ABCDEFGHIJKLMNOP
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Thickness, (Å)Index @632.8nmComment
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center of wafer1cm from edgecenter of wafer1cm from edge
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DateMaxMinMaxMinThickness Uniformity %
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11-02-183019.582,915.131.4621.45998.24Film thicker in the center, not uniform
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01-22-193135.133,059.471.4621.46198.78Film thicker in the center, not uniform
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02-12-193061.592,887.751.4591.45997.08Film thicker in the center, not uniform
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03-15-193168.393,111.401.4591.45999.09Film thicker in the center, not uniform
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04-02-193068.402,939.101.4681.46497.85Film thicker in the center, not uniform
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05-03-193069.502,986.601.4611.45998.63Film thicker in the center, not uniform
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06-03-192990.392,801.331.4631.46196.74Film thicker in the center, not uniform
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08-06-193122.232,823.371.4611.45894.97Film thicker in the center, not uniform
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09-17-193152.202,953.901.4661.46496.75Film thicker in the center, not uniform
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10-08-193169.802,827.901.4621.45994.30Film thicker in the center, not uniform
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11-04-193165.063,039.101.4671.46797.97Film thicker in the center, not uniform
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12-02-193201.703,019.221.4681.46697.07Film thicker in the center, not uniform
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Average:3,087.492,942.001.4621.46097.57
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Avg +2%3,149.243,000.841.4921.490
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Avg-2%3,025.742,883.161.4331.431
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Max3,168.393,111.401.4681.46499.09
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Min2,990.392,801.331.4591.45894.97
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