezelah
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2017AVS64(to be filled)
Many sessions on ALD
(to be filled)USA(to be filled)
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