6.52 amst MVD - FOTS QM
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MVD - amst - FOTS
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Process Specification
Process Performance
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Tool Name:amst
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Description: This monitor tracks the standard FOTS deposition by measuring the contact angle
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Recipe:FOTS standard recipe
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Layer Material: FOTS -tridecafluoro-1,1,2,2-tetrahydro octyl trichlorosilane
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Targeted Results:
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TargetDescription
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Contact angle (DI)>104°
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Non-Uniformity [%]:<5Calculated using (MAX-MIN) / (MAX+MIN) method on contact angle data
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Process Conditions:
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Plasma Pretreat: 200W 300s
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FOTS pressuresingle injection0.7T
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H2O pressuredouble injection4T
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reaction time900s
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QM Process Procedure:
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StepToolDescription
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Stock Wafer-Bare Si P-type Test wafer
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wafer clean msink 8Pirahna + HF
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FOTS recipeamst
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Measurementkrussdefault angle profile
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